JPH1176908A - 塗布膜形成装置及びその方法並びに基板搬送装置 - Google Patents
塗布膜形成装置及びその方法並びに基板搬送装置Info
- Publication number
- JPH1176908A JPH1176908A JP25750197A JP25750197A JPH1176908A JP H1176908 A JPH1176908 A JP H1176908A JP 25750197 A JP25750197 A JP 25750197A JP 25750197 A JP25750197 A JP 25750197A JP H1176908 A JPH1176908 A JP H1176908A
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- coating film
- film forming
- endless belt
- section
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 title claims abstract description 188
- 238000000576 coating method Methods 0.000 title claims abstract description 139
- 239000011248 coating agent Substances 0.000 title claims abstract description 138
- 238000000034 method Methods 0.000 title claims description 16
- 230000015572 biosynthetic process Effects 0.000 title 1
- 239000002904 solvent Substances 0.000 claims abstract description 30
- 238000012546 transfer Methods 0.000 claims description 51
- 238000004140 cleaning Methods 0.000 claims description 25
- 238000007599 discharging Methods 0.000 claims description 5
- 239000000126 substance Substances 0.000 claims description 3
- 239000011521 glass Substances 0.000 abstract description 2
- 238000004528 spin coating Methods 0.000 abstract description 2
- 239000010408 film Substances 0.000 description 106
- 239000007788 liquid Substances 0.000 description 9
- 238000012545 processing Methods 0.000 description 8
- 238000001035 drying Methods 0.000 description 4
- 230000002093 peripheral effect Effects 0.000 description 4
- 238000011109 contamination Methods 0.000 description 2
- 238000011161 development Methods 0.000 description 2
- 230000018109 developmental process Effects 0.000 description 2
- 239000000428 dust Substances 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000010409 thin film Substances 0.000 description 2
- 238000011144 upstream manufacturing Methods 0.000 description 2
- 238000013459 approach Methods 0.000 description 1
- RHZWSUVWRRXEJF-UHFFFAOYSA-N indium tin Chemical compound [In].[Sn] RHZWSUVWRRXEJF-UHFFFAOYSA-N 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
- 229920002120 photoresistant polymer Polymers 0.000 description 1
- 238000004080 punching Methods 0.000 description 1
- 230000007261 regionalization Effects 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 230000000717 retained effect Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 231100000331 toxic Toxicity 0.000 description 1
- 230000002588 toxic effect Effects 0.000 description 1
- 238000009423 ventilation Methods 0.000 description 1
Landscapes
- Coating Apparatus (AREA)
- Cleaning By Liquid Or Steam (AREA)
- Application Of Or Painting With Fluid Materials (AREA)
- Liquid Crystal (AREA)
- Photosensitive Polymer And Photoresist Processing (AREA)
- Devices For Indicating Variable Information By Combining Individual Elements (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP25750197A JPH1176908A (ja) | 1997-09-04 | 1997-09-04 | 塗布膜形成装置及びその方法並びに基板搬送装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP25750197A JPH1176908A (ja) | 1997-09-04 | 1997-09-04 | 塗布膜形成装置及びその方法並びに基板搬送装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH1176908A true JPH1176908A (ja) | 1999-03-23 |
| JPH1176908A5 JPH1176908A5 (enExample) | 2004-10-14 |
Family
ID=17307178
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP25750197A Pending JPH1176908A (ja) | 1997-09-04 | 1997-09-04 | 塗布膜形成装置及びその方法並びに基板搬送装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH1176908A (enExample) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7641763B2 (en) | 2003-09-29 | 2010-01-05 | Tokyo Electron Limited | Apparatus and method for removing coating film |
| KR20120101869A (ko) * | 2011-03-07 | 2012-09-17 | 삼성테크윈 주식회사 | 편광필름 부착장치 |
| WO2023285689A1 (de) * | 2021-07-15 | 2023-01-19 | Osiris International GmbH | Vorrichtung zum entschichten von eckigen substraten |
-
1997
- 1997-09-04 JP JP25750197A patent/JPH1176908A/ja active Pending
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7641763B2 (en) | 2003-09-29 | 2010-01-05 | Tokyo Electron Limited | Apparatus and method for removing coating film |
| US8257605B2 (en) | 2003-09-29 | 2012-09-04 | Tokyo Electron Limited | Apparatus and method for removing coating film |
| DE102004041619B4 (de) * | 2003-09-29 | 2013-02-07 | Tokyo Electron Ltd. | Vorrichtung und Verfahren zum Entfernen eines Beschichtungsfilmes |
| KR20120101869A (ko) * | 2011-03-07 | 2012-09-17 | 삼성테크윈 주식회사 | 편광필름 부착장치 |
| WO2023285689A1 (de) * | 2021-07-15 | 2023-01-19 | Osiris International GmbH | Vorrichtung zum entschichten von eckigen substraten |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A977 | Report on retrieval |
Effective date: 20050712 Free format text: JAPANESE INTERMEDIATE CODE: A971007 |
|
| A131 | Notification of reasons for refusal |
Effective date: 20050726 Free format text: JAPANESE INTERMEDIATE CODE: A131 |
|
| A02 | Decision of refusal |
Effective date: 20051129 Free format text: JAPANESE INTERMEDIATE CODE: A02 |