JPS5260987A - Manufacturing of dielectric thin film - Google Patents
Manufacturing of dielectric thin filmInfo
- Publication number
- JPS5260987A JPS5260987A JP50136951A JP13695175A JPS5260987A JP S5260987 A JPS5260987 A JP S5260987A JP 50136951 A JP50136951 A JP 50136951A JP 13695175 A JP13695175 A JP 13695175A JP S5260987 A JPS5260987 A JP S5260987A
- Authority
- JP
- Japan
- Prior art keywords
- thin film
- dielectric thin
- manufacturing
- ionization
- tio
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000010409 thin film Substances 0.000 title abstract 2
- 238000004519 manufacturing process Methods 0.000 title 1
- 230000008020 evaporation Effects 0.000 abstract 1
- 238000001704 evaporation Methods 0.000 abstract 1
- 238000000034 method Methods 0.000 abstract 1
- 238000004544 sputter deposition Methods 0.000 abstract 1
- 239000000758 substrate Substances 0.000 abstract 1
Landscapes
- Inorganic Compounds Of Heavy Metals (AREA)
- Inorganic Insulating Materials (AREA)
- Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)
- Compositions Of Oxide Ceramics (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
- Physical Vapour Deposition (AREA)
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
Abstract
PURPOSE: To coat to form the body-centered cubic structure dielectric thin film consisting of Bi12TiO12 by a sputtering process on the substrate which is heated by using the evaporation mechanism based on ionization by collision.
COPYRIGHT: (C)1977,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP50136951A JPS5260987A (en) | 1975-11-13 | 1975-11-13 | Manufacturing of dielectric thin film |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP50136951A JPS5260987A (en) | 1975-11-13 | 1975-11-13 | Manufacturing of dielectric thin film |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5260987A true JPS5260987A (en) | 1977-05-19 |
JPS5511245B2 JPS5511245B2 (en) | 1980-03-24 |
Family
ID=15187311
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP50136951A Granted JPS5260987A (en) | 1975-11-13 | 1975-11-13 | Manufacturing of dielectric thin film |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5260987A (en) |
-
1975
- 1975-11-13 JP JP50136951A patent/JPS5260987A/en active Granted
Also Published As
Publication number | Publication date |
---|---|
JPS5511245B2 (en) | 1980-03-24 |
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