JPS5386578A - Semiconductor device - Google Patents

Semiconductor device

Info

Publication number
JPS5386578A
JPS5386578A JP127777A JP127777A JPS5386578A JP S5386578 A JPS5386578 A JP S5386578A JP 127777 A JP127777 A JP 127777A JP 127777 A JP127777 A JP 127777A JP S5386578 A JPS5386578 A JP S5386578A
Authority
JP
Japan
Prior art keywords
semiconductor device
passivation films
cracking
wiring
vapor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP127777A
Other languages
Japanese (ja)
Inventor
Matsuo Ichinose
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Epson Corp
Suwa Seikosha KK
Original Assignee
Seiko Epson Corp
Suwa Seikosha KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Epson Corp, Suwa Seikosha KK filed Critical Seiko Epson Corp
Priority to JP127777A priority Critical patent/JPS5386578A/en
Publication of JPS5386578A publication Critical patent/JPS5386578A/en
Pending legal-status Critical Current

Links

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  • Electrodes Of Semiconductors (AREA)

Abstract

PURPOSE: To prevent the occurrence of cracking and provide the strength of passivation films by using vapor-grown passivation films of silicon nitride film and silicon oxide film on the Al wiring of an integrated circuit.
COPYRIGHT: (C)1978,JPO&Japio
JP127777A 1977-01-10 1977-01-10 Semiconductor device Pending JPS5386578A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP127777A JPS5386578A (en) 1977-01-10 1977-01-10 Semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP127777A JPS5386578A (en) 1977-01-10 1977-01-10 Semiconductor device

Publications (1)

Publication Number Publication Date
JPS5386578A true JPS5386578A (en) 1978-07-31

Family

ID=11496951

Family Applications (1)

Application Number Title Priority Date Filing Date
JP127777A Pending JPS5386578A (en) 1977-01-10 1977-01-10 Semiconductor device

Country Status (1)

Country Link
JP (1) JPS5386578A (en)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4852378A (en) * 1971-11-02 1973-07-23
JPS502866A (en) * 1973-05-10 1975-01-13

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4852378A (en) * 1971-11-02 1973-07-23
JPS502866A (en) * 1973-05-10 1975-01-13

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