JPS5261795A - Production of dielectric thin film - Google Patents
Production of dielectric thin filmInfo
- Publication number
- JPS5261795A JPS5261795A JP50138315A JP13831575A JPS5261795A JP S5261795 A JPS5261795 A JP S5261795A JP 50138315 A JP50138315 A JP 50138315A JP 13831575 A JP13831575 A JP 13831575A JP S5261795 A JPS5261795 A JP S5261795A
- Authority
- JP
- Japan
- Prior art keywords
- thin film
- production
- dielectric thin
- spattering
- adhering
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000010409 thin film Substances 0.000 title abstract 2
- WMWLMWRWZQELOS-UHFFFAOYSA-N bismuth(iii) oxide Chemical compound O=[Bi]O[Bi]=O WMWLMWRWZQELOS-UHFFFAOYSA-N 0.000 abstract 2
- 230000008020 evaporation Effects 0.000 abstract 1
- 238000001704 evaporation Methods 0.000 abstract 1
- 238000010849 ion bombardment Methods 0.000 abstract 1
- 238000000034 method Methods 0.000 abstract 1
Landscapes
- Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
- Compositions Of Oxide Ceramics (AREA)
- Inorganic Compounds Of Heavy Metals (AREA)
- Inorganic Insulating Materials (AREA)
Abstract
PURPOSE: To form an amorphous thin film of dielectric consisting of Bi2O3 containing ZnO on a heated base plate by spattering adhering by means of utilization of evaporation mechanism by ion bombardment method.
COPYRIGHT: (C)1977,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP50138315A JPS5261795A (en) | 1975-11-17 | 1975-11-17 | Production of dielectric thin film |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP50138315A JPS5261795A (en) | 1975-11-17 | 1975-11-17 | Production of dielectric thin film |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5261795A true JPS5261795A (en) | 1977-05-21 |
JPS5619933B2 JPS5619933B2 (en) | 1981-05-11 |
Family
ID=15219009
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP50138315A Granted JPS5261795A (en) | 1975-11-17 | 1975-11-17 | Production of dielectric thin film |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5261795A (en) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP6817020B2 (en) * | 2016-02-22 | 2021-01-20 | 株式会社タムロン | Infrared transmissive film, optical film, antireflection film, optical components, optical system and imaging device |
-
1975
- 1975-11-17 JP JP50138315A patent/JPS5261795A/en active Granted
Also Published As
Publication number | Publication date |
---|---|
JPS5619933B2 (en) | 1981-05-11 |
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