JPS5260994A - Manufacturing of dielectric thin film - Google Patents
Manufacturing of dielectric thin filmInfo
- Publication number
- JPS5260994A JPS5260994A JP50136958A JP13695875A JPS5260994A JP S5260994 A JPS5260994 A JP S5260994A JP 50136958 A JP50136958 A JP 50136958A JP 13695875 A JP13695875 A JP 13695875A JP S5260994 A JPS5260994 A JP S5260994A
- Authority
- JP
- Japan
- Prior art keywords
- thin film
- dielectric thin
- manufacturing
- ionization
- collision
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Compositions Of Oxide Ceramics (AREA)
- Inorganic Compounds Of Heavy Metals (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
- Inorganic Insulating Materials (AREA)
- Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
Abstract
PURPOSE: To coat to form the double-sided cubic structure dielectric thin film consisting of Bi2O3 including Ga2O3 by a sputtering process on the substrate which is heated by using the evaporation mechanism based on ionization by collision.
COPYRIGHT: (C)1977,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP50136958A JPS5260994A (en) | 1975-11-13 | 1975-11-13 | Manufacturing of dielectric thin film |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP50136958A JPS5260994A (en) | 1975-11-13 | 1975-11-13 | Manufacturing of dielectric thin film |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5260994A true JPS5260994A (en) | 1977-05-19 |
JPS5623529B2 JPS5623529B2 (en) | 1981-06-01 |
Family
ID=15187468
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP50136958A Granted JPS5260994A (en) | 1975-11-13 | 1975-11-13 | Manufacturing of dielectric thin film |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5260994A (en) |
-
1975
- 1975-11-13 JP JP50136958A patent/JPS5260994A/en active Granted
Also Published As
Publication number | Publication date |
---|---|
JPS5623529B2 (en) | 1981-06-01 |
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