JPS53115173A - Production of semiconductor device - Google Patents

Production of semiconductor device

Info

Publication number
JPS53115173A
JPS53115173A JP2920877A JP2920877A JPS53115173A JP S53115173 A JPS53115173 A JP S53115173A JP 2920877 A JP2920877 A JP 2920877A JP 2920877 A JP2920877 A JP 2920877A JP S53115173 A JPS53115173 A JP S53115173A
Authority
JP
Japan
Prior art keywords
production
semiconductor device
electrodes
depositing
integration
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2920877A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0415619B2 (en, 2012
Inventor
Mitsumasa Koyanagi
Yoshio Sakai
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP2920877A priority Critical patent/JPS53115173A/ja
Publication of JPS53115173A publication Critical patent/JPS53115173A/ja
Publication of JPH0415619B2 publication Critical patent/JPH0415619B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Electrodes Of Semiconductors (AREA)
  • Metal-Oxide And Bipolar Metal-Oxide Semiconductor Integrated Circuits (AREA)
JP2920877A 1977-03-18 1977-03-18 Production of semiconductor device Granted JPS53115173A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2920877A JPS53115173A (en) 1977-03-18 1977-03-18 Production of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2920877A JPS53115173A (en) 1977-03-18 1977-03-18 Production of semiconductor device

Publications (2)

Publication Number Publication Date
JPS53115173A true JPS53115173A (en) 1978-10-07
JPH0415619B2 JPH0415619B2 (en, 2012) 1992-03-18

Family

ID=12269769

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2920877A Granted JPS53115173A (en) 1977-03-18 1977-03-18 Production of semiconductor device

Country Status (1)

Country Link
JP (1) JPS53115173A (en, 2012)

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57167653A (en) * 1981-03-23 1982-10-15 Fujitsu Ltd Manufacture of semiconductor device
JPS5955054A (ja) * 1982-09-24 1984-03-29 Hitachi Ltd 半導体装置の製造方法
JPS59184523A (ja) * 1983-04-05 1984-10-19 Yokogawa Hokushin Electric Corp バイポーラトランジスタの製造方法
JPS6012754A (ja) * 1983-07-01 1985-01-23 Matsushita Electric Ind Co Ltd 半導体装置の製造方法
JPS61182254A (ja) * 1985-02-08 1986-08-14 Hitachi Ltd 半導体集積回路装置の製造方法
JPS62104170A (ja) * 1985-10-31 1987-05-14 Matsushita Electronics Corp Ｍｏｓ型半導体装置
JPH03184368A (ja) * 1989-12-13 1991-08-12 Toshiba Corp 半導体装置の製造方法

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS50142174A (en, 2012) * 1974-05-03 1975-11-15
JPS5191676A (en, 2012) * 1975-02-10 1976-08-11
JPS51147272A (en) * 1975-06-13 1976-12-17 Hitachi Ltd Manufacturing process of mis-type field effect transistor
JPS5233490A (en) * 1975-09-09 1977-03-14 Nec Corp Manufacturing process of semiconductor device
JPH0849382A (ja) * 1994-08-05 1996-02-20 Misawa Homes Co Ltd 階段の手摺構造

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS50142174A (en, 2012) * 1974-05-03 1975-11-15
JPS5191676A (en, 2012) * 1975-02-10 1976-08-11
JPS51147272A (en) * 1975-06-13 1976-12-17 Hitachi Ltd Manufacturing process of mis-type field effect transistor
JPS5233490A (en) * 1975-09-09 1977-03-14 Nec Corp Manufacturing process of semiconductor device
JPH0849382A (ja) * 1994-08-05 1996-02-20 Misawa Homes Co Ltd 階段の手摺構造

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57167653A (en) * 1981-03-23 1982-10-15 Fujitsu Ltd Manufacture of semiconductor device
JPS5955054A (ja) * 1982-09-24 1984-03-29 Hitachi Ltd 半導体装置の製造方法
JPS59184523A (ja) * 1983-04-05 1984-10-19 Yokogawa Hokushin Electric Corp バイポーラトランジスタの製造方法
JPS6012754A (ja) * 1983-07-01 1985-01-23 Matsushita Electric Ind Co Ltd 半導体装置の製造方法
JPS61182254A (ja) * 1985-02-08 1986-08-14 Hitachi Ltd 半導体集積回路装置の製造方法
JPS62104170A (ja) * 1985-10-31 1987-05-14 Matsushita Electronics Corp Ｍｏｓ型半導体装置
JPH03184368A (ja) * 1989-12-13 1991-08-12 Toshiba Corp 半導体装置の製造方法

Also Published As

Publication number Publication date
JPH0415619B2 (en, 2012) 1992-03-18

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