JPS53139970A - Liquid phase epitaxial growth method of gaas crystal - Google Patents
Liquid phase epitaxial growth method of gaas crystalInfo
- Publication number
- JPS53139970A JPS53139970A JP5561577A JP5561577A JPS53139970A JP S53139970 A JPS53139970 A JP S53139970A JP 5561577 A JP5561577 A JP 5561577A JP 5561577 A JP5561577 A JP 5561577A JP S53139970 A JPS53139970 A JP S53139970A
- Authority
- JP
- Japan
- Prior art keywords
- gaas crystal
- liquid phase
- epitaxial growth
- growth method
- phase epitaxial
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Led Devices (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5561577A JPS53139970A (en) | 1977-05-13 | 1977-05-13 | Liquid phase epitaxial growth method of gaas crystal |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5561577A JPS53139970A (en) | 1977-05-13 | 1977-05-13 | Liquid phase epitaxial growth method of gaas crystal |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS53139970A true JPS53139970A (en) | 1978-12-06 |
Family
ID=13003672
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP5561577A Pending JPS53139970A (en) | 1977-05-13 | 1977-05-13 | Liquid phase epitaxial growth method of gaas crystal |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS53139970A (ja) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS63159289A (ja) * | 1986-12-23 | 1988-07-02 | Hitachi Cable Ltd | 液相エピタキシヤル成長方法及び成長装置 |
JPS63159290A (ja) * | 1986-12-23 | 1988-07-02 | Hitachi Cable Ltd | 液相エピタキシャル成長方法 |
JPH07149595A (ja) * | 1994-10-21 | 1995-06-13 | Hitachi Cable Ltd | 液相エピタキシャル成長方法 |
-
1977
- 1977-05-13 JP JP5561577A patent/JPS53139970A/ja active Pending
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS63159289A (ja) * | 1986-12-23 | 1988-07-02 | Hitachi Cable Ltd | 液相エピタキシヤル成長方法及び成長装置 |
JPS63159290A (ja) * | 1986-12-23 | 1988-07-02 | Hitachi Cable Ltd | 液相エピタキシャル成長方法 |
JPH0580439B2 (ja) * | 1986-12-23 | 1993-11-09 | Hitachi Cable | |
JPH0582356B2 (ja) * | 1986-12-23 | 1993-11-18 | Hitachi Cable | |
JPH07149595A (ja) * | 1994-10-21 | 1995-06-13 | Hitachi Cable Ltd | 液相エピタキシャル成長方法 |
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