JPS5227372A - Photo mask processing system and its device - Google Patents

Photo mask processing system and its device

Info

Publication number
JPS5227372A
JPS5227372A JP10303175A JP10303175A JPS5227372A JP S5227372 A JPS5227372 A JP S5227372A JP 10303175 A JP10303175 A JP 10303175A JP 10303175 A JP10303175 A JP 10303175A JP S5227372 A JPS5227372 A JP S5227372A
Authority
JP
Japan
Prior art keywords
processing system
photo mask
mask processing
roughness
minimized
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP10303175A
Other languages
English (en)
Other versions
JPS5324787B2 (ja
Inventor
Mikio Hongo
Junichi Nakabayashi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP10303175A priority Critical patent/JPS5227372A/ja
Priority to GB35575/76A priority patent/GB1554296A/en
Priority to NL7609502A priority patent/NL7609502A/xx
Priority to DE19762638474 priority patent/DE2638474A1/de
Publication of JPS5227372A publication Critical patent/JPS5227372A/ja
Priority to US05/922,369 priority patent/US4190759A/en
Publication of JPS5324787B2 publication Critical patent/JPS5324787B2/ja
Granted legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/08—Devices involving relative movement between laser beam and workpiece
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/08—Devices involving relative movement between laser beam and workpiece
    • B23K26/082—Scanning systems, i.e. devices involving movement of the laser beam relative to the laser head
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
    • G03F1/68—Preparation processes not covered by groups G03F1/20 - G03F1/50
    • G03F1/72—Repair or correction of mask defects
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/0002—Apparatus or processes for manufacturing printed circuits for manufacturing artworks for printed circuits
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/02—Apparatus or processes for manufacturing printed circuits in which the conductive material is applied to the surface of the insulating support and is thereafter removed from such areas of the surface which are not intended for current conducting or shielding
    • H05K3/027—Apparatus or processes for manufacturing printed circuits in which the conductive material is applied to the surface of the insulating support and is thereafter removed from such areas of the surface which are not intended for current conducting or shielding the conductive material being removed by irradiation, e.g. by photons, alpha or beta particles
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/22—Secondary treatment of printed circuits
    • H05K3/225—Correcting or repairing of printed circuits

Landscapes

  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Mechanical Engineering (AREA)
  • General Physics & Mathematics (AREA)
  • Preparing Plates And Mask In Photomechanical Process (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
JP10303175A 1975-08-27 1975-08-27 Photo mask processing system and its device Granted JPS5227372A (en)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP10303175A JPS5227372A (en) 1975-08-27 1975-08-27 Photo mask processing system and its device
GB35575/76A GB1554296A (en) 1975-08-27 1976-08-26 Removal of defects from photomasks
NL7609502A NL7609502A (nl) 1975-08-27 1976-08-26 Verwerking van fotomaskers voor het vervaardi- gen van geintegreerde schakelingen.
DE19762638474 DE2638474A1 (de) 1975-08-27 1976-08-26 Verfahren zur herstellung einer fotomaske
US05/922,369 US4190759A (en) 1975-08-27 1978-07-06 Processing of photomask

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10303175A JPS5227372A (en) 1975-08-27 1975-08-27 Photo mask processing system and its device

Publications (2)

Publication Number Publication Date
JPS5227372A true JPS5227372A (en) 1977-03-01
JPS5324787B2 JPS5324787B2 (ja) 1978-07-22

Family

ID=14343273

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10303175A Granted JPS5227372A (en) 1975-08-27 1975-08-27 Photo mask processing system and its device

Country Status (4)

Country Link
JP (1) JPS5227372A (ja)
DE (1) DE2638474A1 (ja)
GB (1) GB1554296A (ja)
NL (1) NL7609502A (ja)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53120377A (en) * 1977-03-30 1978-10-20 Nec Corp Laser machining apparatus for correction of photo masks
JPS5871617A (ja) * 1981-10-23 1983-04-28 Nec Corp レ−ザアニ−リング装置
JPS5892026U (ja) * 1981-12-16 1983-06-22 呉羽合繊株式会社 捲物用帯状体
JPS61168726A (ja) * 1985-01-21 1986-07-30 Norin Kogyosha:Goushi ガス遮断装置

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4548883A (en) * 1983-05-31 1985-10-22 At&T Bell Laboratories Correction of lithographic masks
US5338645A (en) * 1986-06-16 1994-08-16 Motorola, Inc. Three dimensional printed circuits
US6341009B1 (en) * 2000-02-24 2002-01-22 Quantronix Corporation Laser delivery system and method for photolithographic mask repair

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53120377A (en) * 1977-03-30 1978-10-20 Nec Corp Laser machining apparatus for correction of photo masks
JPS5541018B2 (ja) * 1977-03-30 1980-10-21
JPS5871617A (ja) * 1981-10-23 1983-04-28 Nec Corp レ−ザアニ−リング装置
JPS5892026U (ja) * 1981-12-16 1983-06-22 呉羽合繊株式会社 捲物用帯状体
JPS61168726A (ja) * 1985-01-21 1986-07-30 Norin Kogyosha:Goushi ガス遮断装置

Also Published As

Publication number Publication date
NL7609502A (nl) 1977-03-01
JPS5324787B2 (ja) 1978-07-22
GB1554296A (en) 1979-10-17
DE2638474B2 (ja) 1978-05-03
DE2638474C3 (ja) 1979-01-04
DE2638474A1 (de) 1977-03-10

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