JPS5260988A - Manufacturing of dielectric thin film - Google Patents
Manufacturing of dielectric thin filmInfo
- Publication number
- JPS5260988A JPS5260988A JP50136952A JP13695275A JPS5260988A JP S5260988 A JPS5260988 A JP S5260988A JP 50136952 A JP50136952 A JP 50136952A JP 13695275 A JP13695275 A JP 13695275A JP S5260988 A JPS5260988 A JP S5260988A
- Authority
- JP
- Japan
- Prior art keywords
- thin film
- dielectric thin
- manufacturing
- ionization
- tio
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000010409 thin film Substances 0.000 title abstract 2
- 238000004519 manufacturing process Methods 0.000 title 1
- 229910002116 Bi12TiO20 Inorganic materials 0.000 abstract 1
- 230000008020 evaporation Effects 0.000 abstract 1
- 238000001704 evaporation Methods 0.000 abstract 1
- 238000000034 method Methods 0.000 abstract 1
- 238000004544 sputter deposition Methods 0.000 abstract 1
- 239000000758 substrate Substances 0.000 abstract 1
Landscapes
- Inorganic Compounds Of Heavy Metals (AREA)
- Compositions Of Oxide Ceramics (AREA)
- Physical Vapour Deposition (AREA)
- Inorganic Insulating Materials (AREA)
- Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
Abstract
PURPOSE: To coat to form the double-sided cubic structure dielectric thin film consisting of Bi12TiO20 by a sputtering process on the substrate which is heated by using the evaporation mechanism based on ionization by collision.
COPYRIGHT: (C)1977,JPO&Japio
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP50136952A JPS5260988A (en) | 1975-11-13 | 1975-11-13 | Manufacturing of dielectric thin film |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP50136952A JPS5260988A (en) | 1975-11-13 | 1975-11-13 | Manufacturing of dielectric thin film |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5260988A true JPS5260988A (en) | 1977-05-19 |
| JPS5511246B2 JPS5511246B2 (en) | 1980-03-24 |
Family
ID=15187333
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP50136952A Granted JPS5260988A (en) | 1975-11-13 | 1975-11-13 | Manufacturing of dielectric thin film |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5260988A (en) |
-
1975
- 1975-11-13 JP JP50136952A patent/JPS5260988A/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5511246B2 (en) | 1980-03-24 |
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