GB1554296A - Removal of defects from photomasks - Google Patents

Removal of defects from photomasks

Info

Publication number
GB1554296A
GB1554296A GB35575/76A GB3557576A GB1554296A GB 1554296 A GB1554296 A GB 1554296A GB 35575/76 A GB35575/76 A GB 35575/76A GB 3557576 A GB3557576 A GB 3557576A GB 1554296 A GB1554296 A GB 1554296A
Authority
GB
United Kingdom
Prior art keywords
photomasks
defects
removal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB35575/76A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Publication of GB1554296A publication Critical patent/GB1554296A/en
Expired legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/08—Devices involving relative movement between laser beam and workpiece
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/08—Devices involving relative movement between laser beam and workpiece
    • B23K26/082—Scanning systems, i.e. devices involving movement of the laser beam relative to the laser head
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
    • G03F1/68—Preparation processes not covered by groups G03F1/20 - G03F1/50
    • G03F1/72—Repair or correction of mask defects
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/0002—Apparatus or processes for manufacturing printed circuits for manufacturing artworks for printed circuits
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/02—Apparatus or processes for manufacturing printed circuits in which the conductive material is applied to the surface of the insulating support and is thereafter removed from such areas of the surface which are not intended for current conducting or shielding
    • H05K3/027—Apparatus or processes for manufacturing printed circuits in which the conductive material is applied to the surface of the insulating support and is thereafter removed from such areas of the surface which are not intended for current conducting or shielding the conductive material being removed by irradiation, e.g. by photons, alpha or beta particles
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/22—Secondary treatment of printed circuits
    • H05K3/225—Correcting or repairing of printed circuits
GB35575/76A 1975-08-27 1976-08-26 Removal of defects from photomasks Expired GB1554296A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10303175A JPS5227372A (en) 1975-08-27 1975-08-27 Photo mask processing system and its device

Publications (1)

Publication Number Publication Date
GB1554296A true GB1554296A (en) 1979-10-17

Family

ID=14343273

Family Applications (1)

Application Number Title Priority Date Filing Date
GB35575/76A Expired GB1554296A (en) 1975-08-27 1976-08-26 Removal of defects from photomasks

Country Status (4)

Country Link
JP (1) JPS5227372A (en)
DE (1) DE2638474A1 (en)
GB (1) GB1554296A (en)
NL (1) NL7609502A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1130465A3 (en) * 2000-02-24 2004-09-29 Quantronix, Corp. Laser delivery system and method for photolithographic mask repair

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53120377A (en) * 1977-03-30 1978-10-20 Nec Corp Laser machining apparatus for correction of photo masks
JPS5871617A (en) * 1981-10-23 1983-04-28 Nec Corp Laser annealing apparatus
JPS5892026U (en) * 1981-12-16 1983-06-22 呉羽合繊株式会社 Rolling strips
US4548883A (en) * 1983-05-31 1985-10-22 At&T Bell Laboratories Correction of lithographic masks
JPS61168726A (en) * 1985-01-21 1986-07-30 Norin Kogyosha:Goushi Gas shut-off device
US5338645A (en) * 1986-06-16 1994-08-16 Motorola, Inc. Three dimensional printed circuits

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1130465A3 (en) * 2000-02-24 2004-09-29 Quantronix, Corp. Laser delivery system and method for photolithographic mask repair

Also Published As

Publication number Publication date
JPS5324787B2 (en) 1978-07-22
DE2638474C3 (en) 1979-01-04
DE2638474A1 (en) 1977-03-10
JPS5227372A (en) 1977-03-01
DE2638474B2 (en) 1978-05-03
NL7609502A (en) 1977-03-01

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Legal Events

Date Code Title Description
PS Patent sealed
PCNP Patent ceased through non-payment of renewal fee

Effective date: 19930826