JPS5221768A - Producing system of semiconductor element - Google Patents
Producing system of semiconductor elementInfo
- Publication number
- JPS5221768A JPS5221768A JP9755075A JP9755075A JPS5221768A JP S5221768 A JPS5221768 A JP S5221768A JP 9755075 A JP9755075 A JP 9755075A JP 9755075 A JP9755075 A JP 9755075A JP S5221768 A JPS5221768 A JP S5221768A
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor element
- producing system
- face
- wafer
- liquid flow
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Chemically Coating (AREA)
- Electrodes Of Semiconductors (AREA)
- Weting (AREA)
Abstract
PURPOSE: To form plating film of equal thickness on face P and face N through making surface-activated liquid flow collide against face P of wafer.
COPYRIGHT: (C)1977,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9755075A JPS5221768A (en) | 1975-08-13 | 1975-08-13 | Producing system of semiconductor element |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9755075A JPS5221768A (en) | 1975-08-13 | 1975-08-13 | Producing system of semiconductor element |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5221768A true JPS5221768A (en) | 1977-02-18 |
JPS5745057B2 JPS5745057B2 (en) | 1982-09-25 |
Family
ID=14195339
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP9755075A Granted JPS5221768A (en) | 1975-08-13 | 1975-08-13 | Producing system of semiconductor element |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5221768A (en) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS58209122A (en) * | 1982-05-14 | 1983-12-06 | エヌ・ベ−・フイリツプス・フル−イランペンフアブリケン | Method of producing metal pattern finely composed on surface of metal or semiconductor |
JPS61271829A (en) * | 1985-05-28 | 1986-12-02 | Kanto Kasei Kogyo Kk | Surface-treating method for silicon wafer |
JPS6477401A (en) * | 1987-09-16 | 1989-03-23 | Aisin Aw Co | Vehicle braking power control device utilizing motor braking power |
JPH01198201A (en) * | 1988-01-29 | 1989-08-09 | Toyota Motor Corp | Controller for braking of electric automobile |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS63164053A (en) * | 1986-12-26 | 1988-07-07 | Sony Corp | Capstan device |
-
1975
- 1975-08-13 JP JP9755075A patent/JPS5221768A/en active Granted
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS58209122A (en) * | 1982-05-14 | 1983-12-06 | エヌ・ベ−・フイリツプス・フル−イランペンフアブリケン | Method of producing metal pattern finely composed on surface of metal or semiconductor |
JPS61271829A (en) * | 1985-05-28 | 1986-12-02 | Kanto Kasei Kogyo Kk | Surface-treating method for silicon wafer |
JPS6477401A (en) * | 1987-09-16 | 1989-03-23 | Aisin Aw Co | Vehicle braking power control device utilizing motor braking power |
JPH01198201A (en) * | 1988-01-29 | 1989-08-09 | Toyota Motor Corp | Controller for braking of electric automobile |
Also Published As
Publication number | Publication date |
---|---|
JPS5745057B2 (en) | 1982-09-25 |
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