JPS53143184A - Production of semiconductor integrated circuit - Google Patents

Production of semiconductor integrated circuit

Info

Publication number
JPS53143184A
JPS53143184A JP5925477A JP5925477A JPS53143184A JP S53143184 A JPS53143184 A JP S53143184A JP 5925477 A JP5925477 A JP 5925477A JP 5925477 A JP5925477 A JP 5925477A JP S53143184 A JPS53143184 A JP S53143184A
Authority
JP
Japan
Prior art keywords
production
integrated circuit
semiconductor integrated
substrate
fets
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP5925477A
Other languages
Japanese (ja)
Inventor
Tadanaka Yoneda
Eisuke Ichinohe
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP5925477A priority Critical patent/JPS53143184A/en
Publication of JPS53143184A publication Critical patent/JPS53143184A/en
Pending legal-status Critical Current

Links

Landscapes

  • Bipolar Integrated Circuits (AREA)
  • Junction Field-Effect Transistors (AREA)

Abstract

PURPOSE: To produce n type channels for J-FETs of a relatively low concentration with good controllability and without crystal defects by dipping a Si substrate in heated phosphoric acid thereafter heating the substrate.
COPYRIGHT: (C)1978,JPO&Japio
JP5925477A 1977-05-20 1977-05-20 Production of semiconductor integrated circuit Pending JPS53143184A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5925477A JPS53143184A (en) 1977-05-20 1977-05-20 Production of semiconductor integrated circuit

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5925477A JPS53143184A (en) 1977-05-20 1977-05-20 Production of semiconductor integrated circuit

Publications (1)

Publication Number Publication Date
JPS53143184A true JPS53143184A (en) 1978-12-13

Family

ID=13108052

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5925477A Pending JPS53143184A (en) 1977-05-20 1977-05-20 Production of semiconductor integrated circuit

Country Status (1)

Country Link
JP (1) JPS53143184A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60117765A (en) * 1983-11-30 1985-06-25 Fujitsu Ltd Manufacture of semiconductor device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60117765A (en) * 1983-11-30 1985-06-25 Fujitsu Ltd Manufacture of semiconductor device

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