JPS5197393A - x senshutsuryokuno seigyohoho - Google Patents

x senshutsuryokuno seigyohoho

Info

Publication number
JPS5197393A
JPS5197393A JP50021660A JP2166075A JPS5197393A JP S5197393 A JPS5197393 A JP S5197393A JP 50021660 A JP50021660 A JP 50021660A JP 2166075 A JP2166075 A JP 2166075A JP S5197393 A JPS5197393 A JP S5197393A
Authority
JP
Japan
Prior art keywords
senshutsuryokuno
seigyohoho
senshutsuryokuno seigyohoho
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP50021660A
Other languages
Japanese (ja)
Other versions
JPS571879B2 (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP50021660A priority Critical patent/JPS5197393A/en
Publication of JPS5197393A publication Critical patent/JPS5197393A/en
Publication of JPS571879B2 publication Critical patent/JPS571879B2/ja
Granted legal-status Critical Current

Links

Landscapes

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JP50021660A 1975-02-21 1975-02-21 x senshutsuryokuno seigyohoho Granted JPS5197393A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP50021660A JPS5197393A (en) 1975-02-21 1975-02-21 x senshutsuryokuno seigyohoho

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP50021660A JPS5197393A (en) 1975-02-21 1975-02-21 x senshutsuryokuno seigyohoho

Publications (2)

Publication Number Publication Date
JPS5197393A true JPS5197393A (en) 1976-08-26
JPS571879B2 JPS571879B2 (en) 1982-01-13

Family

ID=12061186

Family Applications (1)

Application Number Title Priority Date Filing Date
JP50021660A Granted JPS5197393A (en) 1975-02-21 1975-02-21 x senshutsuryokuno seigyohoho

Country Status (1)

Country Link
JP (1) JPS5197393A (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2017164302A1 (en) 2016-03-25 2017-09-28 Ｊｘ金属株式会社 Ti-Nb ALLOY SPUTTERING TARGET AND METHOD FOR MANUFACTURING SAME

Also Published As

Publication number Publication date
JPS571879B2 (en) 1982-01-13

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