JPS5267971A - Manufacture of integrated circuit wafer - Google Patents
Manufacture of integrated circuit waferInfo
- Publication number
- JPS5267971A JPS5267971A JP14473075A JP14473075A JPS5267971A JP S5267971 A JPS5267971 A JP S5267971A JP 14473075 A JP14473075 A JP 14473075A JP 14473075 A JP14473075 A JP 14473075A JP S5267971 A JPS5267971 A JP S5267971A
- Authority
- JP
- Japan
- Prior art keywords
- manufacture
- integrated circuit
- circuit wafer
- film
- oxidization
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Abstract
PURPOSE: To secure uniform performance of IC wafer by giving electrode oxidization Al film through connection between Al film on glass coat oxidization film and diffusion layer after having diffusion to also scribe line simultaneously with active element section.
COPYRIGHT: (C)1977,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14473075A JPS5267971A (en) | 1975-12-04 | 1975-12-04 | Manufacture of integrated circuit wafer |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14473075A JPS5267971A (en) | 1975-12-04 | 1975-12-04 | Manufacture of integrated circuit wafer |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5267971A true JPS5267971A (en) | 1977-06-06 |
JPS5751945B2 JPS5751945B2 (en) | 1982-11-05 |
Family
ID=15368986
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP14473075A Granted JPS5267971A (en) | 1975-12-04 | 1975-12-04 | Manufacture of integrated circuit wafer |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5267971A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPWO2016114377A1 (en) * | 2015-01-16 | 2017-04-27 | 雫石 誠 | Semiconductor device and manufacturing method thereof |
-
1975
- 1975-12-04 JP JP14473075A patent/JPS5267971A/en active Granted
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPWO2016114377A1 (en) * | 2015-01-16 | 2017-04-27 | 雫石 誠 | Semiconductor device and manufacturing method thereof |
Also Published As
Publication number | Publication date |
---|---|
JPS5751945B2 (en) | 1982-11-05 |
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