JPS5258489A - Production of semiconductor memory element - Google Patents

Production of semiconductor memory element

Info

Publication number
JPS5258489A
JPS5258489A JP50134094A JP13409475A JPS5258489A JP S5258489 A JPS5258489 A JP S5258489A JP 50134094 A JP50134094 A JP 50134094A JP 13409475 A JP13409475 A JP 13409475A JP S5258489 A JPS5258489 A JP S5258489A
Authority
JP
Japan
Prior art keywords
production
semiconductor memory
memory element
trapping region
doping
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP50134094A
Other languages
Japanese (ja)
Inventor
Seiichi Iwamatsu
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP50134094A priority Critical patent/JPS5258489A/en
Publication of JPS5258489A publication Critical patent/JPS5258489A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE:To perform avalanche injection of desired charges into trapping region by forming the charge trapping region through doping of a desired impurity into a gate insulation film by an ion implantation method, and applying a reverse bias voltage between one or both of source and drain regions and the substrate.
JP50134094A 1975-11-10 1975-11-10 Production of semiconductor memory element Pending JPS5258489A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP50134094A JPS5258489A (en) 1975-11-10 1975-11-10 Production of semiconductor memory element

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP50134094A JPS5258489A (en) 1975-11-10 1975-11-10 Production of semiconductor memory element

Publications (1)

Publication Number Publication Date
JPS5258489A true JPS5258489A (en) 1977-05-13

Family

ID=15120282

Family Applications (1)

Application Number Title Priority Date Filing Date
JP50134094A Pending JPS5258489A (en) 1975-11-10 1975-11-10 Production of semiconductor memory element

Country Status (1)

Country Link
JP (1) JPS5258489A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5153684A (en) * 1988-10-19 1992-10-06 Kabushiki Kaisha Toshiba Nonvolatile semiconductor memory device with offset transistor
WO2004021449A1 (en) * 2002-08-30 2004-03-11 Fasl Llc Semiconductor memory and method for manufacturing same

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5153684A (en) * 1988-10-19 1992-10-06 Kabushiki Kaisha Toshiba Nonvolatile semiconductor memory device with offset transistor
WO2004021449A1 (en) * 2002-08-30 2004-03-11 Fasl Llc Semiconductor memory and method for manufacturing same
US7253046B2 (en) 2002-08-30 2007-08-07 Spansion Llc. Semiconductor memory device and manufacturing method thereof
US7410857B2 (en) 2002-08-30 2008-08-12 Spansion Llc. Semiconductor memory device and manufacturing method thereof

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