JPS5269269A - Photomask - Google Patents

Photomask

Info

Publication number
JPS5269269A
JPS5269269A JP14562575A JP14562575A JPS5269269A JP S5269269 A JPS5269269 A JP S5269269A JP 14562575 A JP14562575 A JP 14562575A JP 14562575 A JP14562575 A JP 14562575A JP S5269269 A JPS5269269 A JP S5269269A
Authority
JP
Japan
Prior art keywords
photomask
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP14562575A
Other languages
Japanese (ja)
Other versions
JPS5346692B2 (en
Inventor
Satoshi Takeuchi
Satoru Matsumoto
Akira Kanaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Dai Nippon Printing Co Ltd
Original Assignee
Dai Nippon Printing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Dai Nippon Printing Co Ltd filed Critical Dai Nippon Printing Co Ltd
Priority to JP14562575A priority Critical patent/JPS5269269A/en
Publication of JPS5269269A publication Critical patent/JPS5269269A/en
Publication of JPS5346692B2 publication Critical patent/JPS5346692B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Preparing Plates And Mask In Photomechanical Process (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
JP14562575A 1975-12-05 1975-12-05 Photomask Granted JPS5269269A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14562575A JPS5269269A (en) 1975-12-05 1975-12-05 Photomask

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14562575A JPS5269269A (en) 1975-12-05 1975-12-05 Photomask

Publications (2)

Publication Number Publication Date
JPS5269269A true JPS5269269A (en) 1977-06-08
JPS5346692B2 JPS5346692B2 (en) 1978-12-15

Family

ID=15389329

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14562575A Granted JPS5269269A (en) 1975-12-05 1975-12-05 Photomask

Country Status (1)

Country Link
JP (1) JPS5269269A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61173251A (en) * 1985-01-28 1986-08-04 Mitsubishi Electric Corp Production of photomask
JPS6252550A (en) * 1985-08-30 1987-03-07 Mitsubishi Electric Corp Photomask material
JPS6252551A (en) * 1985-08-30 1987-03-07 Mitsubishi Electric Corp Photomask material

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4948269A (en) * 1972-09-14 1974-05-10

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4948269A (en) * 1972-09-14 1974-05-10

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61173251A (en) * 1985-01-28 1986-08-04 Mitsubishi Electric Corp Production of photomask
JPH0434141B2 (en) * 1985-01-28 1992-06-05 Mitsubishi Electric Corp
JPS6252550A (en) * 1985-08-30 1987-03-07 Mitsubishi Electric Corp Photomask material
JPS6252551A (en) * 1985-08-30 1987-03-07 Mitsubishi Electric Corp Photomask material
JPH0435743B2 (en) * 1985-08-30 1992-06-12 Mitsubishi Electric Corp
JPH0469933B2 (en) * 1985-08-30 1992-11-09 Mitsubishi Electric Corp

Also Published As

Publication number Publication date
JPS5346692B2 (en) 1978-12-15

Similar Documents

Publication Publication Date Title
JPS5182466A (en) Kosakukikainiokeru netsuheni no hoshohoho
JPS5269269A (en) Photomask
JPS5191348A (en) Hozonsei o jusuru yudemenrui no seizoho
JPS51108884A (en) x senkaisetsusokuteisochi
JPS5190671A (en) Hisetsuchaku hokyobutsu o mochiiru hokyoyoki
JPS5195475A (en) Hatsuhoshiito o mochiiru kyokona hokyoyoki no seizoho
JPS5197393A (en) x senshutsuryokuno seigyohoho
JPS5186992A (en) x sensochi
JPS51106374A (en) Sharyoyotogu no juhyojusetsusochi
JPS5194789A (en) x senkan no fukajotai o kanshisuru x senshindansochokairohaichi
JPS5197392A (en) x senshutsuryokuno seigyohoho
JPS51103492A (en) x senbunsekisochino sokuteihetsudo
JPS51105285A (en) Kaitentaiinkyoku x senkan
JPS51104888A (en) x senbunsekisochi
JPS51101586A (en) X senkensasochi
JPS5198075A (en) Sosagata x senkaisetsukenbihokamera
JPS5183491A (en) x sensochi
JPS5197760A (en) Henatsukyo e gatakoaano jidoshusekisochi
JPS5198196A (en) Byoninno yobuni benki o sashiireruhoho
JPS5181254A (en) Metaruchuku o ringunoshimeshirochoseihoho
JPS51106016A (en) Henatsukikoiru no dankanshisonyuhoho
JPS51106063A (en) Insatsuhaisenban no buhintanshisetsudanorimagesochi
JPS51106017A (en) Henatsukikoiru no dankanshisonyuhohooyobisochi
JPS51106002A (en) Denkimakisen no zetsuenshorihoho
JPS51105654A (en) Kukichowaki no noryokuseigyosochi