JPS5271173A - Production of semiconductor device - Google Patents

Production of semiconductor device

Info

Publication number
JPS5271173A
JPS5271173A JP50147031A JP14703175A JPS5271173A JP S5271173 A JPS5271173 A JP S5271173A JP 50147031 A JP50147031 A JP 50147031A JP 14703175 A JP14703175 A JP 14703175A JP S5271173 A JPS5271173 A JP S5271173A
Authority
JP
Japan
Prior art keywords
production
semiconductor device
etching treatment
accuracy
noserration
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP50147031A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5746666B2 (OSRAM
Inventor
Genshiro Nakamura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP50147031A priority Critical patent/JPS5271173A/ja
Publication of JPS5271173A publication Critical patent/JPS5271173A/ja
Publication of JPS5746666B2 publication Critical patent/JPS5746666B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Electrodes Of Semiconductors (AREA)
  • Bipolar Transistors (AREA)
  • Weting (AREA)
JP50147031A 1975-12-10 1975-12-10 Production of semiconductor device Granted JPS5271173A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP50147031A JPS5271173A (en) 1975-12-10 1975-12-10 Production of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP50147031A JPS5271173A (en) 1975-12-10 1975-12-10 Production of semiconductor device

Publications (2)

Publication Number Publication Date
JPS5271173A true JPS5271173A (en) 1977-06-14
JPS5746666B2 JPS5746666B2 (OSRAM) 1982-10-05

Family

ID=15420961

Family Applications (1)

Application Number Title Priority Date Filing Date
JP50147031A Granted JPS5271173A (en) 1975-12-10 1975-12-10 Production of semiconductor device

Country Status (1)

Country Link
JP (1) JPS5271173A (OSRAM)

Also Published As

Publication number Publication date
JPS5746666B2 (OSRAM) 1982-10-05

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