JPS51117199A - Method of making single crystal - Google Patents

Method of making single crystal

Info

Publication number
JPS51117199A
JPS51117199A JP51029398A JP2939876A JPS51117199A JP S51117199 A JPS51117199 A JP S51117199A JP 51029398 A JP51029398 A JP 51029398A JP 2939876 A JP2939876 A JP 2939876A JP S51117199 A JPS51117199 A JP S51117199A
Authority
JP
Japan
Prior art keywords
single crystal
making single
making
crystal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP51029398A
Other languages
English (en)
Other versions
JPS5617319B2 (ja
Inventor
Mishieru Jiakobu Dai
Fuiritsupu Are Jiyan
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Koninklijke Philips NV
Original Assignee
Philips Gloeilampenfabrieken NV
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from FR7508615A external-priority patent/FR2304401A1/fr
Priority claimed from FR7508613A external-priority patent/FR2304399A1/fr
Priority claimed from FR7508612A external-priority patent/FR2304398A1/fr
Application filed by Philips Gloeilampenfabrieken NV filed Critical Philips Gloeilampenfabrieken NV
Publication of JPS51117199A publication Critical patent/JPS51117199A/ja
Publication of JPS5617319B2 publication Critical patent/JPS5617319B2/ja
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01G—COMPOUNDS CONTAINING METALS NOT COVERED BY SUBCLASSES C01D OR C01F
    • C01G15/00—Compounds of gallium, indium or thallium
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B25/00—Single-crystal growth by chemical reaction of reactive gases, e.g. chemical vapour-deposition growth
    • C30B25/02—Epitaxial-layer growth
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S118/00—Coating apparatus
    • Y10S118/90—Semiconductor vapor doping
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S148/00—Metal treatment
    • Y10S148/003—Anneal
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S148/00—Metal treatment
    • Y10S148/006—Apparatus
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S148/00—Metal treatment
    • Y10S148/025—Deposition multi-step
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S148/00—Metal treatment
    • Y10S148/057—Gas flow control
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S148/00—Metal treatment
    • Y10S148/065—Gp III-V generic compounds-processing
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S148/00—Metal treatment
    • Y10S148/113—Nitrides of boron or aluminum or gallium
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S148/00—Metal treatment
    • Y10S148/15—Silicon on sapphire SOS

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Inorganic Chemistry (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
JP51029398A 1975-03-19 1976-03-19 Method of making single crystal Granted JPS51117199A (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
FR7508615A FR2304401A1 (fr) 1975-03-19 1975-03-19 Procede d'obtention de monocristaux de nitrure de gallium de grande surface
FR7508613A FR2304399A1 (fr) 1975-03-19 1975-03-19 Procede d'obtention par croissance cristalline en phase vapeur de monocristaux de nitrure de gallium
FR7508612A FR2304398A1 (fr) 1975-03-19 1975-03-19 Procede d'obtention par heteroepitaxie en phase vapeur de monocristaux de nitrure de gallium

Publications (2)

Publication Number Publication Date
JPS51117199A true JPS51117199A (en) 1976-10-15
JPS5617319B2 JPS5617319B2 (ja) 1981-04-21

Family

ID=27250428

Family Applications (1)

Application Number Title Priority Date Filing Date
JP51029398A Granted JPS51117199A (en) 1975-03-19 1976-03-19 Method of making single crystal

Country Status (6)

Country Link
US (1) US4144116A (ja)
JP (1) JPS51117199A (ja)
CA (1) CA1071068A (ja)
DE (1) DE2609907C2 (ja)
GB (1) GB1536586A (ja)
IT (1) IT1058440B (ja)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02188912A (ja) * 1989-01-17 1990-07-25 Nec Corp ３‐５族化合物半導体の選択成長方法
JPH05183189A (ja) * 1991-11-08 1993-07-23 Nichia Chem Ind Ltd ｐ型窒化ガリウム系化合物半導体の製造方法。

Families Citing this family (74)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4279670A (en) * 1979-08-06 1981-07-21 Raytheon Company Semiconductor device manufacturing methods utilizing a predetermined flow of reactive substance over a dopant material
JPS6055996B2 (ja) * 1979-12-05 1985-12-07 松下電器産業株式会社 電場発光半導体装置
JPS57191822U (ja) * 1981-06-01 1982-12-04
JPS5840522U (ja) * 1981-09-10 1983-03-17 三菱重工業株式会社 内燃機関の燃焼室
JPS5867921A (ja) * 1981-10-16 1983-04-22 Mitsubishi Heavy Ind Ltd 内燃機関の燃焼室
JPS5867922A (ja) * 1981-10-17 1983-04-22 Mitsubishi Heavy Ind Ltd 内燃機関の燃焼室
JPS5870022A (ja) * 1981-10-23 1983-04-26 Mitsubishi Heavy Ind Ltd 内燃機関の燃焼室
JPS5863325U (ja) * 1981-10-23 1983-04-28 三菱重工業株式会社 内燃機関の燃焼室
JPS5875919U (ja) * 1981-11-18 1983-05-23 三菱自動車工業株式会社 デイ−ゼルエンジンの燃焼室
JPS5913631U (ja) * 1982-07-16 1984-01-27 三菱自動車工業株式会社 デイ−ゼルエンジンの燃焼室
US4671845A (en) * 1985-03-22 1987-06-09 The United States Of America As Represented By The Secretary Of The Navy Method for producing high quality germanium-germanium nitride interfaces for germanium semiconductors and device produced thereby
JPS62119196A (ja) * 1985-11-18 1987-05-30 Univ Nagoya 化合物半導体の成長方法
JPH0223789Y2 (ja) * 1987-02-24 1990-06-28
US4901670A (en) * 1988-08-22 1990-02-20 Santa Barbara Research Center Elemental mercury source for metal-organic chemical vapor deposition
US4985281A (en) * 1988-08-22 1991-01-15 Santa Barbara Research Center Elemental mercury source for metal-organic chemical vapor deposition
US7235819B2 (en) * 1991-03-18 2007-06-26 The Trustees Of Boston University Semiconductor device having group III nitride buffer layer and growth layers
US5633192A (en) * 1991-03-18 1997-05-27 Boston University Method for epitaxially growing gallium nitride layers
EP0576566B1 (en) * 1991-03-18 1999-05-26 Trustees Of Boston University A method for the preparation and doping of highly insulating monocrystalline gallium nitride thin films
PL173917B1 (pl) * 1993-08-10 1998-05-29 Ct Badan Wysokocisnieniowych P Sposób wytwarzania krystalicznej struktury wielowarstwowej
US5587014A (en) * 1993-12-22 1996-12-24 Sumitomo Chemical Company, Limited Method for manufacturing group III-V compound semiconductor crystals
US6440823B1 (en) 1994-01-27 2002-08-27 Advanced Technology Materials, Inc. Low defect density (Ga, Al, In)N and HVPE process for making same
US5679152A (en) * 1994-01-27 1997-10-21 Advanced Technology Materials, Inc. Method of making a single crystals Ga*N article
US6996150B1 (en) 1994-09-14 2006-02-07 Rohm Co., Ltd. Semiconductor light emitting device and manufacturing method therefor
US5677538A (en) * 1995-07-07 1997-10-14 Trustees Of Boston University Photodetectors using III-V nitrides
JP2947156B2 (ja) * 1996-02-29 1999-09-13 双葉電子工業株式会社 蛍光体の製造方法
WO1998019964A1 (en) * 1996-11-04 1998-05-14 Case Western Reserve University Method for the synthesis of group iii nitride crystals
US6533874B1 (en) 1996-12-03 2003-03-18 Advanced Technology Materials, Inc. GaN-based devices using thick (Ga, Al, In)N base layers
US6284395B1 (en) 1997-03-05 2001-09-04 Corning Applied Technologies Corp. Nitride based semiconductors and devices
JP3491492B2 (ja) * 1997-04-09 2004-01-26 松下電器産業株式会社 窒化ガリウム結晶の製造方法
US6559038B2 (en) 1997-11-18 2003-05-06 Technologies And Devices International, Inc. Method for growing p-n heterojunction-based structures utilizing HVPE techniques
US20020047135A1 (en) * 1997-11-18 2002-04-25 Nikolaev Audrey E. P-N junction-based structures utilizing HVPE grown III-V compound layers
US6476420B2 (en) 1997-11-18 2002-11-05 Technologies And Devices International, Inc. P-N homojunction-based structures utilizing HVPE growth III-V compound layers
US6849862B2 (en) * 1997-11-18 2005-02-01 Technologies And Devices International, Inc. III-V compound semiconductor device with an AlxByInzGa1-x-y-zN1-a-bPaAsb non-continuous quantum dot layer
US6599133B2 (en) 1997-11-18 2003-07-29 Technologies And Devices International, Inc. Method for growing III-V compound semiconductor structures with an integral non-continuous quantum dot layer utilizing HVPE techniques
US6559467B2 (en) 1997-11-18 2003-05-06 Technologies And Devices International, Inc. P-n heterojunction-based structures utilizing HVPE grown III-V compound layers
US6472300B2 (en) 1997-11-18 2002-10-29 Technologies And Devices International, Inc. Method for growing p-n homojunction-based structures utilizing HVPE techniques
US6479839B2 (en) 1997-11-18 2002-11-12 Technologies & Devices International, Inc. III-V compounds semiconductor device with an AlxByInzGa1-x-y-zN non continuous quantum dot layer
US6218269B1 (en) 1997-11-18 2001-04-17 Technology And Devices International, Inc. Process for producing III-V nitride pn junctions and p-i-n junctions
US6890809B2 (en) * 1997-11-18 2005-05-10 Technologies And Deviles International, Inc. Method for fabricating a P-N heterojunction device utilizing HVPE grown III-V compound layers and resultant device
US6555452B2 (en) 1997-11-18 2003-04-29 Technologies And Devices International, Inc. Method for growing p-type III-V compound material utilizing HVPE techniques
TW393786B (en) * 1998-03-26 2000-06-11 Min Shr Method for manufacturing an epitaxial chip
CN1081165C (zh) * 1998-12-23 2002-03-20 中国科学院物理研究所 一种合成GaN纳米材料的方法
TW498102B (en) * 1998-12-28 2002-08-11 Futaba Denshi Kogyo Kk A process for preparing GaN fluorescent substance
US6372041B1 (en) * 1999-01-08 2002-04-16 Gan Semiconductor Inc. Method and apparatus for single crystal gallium nitride (GaN) bulk synthesis
US6306739B1 (en) * 1999-04-27 2001-10-23 The United States Of America As Represented By The Secretary Of The Air Force Method and apparatus for depositing thin films of group III nitrides and other films and devices made therefrom
US6406540B1 (en) 1999-04-27 2002-06-18 The United States Of America As Represented By The Secretary Of The Air Force Process and apparatus for the growth of nitride materials
US6113985A (en) * 1999-04-27 2000-09-05 The United States Of America As Represented By Secretary Of The Air Force Process for the manufacture of group III nitride targets for use in sputtering and similar equipment
WO2000068470A1 (en) * 1999-05-07 2000-11-16 Cbl Technologies, Inc. Magnesium-doped iii-v nitrides & methods
JP3809464B2 (ja) * 1999-12-14 2006-08-16 独立行政法人理化学研究所 半導体層の形成方法
US6596079B1 (en) * 2000-03-13 2003-07-22 Advanced Technology Materials, Inc. III-V nitride substrate boule and method of making and using the same
US7670435B2 (en) * 2001-03-30 2010-03-02 Technologies And Devices International, Inc. Apparatus for epitaxially growing semiconductor device structures with sharp layer interfaces utilizing HVPE
US6969426B1 (en) * 2002-02-26 2005-11-29 Bliss David F Forming improved metal nitrides
US6676752B1 (en) * 2002-02-26 2004-01-13 The United States Of America As Represented By The Secretary Of The Air Force Forming metal nitrides
US6911083B2 (en) * 2002-06-11 2005-06-28 Tokyo Institute Of Technology Method for producing powders made of gallium nitride and apparatus for producing the same
WO2006010075A1 (en) * 2004-07-09 2006-01-26 Cornell Research Foundation, Inc. Method of making group iii nitrides
JP2006073578A (ja) * 2004-08-31 2006-03-16 Nokodai Tlo Kk ＡｌＧａＮの気相成長方法及び気相成長装置
KR100623271B1 (ko) * 2005-06-24 2006-09-12 한국과학기술연구원 갈륨망간나이트라이드 단결정 나노선의 제조방법
WO2007023722A1 (ja) * 2005-08-25 2007-03-01 Sumitomo Electric Industries, Ltd. ＧａxＩｎ1-xＮ（０≦ｘ≦１）結晶の製造方法、ＧａxＩｎ1-xＮ（０≦ｘ≦１）結晶基板、ＧａＮ結晶の製造方法、ＧａＮ結晶基板および製品
US7935382B2 (en) * 2005-12-20 2011-05-03 Momentive Performance Materials, Inc. Method for making crystalline composition
JP2007197302A (ja) * 2005-12-28 2007-08-09 Sumitomo Electric Ind Ltd Ｉｉｉ族窒化物結晶の製造方法および製造装置
US11661673B1 (en) 2006-03-27 2023-05-30 Ostendo Technologies, Inc. HVPE apparatus and methods for growing indium nitride and indium nitride materials and structures grown thereby
US9416464B1 (en) 2006-10-11 2016-08-16 Ostendo Technologies, Inc. Apparatus and methods for controlling gas flows in a HVPE reactor
CN100410178C (zh) * 2006-10-25 2008-08-13 国家纳米技术与工程研究院 一种采用自催化模式制备带尖氮化镓锥形棒的方法
CN100410179C (zh) * 2006-10-25 2008-08-13 国家纳米技术与工程研究院 一种用溶胶凝胶法制备氮化镓纳米晶体的方法
US7776152B2 (en) * 2006-11-01 2010-08-17 Raytheon Company Method for continuous, in situ evaluation of entire wafers for macroscopic features during epitaxial growth
US20080276860A1 (en) * 2007-05-10 2008-11-13 Burrows Brian H Cross flow apparatus and method for hydride vapor phase deposition
US20080289575A1 (en) * 2007-05-24 2008-11-27 Burrows Brian H Methods and apparatus for depositing a group iii-v film using a hydride vapor phase epitaxy process
EP2570523B1 (en) * 2010-05-12 2017-05-03 National University Corporation Tokyo University Of Agriculture and Technology Method for producing gallium trichloride gas and method for producing nitride semiconductor crystal
US9023673B1 (en) * 2012-06-15 2015-05-05 Ostendo Technologies, Inc. Free HCL used during pretreatment and AlGaN growth to control growth layer orientation and inclusions
US9577143B1 (en) 2012-06-15 2017-02-21 Ostendo Technologies, Inc. Backflow reactor liner for protection of growth surfaces and for balancing flow in the growth liner
US8992684B1 (en) 2012-06-15 2015-03-31 Ostendo Technologies, Inc. Epitaxy reactor internal component geometries for the growth of superior quality group III-nitride materials
JP6510413B2 (ja) 2013-09-11 2019-05-08 国立大学法人東京農工大学 窒化物半導体結晶、製造方法および製造装置
JP5984069B2 (ja) * 2013-09-30 2016-09-06 株式会社タムラ製作所 β−Ｇａ２Ｏ３系単結晶膜の成長方法、及び結晶積層構造体
CN105862132B (zh) * 2016-05-30 2018-05-22 东莞市中镓半导体科技有限公司 一种在HVPE中高速率稳定生长GaN晶体材料的方法

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US3511702A (en) * 1965-08-20 1970-05-12 Motorola Inc Epitaxial growth process from an atmosphere composed of a hydrogen halide,semiconductor halide and hydrogen
FR2116194B1 (ja) * 1970-02-27 1974-09-06 Labo Electronique Physique
US3922475A (en) * 1970-06-22 1975-11-25 Rockwell International Corp Process for producing nitride films
US3829556A (en) * 1972-03-24 1974-08-13 Bell Telephone Labor Inc Growth of gallium nitride crystals
US3925119A (en) * 1973-05-07 1975-12-09 Ibm Method for vapor deposition of gallium arsenide phosphide upon gallium arsenide substrates
US3888705A (en) * 1973-12-19 1975-06-10 Nasa Vapor phase growth of groups iii-v compounds by hydrogen chloride transport of the elements

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02188912A (ja) * 1989-01-17 1990-07-25 Nec Corp ３‐５族化合物半導体の選択成長方法
JPH05183189A (ja) * 1991-11-08 1993-07-23 Nichia Chem Ind Ltd ｐ型窒化ガリウム系化合物半導体の製造方法。

Also Published As

Publication number Publication date
CA1071068A (en) 1980-02-05
DE2609907C2 (de) 1983-10-27
IT1058440B (it) 1982-04-10
JPS5617319B2 (ja) 1981-04-21
US4144116A (en) 1979-03-13
DE2609907A1 (de) 1976-10-07
GB1536586A (en) 1978-12-20

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