JPS5320773A - Electron beam scanning apparatus and its scanning method - Google Patents
Electron beam scanning apparatus and its scanning methodInfo
- Publication number
- JPS5320773A JPS5320773A JP9448776A JP9448776A JPS5320773A JP S5320773 A JPS5320773 A JP S5320773A JP 9448776 A JP9448776 A JP 9448776A JP 9448776 A JP9448776 A JP 9448776A JP S5320773 A JPS5320773 A JP S5320773A
- Authority
- JP
- Japan
- Prior art keywords
- electron beam
- scanning
- linearity
- regions
- beam scanning
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Electron Beam Exposure (AREA)
Abstract
PURPOSE: To make scanning speed constant and obtain exposure patterns of uniform line widths and a high quality by cutting off an electron beam in the regions where the linearity by the frequency characteristics of the amplifier used for an integrator are inferior, and carrying scanning exposure in the regions where the linearity are high.
COPYRIGHT: (C)1978,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9448776A JPS5320773A (en) | 1976-08-10 | 1976-08-10 | Electron beam scanning apparatus and its scanning method |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9448776A JPS5320773A (en) | 1976-08-10 | 1976-08-10 | Electron beam scanning apparatus and its scanning method |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5320773A true JPS5320773A (en) | 1978-02-25 |
JPS5324790B2 JPS5324790B2 (en) | 1978-07-22 |
Family
ID=14111637
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP9448776A Granted JPS5320773A (en) | 1976-08-10 | 1976-08-10 | Electron beam scanning apparatus and its scanning method |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5320773A (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5515219A (en) * | 1978-07-18 | 1980-02-02 | Chiyou Lsi Gijutsu Kenkyu Kumiai | Electronic beam exposure device |
JP2009088202A (en) * | 2007-09-28 | 2009-04-23 | Nuflare Technology Inc | Charged-particle beam writing apparatus and charged-particle beam writing method |
US11732340B2 (en) | 2018-07-31 | 2023-08-22 | Jfe Steel Corporation | High-strength hot-rolled coated steel sheet |
-
1976
- 1976-08-10 JP JP9448776A patent/JPS5320773A/en active Granted
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5515219A (en) * | 1978-07-18 | 1980-02-02 | Chiyou Lsi Gijutsu Kenkyu Kumiai | Electronic beam exposure device |
JP2009088202A (en) * | 2007-09-28 | 2009-04-23 | Nuflare Technology Inc | Charged-particle beam writing apparatus and charged-particle beam writing method |
US11732340B2 (en) | 2018-07-31 | 2023-08-22 | Jfe Steel Corporation | High-strength hot-rolled coated steel sheet |
Also Published As
Publication number | Publication date |
---|---|
JPS5324790B2 (en) | 1978-07-22 |
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