JPS5261795A - Production of dielectric thin film - Google Patents

Production of dielectric thin film

Info

Publication number
JPS5261795A
JPS5261795A JP50138315A JP13831575A JPS5261795A JP S5261795 A JPS5261795 A JP S5261795A JP 50138315 A JP50138315 A JP 50138315A JP 13831575 A JP13831575 A JP 13831575A JP S5261795 A JPS5261795 A JP S5261795A
Authority
JP
Japan
Prior art keywords
thin film
production
dielectric thin
spattering
adhering
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP50138315A
Other languages
Japanese (ja)
Other versions
JPS5619933B2 (en
Inventor
Tsuneo Mitsuyu
Kiyotaka Wasa
Shigeru Hayakawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP50138315A priority Critical patent/JPS5261795A/en
Publication of JPS5261795A publication Critical patent/JPS5261795A/en
Publication of JPS5619933B2 publication Critical patent/JPS5619933B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
  • Compositions Of Oxide Ceramics (AREA)
  • Inorganic Compounds Of Heavy Metals (AREA)
  • Inorganic Insulating Materials (AREA)

Abstract

PURPOSE: To form an amorphous thin film of dielectric consisting of Bi2O3 containing ZnO on a heated base plate by spattering adhering by means of utilization of evaporation mechanism by ion bombardment method.
COPYRIGHT: (C)1977,JPO&Japio
JP50138315A 1975-11-17 1975-11-17 Production of dielectric thin film Granted JPS5261795A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP50138315A JPS5261795A (en) 1975-11-17 1975-11-17 Production of dielectric thin film

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP50138315A JPS5261795A (en) 1975-11-17 1975-11-17 Production of dielectric thin film

Publications (2)

Publication Number Publication Date
JPS5261795A true JPS5261795A (en) 1977-05-21
JPS5619933B2 JPS5619933B2 (en) 1981-05-11

Family

ID=15219009

Family Applications (1)

Application Number Title Priority Date Filing Date
JP50138315A Granted JPS5261795A (en) 1975-11-17 1975-11-17 Production of dielectric thin film

Country Status (1)

Country Link
JP (1) JPS5261795A (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6817020B2 (en) * 2016-02-22 2021-01-20 株式会社タムロン Infrared transmissive film, optical film, antireflection film, optical components, optical system and imaging device

Also Published As

Publication number Publication date
JPS5619933B2 (en) 1981-05-11

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