JPS5210068A - Method for dividing semiconductor substrate - Google Patents
Method for dividing semiconductor substrateInfo
- Publication number
- JPS5210068A JPS5210068A JP8582675A JP8582675A JPS5210068A JP S5210068 A JPS5210068 A JP S5210068A JP 8582675 A JP8582675 A JP 8582675A JP 8582675 A JP8582675 A JP 8582675A JP S5210068 A JPS5210068 A JP S5210068A
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor substrate
- dividing semiconductor
- dividing
- substrate
- avoid
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Processing Of Stones Or Stones Resemblance Materials (AREA)
- Dicing (AREA)
Abstract
PURPOSE: To avoid influence by hardness of a base on which a substrate is placed at dividing semiconductor substrate and to avoid disorder in line up of a semiconductor substrate after dividing it.
COPYRIGHT: (C)1977,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8582675A JPS5210068A (en) | 1975-07-15 | 1975-07-15 | Method for dividing semiconductor substrate |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8582675A JPS5210068A (en) | 1975-07-15 | 1975-07-15 | Method for dividing semiconductor substrate |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5210068A true JPS5210068A (en) | 1977-01-26 |
JPS5342660B2 JPS5342660B2 (en) | 1978-11-14 |
Family
ID=13869645
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP8582675A Granted JPS5210068A (en) | 1975-07-15 | 1975-07-15 | Method for dividing semiconductor substrate |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5210068A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH01167005A (en) * | 1987-12-22 | 1989-06-30 | Yamagata Gravure:Kk | Method and apparatus for packing goods after arranging the same |
-
1975
- 1975-07-15 JP JP8582675A patent/JPS5210068A/en active Granted
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH01167005A (en) * | 1987-12-22 | 1989-06-30 | Yamagata Gravure:Kk | Method and apparatus for packing goods after arranging the same |
Also Published As
Publication number | Publication date |
---|---|
JPS5342660B2 (en) | 1978-11-14 |
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