JPH1176908A5 - - Google Patents

Info

Publication number
JPH1176908A5
JPH1176908A5 JP1997257501A JP25750197A JPH1176908A5 JP H1176908 A5 JPH1176908 A5 JP H1176908A5 JP 1997257501 A JP1997257501 A JP 1997257501A JP 25750197 A JP25750197 A JP 25750197A JP H1176908 A5 JPH1176908 A5 JP H1176908A5
Authority
JP
Japan
Prior art keywords
resist solution
fixed cup
nozzle
lid
spin chuck
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1997257501A
Other languages
English (en)
Japanese (ja)
Other versions
JPH1176908A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP25750197A priority Critical patent/JPH1176908A/ja
Priority claimed from JP25750197A external-priority patent/JPH1176908A/ja
Publication of JPH1176908A publication Critical patent/JPH1176908A/ja
Publication of JPH1176908A5 publication Critical patent/JPH1176908A5/ja
Pending legal-status Critical Current

Links

JP25750197A 1997-09-04 1997-09-04 塗布膜形成装置及びその方法並びに基板搬送装置 Pending JPH1176908A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP25750197A JPH1176908A (ja) 1997-09-04 1997-09-04 塗布膜形成装置及びその方法並びに基板搬送装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP25750197A JPH1176908A (ja) 1997-09-04 1997-09-04 塗布膜形成装置及びその方法並びに基板搬送装置

Publications (2)

Publication Number Publication Date
JPH1176908A JPH1176908A (ja) 1999-03-23
JPH1176908A5 true JPH1176908A5 (enExample) 2004-10-14

Family

ID=17307178

Family Applications (1)

Application Number Title Priority Date Filing Date
JP25750197A Pending JPH1176908A (ja) 1997-09-04 1997-09-04 塗布膜形成装置及びその方法並びに基板搬送装置

Country Status (1)

Country Link
JP (1) JPH1176908A (enExample)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3920831B2 (ja) 2003-09-29 2007-05-30 東京エレクトロン株式会社 塗布膜除去装置及び塗布膜除去方法
KR101697130B1 (ko) * 2011-03-07 2017-01-18 한화테크윈 주식회사 편광필름 부착장치
EP4371149A1 (de) * 2021-07-15 2024-05-22 Osiris International Gmbh Vorrichtung zum entschichten von eckigen substraten

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