JPS532072A - Manufacture of semiconductor - Google Patents

Manufacture of semiconductor

Info

Publication number
JPS532072A
JPS532072A JP7607376A JP7607376A JPS532072A JP S532072 A JPS532072 A JP S532072A JP 7607376 A JP7607376 A JP 7607376A JP 7607376 A JP7607376 A JP 7607376A JP S532072 A JPS532072 A JP S532072A
Authority
JP
Japan
Prior art keywords
manufacture
semiconductor
jetting
harder
absorb
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7607376A
Other languages
English (en)
Inventor
Tsutomu Akatsuka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP7607376A priority Critical patent/JPS532072A/ja
Publication of JPS532072A publication Critical patent/JPS532072A/ja
Pending legal-status Critical Current

Links

Landscapes

  • Recrystallisation Techniques (AREA)
JP7607376A 1976-06-29 1976-06-29 Manufacture of semiconductor Pending JPS532072A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7607376A JPS532072A (en) 1976-06-29 1976-06-29 Manufacture of semiconductor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7607376A JPS532072A (en) 1976-06-29 1976-06-29 Manufacture of semiconductor

Publications (1)

Publication Number Publication Date
JPS532072A true JPS532072A (en) 1978-01-10

Family

ID=13594614

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7607376A Pending JPS532072A (en) 1976-06-29 1976-06-29 Manufacture of semiconductor

Country Status (1)

Country Link
JP (1) JPS532072A (ja)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62226632A (ja) * 1986-03-28 1987-10-05 Taiyo Sanso Kk 不純物原子のゲツタリングのための格子欠陥を半導体ウエハ背面に導入する方法
JPS6386526A (ja) * 1986-09-30 1988-04-16 Taiyo Sanso Kk 不純物原子のゲツタリングのための格子欠陥を半導体ウエハ背面に導入する方法

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62226632A (ja) * 1986-03-28 1987-10-05 Taiyo Sanso Kk 不純物原子のゲツタリングのための格子欠陥を半導体ウエハ背面に導入する方法
JPS6386526A (ja) * 1986-09-30 1988-04-16 Taiyo Sanso Kk 不純物原子のゲツタリングのための格子欠陥を半導体ウエハ背面に導入する方法

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