JPS52154366A - Selective etching method - Google Patents

Selective etching method

Info

Publication number
JPS52154366A
JPS52154366A JP7111976A JP7111976A JPS52154366A JP S52154366 A JPS52154366 A JP S52154366A JP 7111976 A JP7111976 A JP 7111976A JP 7111976 A JP7111976 A JP 7111976A JP S52154366 A JPS52154366 A JP S52154366A
Authority
JP
Japan
Prior art keywords
etching method
selective etching
mask
photo
disposing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7111976A
Other languages
English (en)
Inventor
Hisao Yamaguchi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP7111976A priority Critical patent/JPS52154366A/ja
Publication of JPS52154366A publication Critical patent/JPS52154366A/ja
Pending legal-status Critical Current

Links

Landscapes

  • Weting (AREA)
JP7111976A 1976-06-18 1976-06-18 Selective etching method Pending JPS52154366A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7111976A JPS52154366A (en) 1976-06-18 1976-06-18 Selective etching method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7111976A JPS52154366A (en) 1976-06-18 1976-06-18 Selective etching method

Publications (1)

Publication Number Publication Date
JPS52154366A true JPS52154366A (en) 1977-12-22

Family

ID=13451348

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7111976A Pending JPS52154366A (en) 1976-06-18 1976-06-18 Selective etching method

Country Status (1)

Country Link
JP (1) JPS52154366A (ja)

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