JPS5269280A - Production of semiconductor non-volatile method - Google Patents

Production of semiconductor non-volatile method

Info

Publication number
JPS5269280A
JPS5269280A JP14574175A JP14574175A JPS5269280A JP S5269280 A JPS5269280 A JP S5269280A JP 14574175 A JP14574175 A JP 14574175A JP 14574175 A JP14574175 A JP 14574175A JP S5269280 A JPS5269280 A JP S5269280A
Authority
JP
Japan
Prior art keywords
production
semiconductor non
volatile method
insulating film
volatile
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP14574175A
Other languages
Japanese (ja)
Other versions
JPS5915500B2 (en
Inventor
Susumu Furuike
Ginjiro Kanbara
Toshio Matsuda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electronics Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electronics Corp filed Critical Matsushita Electronics Corp
Priority to JP14574175A priority Critical patent/JPS5915500B2/en
Publication of JPS5269280A publication Critical patent/JPS5269280A/en
Publication of JPS5915500B2 publication Critical patent/JPS5915500B2/en
Expired legal-status Critical Current

Links

Landscapes

  • Bipolar Transistors (AREA)
  • Non-Volatile Memory (AREA)

Abstract

PURPOSE: To improve memory holding-property by heat-treating the 1st insulating film in NH3 gas and forming the 2nd insulating film after forming the 1st insulating film.
COPYRIGHT: (C)1977,JPO&Japio
JP14574175A 1975-12-05 1975-12-05 Hand Thai Fukihatsu Seimemorino Seizou Hohou Expired JPS5915500B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14574175A JPS5915500B2 (en) 1975-12-05 1975-12-05 Hand Thai Fukihatsu Seimemorino Seizou Hohou

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14574175A JPS5915500B2 (en) 1975-12-05 1975-12-05 Hand Thai Fukihatsu Seimemorino Seizou Hohou

Publications (2)

Publication Number Publication Date
JPS5269280A true JPS5269280A (en) 1977-06-08
JPS5915500B2 JPS5915500B2 (en) 1984-04-10

Family

ID=15392063

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14574175A Expired JPS5915500B2 (en) 1975-12-05 1975-12-05 Hand Thai Fukihatsu Seimemorino Seizou Hohou

Country Status (1)

Country Link
JP (1) JPS5915500B2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5771806A (en) * 1980-10-17 1982-05-04 Nec Corp Forming method of nitrided film

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5771806A (en) * 1980-10-17 1982-05-04 Nec Corp Forming method of nitrided film

Also Published As

Publication number Publication date
JPS5915500B2 (en) 1984-04-10

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