JPS5215268A - Method of manufacturing semiconductor device - Google Patents

Method of manufacturing semiconductor device

Info

Publication number
JPS5215268A
JPS5215268A JP50091286A JP9128675A JPS5215268A JP S5215268 A JPS5215268 A JP S5215268A JP 50091286 A JP50091286 A JP 50091286A JP 9128675 A JP9128675 A JP 9128675A JP S5215268 A JPS5215268 A JP S5215268A
Authority
JP
Japan
Prior art keywords
semiconductor device
manufacturing semiconductor
matching
mask
amask
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP50091286A
Other languages
Japanese (ja)
Inventor
Katsumi Umeda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Epson Corp
Suwa Seikosha KK
Original Assignee
Seiko Epson Corp
Suwa Seikosha KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Epson Corp, Suwa Seikosha KK filed Critical Seiko Epson Corp
Priority to JP50091286A priority Critical patent/JPS5215268A/en
Publication of JPS5215268A publication Critical patent/JPS5215268A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: To make a high accuracy mask matching possible, even when a non-transmission type mask is used by forming amask for matching on the reverse side of the substrate.
COPYRIGHT: (C)1977,JPO&Japio
JP50091286A 1975-07-25 1975-07-25 Method of manufacturing semiconductor device Pending JPS5215268A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP50091286A JPS5215268A (en) 1975-07-25 1975-07-25 Method of manufacturing semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP50091286A JPS5215268A (en) 1975-07-25 1975-07-25 Method of manufacturing semiconductor device

Publications (1)

Publication Number Publication Date
JPS5215268A true JPS5215268A (en) 1977-02-04

Family

ID=14022209

Family Applications (1)

Application Number Title Priority Date Filing Date
JP50091286A Pending JPS5215268A (en) 1975-07-25 1975-07-25 Method of manufacturing semiconductor device

Country Status (1)

Country Link
JP (1) JPS5215268A (en)

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