JPS5260993A - Manufacturing of dieelctric thin film - Google Patents

Manufacturing of dieelctric thin film

Info

Publication number
JPS5260993A
JPS5260993A JP50136957A JP13695775A JPS5260993A JP S5260993 A JPS5260993 A JP S5260993A JP 50136957 A JP50136957 A JP 50136957A JP 13695775 A JP13695775 A JP 13695775A JP S5260993 A JPS5260993 A JP S5260993A
Authority
JP
Japan
Prior art keywords
thin film
dieelctric
manufacturing
collisiion
ionization
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP50136957A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5628321B2 (enExample
Inventor
Tsuneo Mitsuyu
Kiyotaka Wasa
Shigeru Hayakawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP50136957A priority Critical patent/JPS5260993A/ja
Publication of JPS5260993A publication Critical patent/JPS5260993A/ja
Publication of JPS5628321B2 publication Critical patent/JPS5628321B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Compositions Of Oxide Ceramics (AREA)
  • Inorganic Compounds Of Heavy Metals (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Inorganic Insulating Materials (AREA)
  • Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
JP50136957A 1975-11-13 1975-11-13 Manufacturing of dieelctric thin film Granted JPS5260993A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP50136957A JPS5260993A (en) 1975-11-13 1975-11-13 Manufacturing of dieelctric thin film

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP50136957A JPS5260993A (en) 1975-11-13 1975-11-13 Manufacturing of dieelctric thin film

Publications (2)

Publication Number Publication Date
JPS5260993A true JPS5260993A (en) 1977-05-19
JPS5628321B2 JPS5628321B2 (enExample) 1981-07-01

Family

ID=15187447

Family Applications (1)

Application Number Title Priority Date Filing Date
JP50136957A Granted JPS5260993A (en) 1975-11-13 1975-11-13 Manufacturing of dieelctric thin film

Country Status (1)

Country Link
JP (1) JPS5260993A (enExample)

Also Published As

Publication number Publication date
JPS5628321B2 (enExample) 1981-07-01

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