JPS5269269A - Photomask - Google Patents
PhotomaskInfo
- Publication number
- JPS5269269A JPS5269269A JP14562575A JP14562575A JPS5269269A JP S5269269 A JPS5269269 A JP S5269269A JP 14562575 A JP14562575 A JP 14562575A JP 14562575 A JP14562575 A JP 14562575A JP S5269269 A JPS5269269 A JP S5269269A
- Authority
- JP
- Japan
- Prior art keywords
- photomask
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Preparing Plates And Mask In Photomechanical Process (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14562575A JPS5269269A (en) | 1975-12-05 | 1975-12-05 | Photomask |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14562575A JPS5269269A (en) | 1975-12-05 | 1975-12-05 | Photomask |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5269269A true JPS5269269A (en) | 1977-06-08 |
JPS5346692B2 JPS5346692B2 (en) | 1978-12-15 |
Family
ID=15389329
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP14562575A Granted JPS5269269A (en) | 1975-12-05 | 1975-12-05 | Photomask |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5269269A (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS61173251A (en) * | 1985-01-28 | 1986-08-04 | Mitsubishi Electric Corp | Production of photomask |
JPS6252550A (en) * | 1985-08-30 | 1987-03-07 | Mitsubishi Electric Corp | Photomask material |
JPS6252551A (en) * | 1985-08-30 | 1987-03-07 | Mitsubishi Electric Corp | Photomask material |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4948269A (en) * | 1972-09-14 | 1974-05-10 |
-
1975
- 1975-12-05 JP JP14562575A patent/JPS5269269A/en active Granted
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4948269A (en) * | 1972-09-14 | 1974-05-10 |
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS61173251A (en) * | 1985-01-28 | 1986-08-04 | Mitsubishi Electric Corp | Production of photomask |
JPH0434141B2 (en) * | 1985-01-28 | 1992-06-05 | Mitsubishi Electric Corp | |
JPS6252550A (en) * | 1985-08-30 | 1987-03-07 | Mitsubishi Electric Corp | Photomask material |
JPS6252551A (en) * | 1985-08-30 | 1987-03-07 | Mitsubishi Electric Corp | Photomask material |
JPH0435743B2 (en) * | 1985-08-30 | 1992-06-12 | Mitsubishi Electric Corp | |
JPH0469933B2 (en) * | 1985-08-30 | 1992-11-09 | Mitsubishi Electric Corp |
Also Published As
Publication number | Publication date |
---|---|
JPS5346692B2 (en) | 1978-12-15 |
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