JPS4939309B1 - - Google Patents

Info

Publication number
JPS4939309B1
JPS4939309B1 JP47104048A JP10404872A JPS4939309B1 JP S4939309 B1 JPS4939309 B1 JP S4939309B1 JP 47104048 A JP47104048 A JP 47104048A JP 10404872 A JP10404872 A JP 10404872A JP S4939309 B1 JPS4939309 B1 JP S4939309B1
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP47104048A
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of JPS4939309B1 publication Critical patent/JPS4939309B1/ja
Pending legal-status Critical Current

Links

Classifications

    • H10W10/012—
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D84/00—Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers
    • H10D84/40—Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers characterised by the integration of at least one component covered by groups H10D12/00 or H10D30/00 with at least one component covered by groups H10D10/00 or H10D18/00, e.g. integration of IGFETs with BJTs
    • H10D84/401—Combinations of FETs or IGBTs with BJTs
    • H10D84/403—Combinations of FETs or IGBTs with BJTs and with one or more of diodes, resistors or capacitors
    • H10P14/61—
    • H10W10/0121—
    • H10W10/0126—
    • H10W10/13—
    • H10W72/5363—

Landscapes

  • Local Oxidation Of Silicon (AREA)
  • Electrodes Of Semiconductors (AREA)
  • Element Separation (AREA)
  • Bipolar Transistors (AREA)
  • Formation Of Insulating Films (AREA)
  • Weting (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
  • Junction Field-Effect Transistors (AREA)
  • Level Indicators Using A Float (AREA)
JP47104048A 1966-10-05 1972-10-19 Pending JPS4939309B1 (cg-RX-API-DMAC10.html)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
NL666614016A NL153374B (nl) 1966-10-05 1966-10-05 Werkwijze ter vervaardiging van een halfgeleiderinrichting voorzien van een oxydelaag en halfgeleiderinrichting vervaardigd volgens de werkwijze.

Publications (1)

Publication Number Publication Date
JPS4939309B1 true JPS4939309B1 (cg-RX-API-DMAC10.html) 1974-10-24

Family

ID=19797850

Family Applications (8)

Application Number Title Priority Date Filing Date
JP6388367A Pending JPS5631893B1 (cg-RX-API-DMAC10.html) 1966-10-05 1967-10-05
JP47104048A Pending JPS4939309B1 (cg-RX-API-DMAC10.html) 1966-10-05 1972-10-19
JP47104047A Pending JPS4939308B1 (cg-RX-API-DMAC10.html) 1966-10-05 1972-10-19
JP48051237A Pending JPS4923071B1 (cg-RX-API-DMAC10.html) 1966-10-05 1973-05-10
JP8957074A Pending JPS5434596B1 (cg-RX-API-DMAC10.html) 1966-10-05 1974-08-06
JP50046613A Pending JPS5134274B1 (cg-RX-API-DMAC10.html) 1966-10-05 1975-04-18
JP50067701A Granted JPS5838937B1 (cg-RX-API-DMAC10.html) 1966-10-05 1975-06-06
JP11170477A Pending JPS5435071B1 (cg-RX-API-DMAC10.html) 1966-10-05 1977-09-19

Family Applications Before (1)

Application Number Title Priority Date Filing Date
JP6388367A Pending JPS5631893B1 (cg-RX-API-DMAC10.html) 1966-10-05 1967-10-05

Family Applications After (6)

Application Number Title Priority Date Filing Date
JP47104047A Pending JPS4939308B1 (cg-RX-API-DMAC10.html) 1966-10-05 1972-10-19
JP48051237A Pending JPS4923071B1 (cg-RX-API-DMAC10.html) 1966-10-05 1973-05-10
JP8957074A Pending JPS5434596B1 (cg-RX-API-DMAC10.html) 1966-10-05 1974-08-06
JP50046613A Pending JPS5134274B1 (cg-RX-API-DMAC10.html) 1966-10-05 1975-04-18
JP50067701A Granted JPS5838937B1 (cg-RX-API-DMAC10.html) 1966-10-05 1975-06-06
JP11170477A Pending JPS5435071B1 (cg-RX-API-DMAC10.html) 1966-10-05 1977-09-19

Country Status (13)

Country Link
US (1) US3970486A (cg-RX-API-DMAC10.html)
JP (8) JPS5631893B1 (cg-RX-API-DMAC10.html)
AT (1) AT280349B (cg-RX-API-DMAC10.html)
BE (1) BE704674A (cg-RX-API-DMAC10.html)
CH (1) CH469358A (cg-RX-API-DMAC10.html)
DE (1) DE1614283C3 (cg-RX-API-DMAC10.html)
DK (1) DK121913B (cg-RX-API-DMAC10.html)
ES (1) ES345702A1 (cg-RX-API-DMAC10.html)
FR (1) FR1549386A (cg-RX-API-DMAC10.html)
GB (1) GB1208574A (cg-RX-API-DMAC10.html)
NL (1) NL153374B (cg-RX-API-DMAC10.html)
NO (1) NO125653B (cg-RX-API-DMAC10.html)
SE (1) SE335177B (cg-RX-API-DMAC10.html)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5159853U (cg-RX-API-DMAC10.html) * 1974-11-06 1976-05-11

Families Citing this family (53)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7038290B1 (en) 1965-09-28 2006-05-02 Li Chou H Integrated circuit device
US6979877B1 (en) 1965-09-28 2005-12-27 Li Chou H Solid-state device
US5696402A (en) * 1965-09-28 1997-12-09 Li; Chou H. Integrated circuit device
US6849918B1 (en) * 1965-09-28 2005-02-01 Chou H. Li Miniaturized dielectrically isolated solid state device
NL7010208A (cg-RX-API-DMAC10.html) * 1966-10-05 1972-01-12 Philips Nv
NL159817B (nl) * 1966-10-05 1979-03-15 Philips Nv Werkwijze ter vervaardiging van een halfgeleiderinrichting.
USRE31580E (en) * 1967-06-08 1984-05-01 U.S. Philips Corporation Insulated gate field-effect transistor comprising a mesa channel and a thicker surrounding oxide
USRE28653E (en) * 1968-04-23 1975-12-16 Method of fabricating semiconductor devices
BE753245A (fr) * 1969-08-04 1970-12-16 Rca Corp Procede pour la fabrication de dispositifs semiconducteurs
FR2058385A1 (en) * 1969-08-20 1971-05-28 Ibm Diode with schottky barrier
DE1952636C3 (de) * 1969-10-18 1981-04-30 Licentia Patent-Verwaltungs-Gmbh, 6000 Frankfurt Verfahren zum Herstellen einer Halbleiteranordnung mit einem Schottky-Kontakt
GB1332931A (en) * 1970-01-15 1973-10-10 Mullard Ltd Methods of manufacturing a semiconductor device
US3698966A (en) * 1970-02-26 1972-10-17 North American Rockwell Processes using a masking layer for producing field effect devices having oxide isolation
GB1362512A (en) * 1970-06-15 1974-08-07 Hitachi Ltd Semiconductor device and method for manufacture
FR2098325B1 (cg-RX-API-DMAC10.html) * 1970-07-10 1977-04-22 Philips Nv
NL170902C (nl) * 1970-07-10 1983-01-03 Philips Nv Halfgeleiderinrichting, in het bijzonder monolithische geintegreerde halfgeleiderschakeling.
JPS514756B1 (cg-RX-API-DMAC10.html) * 1970-10-05 1976-02-14
US3648125A (en) * 1971-02-02 1972-03-07 Fairchild Camera Instr Co Method of fabricating integrated circuits with oxidized isolation and the resulting structure
JPS498183A (cg-RX-API-DMAC10.html) * 1972-05-10 1974-01-24
FR2188304B1 (cg-RX-API-DMAC10.html) * 1972-06-15 1977-07-22 Commissariat Energie Atomique
DE2318912A1 (de) * 1972-06-30 1974-01-17 Ibm Integrierte halbleiteranordnung
JPS4960684A (cg-RX-API-DMAC10.html) * 1972-10-12 1974-06-12
JPS5617734B2 (cg-RX-API-DMAC10.html) * 1973-07-19 1981-04-24
GB1437112A (en) 1973-09-07 1976-05-26 Mullard Ltd Semiconductor device manufacture
JPS5938741B2 (ja) * 1976-07-31 1984-09-19 ティーディーケイ株式会社 半導体装置およびその作製方法
EP0002107A3 (en) * 1977-11-17 1979-09-05 Rca Corporation Method of making a planar semiconductor device
GB2042801B (en) * 1979-02-13 1983-12-14 Standard Telephones Cables Ltd Contacting semicnductor devices
US4441941A (en) * 1980-03-06 1984-04-10 Tokyo Shibaura Denki Kabushiki Kaisha Method for manufacturing a semiconductor device employing element isolation using insulating materials
US4274909A (en) * 1980-03-17 1981-06-23 International Business Machines Corporation Method for forming ultra fine deep dielectric isolation
US4317690A (en) * 1980-06-18 1982-03-02 Signetics Corporation Self-aligned double polysilicon MOS fabrication
US4506435A (en) * 1981-07-27 1985-03-26 International Business Machines Corporation Method for forming recessed isolated regions
US4454647A (en) * 1981-08-27 1984-06-19 International Business Machines Corporation Isolation for high density integrated circuits
US4454646A (en) * 1981-08-27 1984-06-19 International Business Machines Corporation Isolation for high density integrated circuits
JPS5873163A (ja) * 1981-10-27 1983-05-02 Toshiba Corp Ｍｏｓ型半導体装置
US4508757A (en) * 1982-12-20 1985-04-02 International Business Machines Corporation Method of manufacturing a minimum bird's beak recessed oxide isolation structure
GB2151844A (en) * 1983-12-20 1985-07-24 Philips Electronic Associated Semiconductor devices
JPS60115416U (ja) * 1984-01-12 1985-08-05 三菱電機株式会社 フラツトキ−型操作ボ−ド
JPS6133323U (ja) * 1984-07-31 1986-02-28 武夫 大坪 キ−ボ−ド表示板
JPS61126696U (cg-RX-API-DMAC10.html) * 1985-01-28 1986-08-08
US4630356A (en) * 1985-09-19 1986-12-23 International Business Machines Corporation Method of forming recessed oxide isolation with reduced steepness of the birds' neck
US5019526A (en) * 1988-09-26 1991-05-28 Nippondenso Co., Ltd. Method of manufacturing a semiconductor device having a plurality of elements
US5077235A (en) * 1989-01-24 1991-12-31 Ricoh Comany, Ltd. Method of manufacturing a semiconductor integrated circuit device having SOI structure
US4968641A (en) * 1989-06-22 1990-11-06 Alexander Kalnitsky Method for formation of an isolating oxide layer
US4987099A (en) * 1989-12-29 1991-01-22 North American Philips Corp. Method for selectively filling contacts or vias or various depths with CVD tungsten
JP3111500B2 (ja) * 1991-05-09 2000-11-20 富士電機株式会社 誘電体分離ウエハの製造方法
JPH05283710A (ja) * 1991-12-06 1993-10-29 Intel Corp 高電圧ｍｏｓトランジスタ及びその製造方法
US5418176A (en) * 1994-02-17 1995-05-23 United Microelectronics Corporation Process for producing memory devices having narrow buried N+ lines
US5661053A (en) * 1994-05-25 1997-08-26 Sandisk Corporation Method of making dense flash EEPROM cell array and peripheral supporting circuits formed in deposited field oxide with the use of spacers
US5756385A (en) * 1994-03-30 1998-05-26 Sandisk Corporation Dense flash EEPROM cell array and peripheral supporting circuits formed in deposited field oxide with the use of spacers
US5814875A (en) * 1995-01-31 1998-09-29 Nippon Steel Corporation Semiconductor device and method of manufacturing the same apparatus and method for providing semiconductor devices having a field shield element between devices
US20040144999A1 (en) * 1995-06-07 2004-07-29 Li Chou H. Integrated circuit device
US5747357A (en) 1995-09-27 1998-05-05 Mosel Vitelic, Inc. Modified poly-buffered isolation
US5883566A (en) * 1997-02-24 1999-03-16 International Business Machines Corporation Noise-isolated buried resistor

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2981877A (en) * 1959-07-30 1961-04-25 Fairchild Semiconductor Semiconductor device-and-lead structure
US3212162A (en) * 1962-01-05 1965-10-19 Fairchild Camera Instr Co Fabricating semiconductor devices
US3165430A (en) * 1963-01-21 1965-01-12 Siliconix Inc Method of ultra-fine semiconductor manufacture
US3279963A (en) * 1963-07-23 1966-10-18 Ibm Fabrication of semiconductor devices
DE1439737B2 (de) * 1964-10-31 1970-05-06 Telefunken Patentverwertungsgesellschaft Mbh, 7900 Ulm Verfahren zum Herstellen einer Halblei teranordnung
US3484313A (en) * 1965-03-25 1969-12-16 Hitachi Ltd Method of manufacturing semiconductor devices
US3442011A (en) * 1965-06-30 1969-05-06 Texas Instruments Inc Method for isolating individual devices in an integrated circuit monolithic bar
US3479237A (en) * 1966-04-08 1969-11-18 Bell Telephone Labor Inc Etch masks on semiconductor surfaces
US3649386A (en) * 1968-04-23 1972-03-14 Bell Telephone Labor Inc Method of fabricating semiconductor devices
US3550292A (en) * 1968-08-23 1970-12-29 Nippon Electric Co Semiconductor device and method of manufacturing the same
JPS4917069A (cg-RX-API-DMAC10.html) * 1972-06-10 1974-02-15
JPS5232803B2 (cg-RX-API-DMAC10.html) * 1972-08-15 1977-08-24

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5159853U (cg-RX-API-DMAC10.html) * 1974-11-06 1976-05-11

Also Published As

Publication number Publication date
AT280349B (de) 1970-04-10
DE1614283C3 (de) 1983-03-10
DE1614283B2 (de) 1975-06-05
JPS5134274B1 (cg-RX-API-DMAC10.html) 1976-09-25
US3970486A (en) 1976-07-20
CH469358A (de) 1969-02-28
NO125653B (cg-RX-API-DMAC10.html) 1972-10-09
JPS4939308B1 (cg-RX-API-DMAC10.html) 1974-10-24
JPS5838937B1 (cg-RX-API-DMAC10.html) 1983-08-26
FR1549386A (cg-RX-API-DMAC10.html) 1968-12-13
JPS5435071B1 (cg-RX-API-DMAC10.html) 1979-10-31
JPS4923071B1 (cg-RX-API-DMAC10.html) 1974-06-13
NL153374B (nl) 1977-05-16
GB1208574A (en) 1970-10-14
JPS5434596B1 (cg-RX-API-DMAC10.html) 1979-10-27
BE704674A (cg-RX-API-DMAC10.html) 1968-04-04
DK121913B (da) 1971-12-20
SE335177B (cg-RX-API-DMAC10.html) 1971-05-17
ES345702A1 (es) 1969-02-01
JPS5631893B1 (cg-RX-API-DMAC10.html) 1981-07-24
DE1614283A1 (de) 1970-05-27
NL6614016A (cg-RX-API-DMAC10.html) 1968-04-08

Similar Documents

Publication Publication Date Title
FR1549386A (cg-RX-API-DMAC10.html)
AU424443B2 (cg-RX-API-DMAC10.html)
AU421822B2 (cg-RX-API-DMAC10.html)
AU417216B2 (cg-RX-API-DMAC10.html)
AU6597365A (cg-RX-API-DMAC10.html)
AU6703465A (cg-RX-API-DMAC10.html)
AU612166A (cg-RX-API-DMAC10.html)
BE692179A (cg-RX-API-DMAC10.html)
BE689341A (cg-RX-API-DMAC10.html)
BE693194A (cg-RX-API-DMAC10.html)
BE693464A (cg-RX-API-DMAC10.html)
BE693917A (cg-RX-API-DMAC10.html)
BE694094A (cg-RX-API-DMAC10.html)
BE692545A (cg-RX-API-DMAC10.html)
BE692534A (cg-RX-API-DMAC10.html)
BE685793A (cg-RX-API-DMAC10.html)
BE689701A (cg-RX-API-DMAC10.html)
AU6852465A (cg-RX-API-DMAC10.html)
BE687275A (cg-RX-API-DMAC10.html)
BE694237A (cg-RX-API-DMAC10.html)
BE687158A (cg-RX-API-DMAC10.html)
BE694560A (cg-RX-API-DMAC10.html)
BE692697A (cg-RX-API-DMAC10.html)
BE674792A (cg-RX-API-DMAC10.html)
BE682214A (cg-RX-API-DMAC10.html)