JPS51126044A - Gaseous growth method of iii-v group compounded semi-conductors - Google Patents

Gaseous growth method of iii-v group compounded semi-conductors

Info

Publication number
JPS51126044A
JPS51126044A JP12437974A JP12437974A JPS51126044A JP S51126044 A JPS51126044 A JP S51126044A JP 12437974 A JP12437974 A JP 12437974A JP 12437974 A JP12437974 A JP 12437974A JP S51126044 A JPS51126044 A JP S51126044A
Authority
JP
Japan
Prior art keywords
group
iii
growth method
conductors
gaseous
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP12437974A
Other languages
Japanese (ja)
Inventor
Hiroyuki Kasano
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP12437974A priority Critical patent/JPS51126044A/en
Publication of JPS51126044A publication Critical patent/JPS51126044A/en
Pending legal-status Critical Current

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  • Crystals, And After-Treatments Of Crystals (AREA)
  • Chemical Vapour Deposition (AREA)

Abstract

PURPOSE: The gaseous phase growth method of III-V group compunded semiconductors, the cloping level within n form crystal will not change even if the gaseous mol ratio mV/mIII changes by the growth process by making clope at the same time, and mixing by a fixed rate, the elements selected, individually, by the periodic law stages IV group and VI group.
COPYRIGHT: (C)1976,JPO&Japio
JP12437974A 1974-10-30 1974-10-30 Gaseous growth method of iii-v group compounded semi-conductors Pending JPS51126044A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12437974A JPS51126044A (en) 1974-10-30 1974-10-30 Gaseous growth method of iii-v group compounded semi-conductors

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12437974A JPS51126044A (en) 1974-10-30 1974-10-30 Gaseous growth method of iii-v group compounded semi-conductors

Publications (1)

Publication Number Publication Date
JPS51126044A true JPS51126044A (en) 1976-11-02

Family

ID=14883937

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12437974A Pending JPS51126044A (en) 1974-10-30 1974-10-30 Gaseous growth method of iii-v group compounded semi-conductors

Country Status (1)

Country Link
JP (1) JPS51126044A (en)

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