JPS5260995A - Manufacturing of dielectric thin film - Google Patents
Manufacturing of dielectric thin filmInfo
- Publication number
- JPS5260995A JPS5260995A JP50136959A JP13695975A JPS5260995A JP S5260995 A JPS5260995 A JP S5260995A JP 50136959 A JP50136959 A JP 50136959A JP 13695975 A JP13695975 A JP 13695975A JP S5260995 A JPS5260995 A JP S5260995A
- Authority
- JP
- Japan
- Prior art keywords
- thin film
- dielectric thin
- manufacturing
- ionization
- collision
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000010409 thin film Substances 0.000 title abstract 2
- 238000004519 manufacturing process Methods 0.000 title 1
- WMWLMWRWZQELOS-UHFFFAOYSA-N bismuth(iii) oxide Chemical compound O=[Bi]O[Bi]=O WMWLMWRWZQELOS-UHFFFAOYSA-N 0.000 abstract 2
- 230000008020 evaporation Effects 0.000 abstract 1
- 238000001704 evaporation Methods 0.000 abstract 1
- QZQVBEXLDFYHSR-UHFFFAOYSA-N gallium(III) oxide Inorganic materials O=[Ga]O[Ga]=O QZQVBEXLDFYHSR-UHFFFAOYSA-N 0.000 abstract 1
- 238000000034 method Methods 0.000 abstract 1
- 238000004544 sputter deposition Methods 0.000 abstract 1
- 239000000758 substrate Substances 0.000 abstract 1
Landscapes
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
- Compositions Of Oxide Ceramics (AREA)
- Inorganic Compounds Of Heavy Metals (AREA)
- Inorganic Insulating Materials (AREA)
- Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)
Abstract
PURPOSE: To coat to form the amorphous dielectric thin film consisting of Bi2O3 including Ga2O3 by a sputtering process on the substrate which is heated by using the evaporation mechanism based on ionization by collision.
COPYRIGHT: (C)1977,JPO&Japio
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP50136959A JPS5260995A (en) | 1975-11-13 | 1975-11-13 | Manufacturing of dielectric thin film |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP50136959A JPS5260995A (en) | 1975-11-13 | 1975-11-13 | Manufacturing of dielectric thin film |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5260995A true JPS5260995A (en) | 1977-05-19 |
| JPS5623530B2 JPS5623530B2 (en) | 1981-06-01 |
Family
ID=15187489
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP50136959A Granted JPS5260995A (en) | 1975-11-13 | 1975-11-13 | Manufacturing of dielectric thin film |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5260995A (en) |
-
1975
- 1975-11-13 JP JP50136959A patent/JPS5260995A/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5623530B2 (en) | 1981-06-01 |
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