JPS5260987A - Manufacturing of dielectric thin film - Google Patents

Manufacturing of dielectric thin film

Info

Publication number
JPS5260987A
JPS5260987A JP50136951A JP13695175A JPS5260987A JP S5260987 A JPS5260987 A JP S5260987A JP 50136951 A JP50136951 A JP 50136951A JP 13695175 A JP13695175 A JP 13695175A JP S5260987 A JPS5260987 A JP S5260987A
Authority
JP
Japan
Prior art keywords
thin film
dielectric thin
manufacturing
ionization
tio
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP50136951A
Other languages
Japanese (ja)
Other versions
JPS5511245B2 (en
Inventor
Tsuneo Mitsuyu
Kiyotaka Wasa
Shigeru Hayakawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP50136951A priority Critical patent/JPS5260987A/en
Publication of JPS5260987A publication Critical patent/JPS5260987A/en
Publication of JPS5511245B2 publication Critical patent/JPS5511245B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Inorganic Compounds Of Heavy Metals (AREA)
  • Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)
  • Compositions Of Oxide Ceramics (AREA)
  • Inorganic Insulating Materials (AREA)
  • Physical Vapour Deposition (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)

Abstract

PURPOSE: To coat to form the body-centered cubic structure dielectric thin film consisting of Bi12TiO12 by a sputtering process on the substrate which is heated by using the evaporation mechanism based on ionization by collision.
COPYRIGHT: (C)1977,JPO&Japio
JP50136951A 1975-11-13 1975-11-13 Manufacturing of dielectric thin film Granted JPS5260987A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP50136951A JPS5260987A (en) 1975-11-13 1975-11-13 Manufacturing of dielectric thin film

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP50136951A JPS5260987A (en) 1975-11-13 1975-11-13 Manufacturing of dielectric thin film

Publications (2)

Publication Number Publication Date
JPS5260987A true JPS5260987A (en) 1977-05-19
JPS5511245B2 JPS5511245B2 (en) 1980-03-24

Family

ID=15187311

Family Applications (1)

Application Number Title Priority Date Filing Date
JP50136951A Granted JPS5260987A (en) 1975-11-13 1975-11-13 Manufacturing of dielectric thin film

Country Status (1)

Country Link
JP (1) JPS5260987A (en)

Also Published As

Publication number Publication date
JPS5511245B2 (en) 1980-03-24

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