JPS5288276A - Liquid-phase epitaxial growth - Google Patents

Liquid-phase epitaxial growth

Info

Publication number
JPS5288276A
JPS5288276A JP409176A JP409176A JPS5288276A JP S5288276 A JPS5288276 A JP S5288276A JP 409176 A JP409176 A JP 409176A JP 409176 A JP409176 A JP 409176A JP S5288276 A JPS5288276 A JP S5288276A
Authority
JP
Japan
Prior art keywords
epitaxial growth
liquid
phase epitaxial
phase
constructing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP409176A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5440234B2 (enExample
Inventor
Masaaki Sakuta
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Oki Electric Industry Co Ltd
Original Assignee
Oki Electric Industry Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Oki Electric Industry Co Ltd filed Critical Oki Electric Industry Co Ltd
Priority to JP409176A priority Critical patent/JPS5288276A/ja
Publication of JPS5288276A publication Critical patent/JPS5288276A/ja
Publication of JPS5440234B2 publication Critical patent/JPS5440234B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
JP409176A 1976-01-19 1976-01-19 Liquid-phase epitaxial growth Granted JPS5288276A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP409176A JPS5288276A (en) 1976-01-19 1976-01-19 Liquid-phase epitaxial growth

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP409176A JPS5288276A (en) 1976-01-19 1976-01-19 Liquid-phase epitaxial growth

Publications (2)

Publication Number Publication Date
JPS5288276A true JPS5288276A (en) 1977-07-23
JPS5440234B2 JPS5440234B2 (enExample) 1979-12-03

Family

ID=11575113

Family Applications (1)

Application Number Title Priority Date Filing Date
JP409176A Granted JPS5288276A (en) 1976-01-19 1976-01-19 Liquid-phase epitaxial growth

Country Status (1)

Country Link
JP (1) JPS5288276A (enExample)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS558626U (enExample) * 1978-06-30 1980-01-21
JPS56155527A (en) * 1980-04-30 1981-12-01 Fujitsu Ltd Apparatus for liquid phase epitaxial growth

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4937569A (enExample) * 1972-08-09 1974-04-08

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4937569A (enExample) * 1972-08-09 1974-04-08

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS558626U (enExample) * 1978-06-30 1980-01-21
JPS56155527A (en) * 1980-04-30 1981-12-01 Fujitsu Ltd Apparatus for liquid phase epitaxial growth

Also Published As

Publication number Publication date
JPS5440234B2 (enExample) 1979-12-03

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