JPS5236977A - Semiconductor heating furnace tube and process for production of same - Google Patents
Semiconductor heating furnace tube and process for production of sameInfo
- Publication number
- JPS5236977A JPS5236977A JP11274175A JP11274175A JPS5236977A JP S5236977 A JPS5236977 A JP S5236977A JP 11274175 A JP11274175 A JP 11274175A JP 11274175 A JP11274175 A JP 11274175A JP S5236977 A JPS5236977 A JP S5236977A
- Authority
- JP
- Japan
- Prior art keywords
- production
- same
- heating furnace
- furnace tube
- semiconductor heating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11274175A JPS5849022B2 (ja) | 1975-09-19 | 1975-09-19 | 半導体加熱炉管の製造法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11274175A JPS5849022B2 (ja) | 1975-09-19 | 1975-09-19 | 半導体加熱炉管の製造法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5236977A true JPS5236977A (en) | 1977-03-22 |
JPS5849022B2 JPS5849022B2 (ja) | 1983-11-01 |
Family
ID=14594379
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP11274175A Expired JPS5849022B2 (ja) | 1975-09-19 | 1975-09-19 | 半導体加熱炉管の製造法 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5849022B2 (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS55158622A (en) * | 1979-05-30 | 1980-12-10 | Toshiba Ceramics Co Ltd | Manufacture of silicon carbide material for semiconductor |
-
1975
- 1975-09-19 JP JP11274175A patent/JPS5849022B2/ja not_active Expired
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS55158622A (en) * | 1979-05-30 | 1980-12-10 | Toshiba Ceramics Co Ltd | Manufacture of silicon carbide material for semiconductor |
JPS6310576B2 (ja) * | 1979-05-30 | 1988-03-08 | Toshiba Ceramics Co |
Also Published As
Publication number | Publication date |
---|---|
JPS5849022B2 (ja) | 1983-11-01 |
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