JPS53143184A - Production of semiconductor integrated circuit - Google Patents
Production of semiconductor integrated circuitInfo
- Publication number
- JPS53143184A JPS53143184A JP5925477A JP5925477A JPS53143184A JP S53143184 A JPS53143184 A JP S53143184A JP 5925477 A JP5925477 A JP 5925477A JP 5925477 A JP5925477 A JP 5925477A JP S53143184 A JPS53143184 A JP S53143184A
- Authority
- JP
- Japan
- Prior art keywords
- production
- integrated circuit
- semiconductor integrated
- substrate
- fets
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Bipolar Integrated Circuits (AREA)
- Junction Field-Effect Transistors (AREA)
Abstract
PURPOSE: To produce n type channels for J-FETs of a relatively low concentration with good controllability and without crystal defects by dipping a Si substrate in heated phosphoric acid thereafter heating the substrate.
COPYRIGHT: (C)1978,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5925477A JPS53143184A (en) | 1977-05-20 | 1977-05-20 | Production of semiconductor integrated circuit |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5925477A JPS53143184A (en) | 1977-05-20 | 1977-05-20 | Production of semiconductor integrated circuit |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS53143184A true JPS53143184A (en) | 1978-12-13 |
Family
ID=13108052
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP5925477A Pending JPS53143184A (en) | 1977-05-20 | 1977-05-20 | Production of semiconductor integrated circuit |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS53143184A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS60117765A (en) * | 1983-11-30 | 1985-06-25 | Fujitsu Ltd | Manufacture of semiconductor device |
-
1977
- 1977-05-20 JP JP5925477A patent/JPS53143184A/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS60117765A (en) * | 1983-11-30 | 1985-06-25 | Fujitsu Ltd | Manufacture of semiconductor device |
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