JPS5628321B2 - - Google Patents

Info

Publication number
JPS5628321B2
JPS5628321B2 JP13695775A JP13695775A JPS5628321B2 JP S5628321 B2 JPS5628321 B2 JP S5628321B2 JP 13695775 A JP13695775 A JP 13695775A JP 13695775 A JP13695775 A JP 13695775A JP S5628321 B2 JPS5628321 B2 JP S5628321B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP13695775A
Other languages
Japanese (ja)
Other versions
JPS5260993A (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP50136957A priority Critical patent/JPS5260993A/ja
Publication of JPS5260993A publication Critical patent/JPS5260993A/ja
Publication of JPS5628321B2 publication Critical patent/JPS5628321B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Compositions Of Oxide Ceramics (AREA)
  • Inorganic Compounds Of Heavy Metals (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Inorganic Insulating Materials (AREA)
  • Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
JP50136957A 1975-11-13 1975-11-13 Manufacturing of dieelctric thin film Granted JPS5260993A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP50136957A JPS5260993A (en) 1975-11-13 1975-11-13 Manufacturing of dieelctric thin film

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP50136957A JPS5260993A (en) 1975-11-13 1975-11-13 Manufacturing of dieelctric thin film

Publications (2)

Publication Number Publication Date
JPS5260993A JPS5260993A (en) 1977-05-19
JPS5628321B2 true JPS5628321B2 (enExample) 1981-07-01

Family

ID=15187447

Family Applications (1)

Application Number Title Priority Date Filing Date
JP50136957A Granted JPS5260993A (en) 1975-11-13 1975-11-13 Manufacturing of dieelctric thin film

Country Status (1)

Country Link
JP (1) JPS5260993A (enExample)

Also Published As

Publication number Publication date
JPS5260993A (en) 1977-05-19

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