JPH11114704A - 炭化チタン被覆工具 - Google Patents
炭化チタン被覆工具Info
- Publication number
- JPH11114704A JPH11114704A JP29035397A JP29035397A JPH11114704A JP H11114704 A JPH11114704 A JP H11114704A JP 29035397 A JP29035397 A JP 29035397A JP 29035397 A JP29035397 A JP 29035397A JP H11114704 A JPH11114704 A JP H11114704A
- Authority
- JP
- Japan
- Prior art keywords
- titanium carbide
- layer
- titanium
- mainly composed
- ray diffraction
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
- MTPVUVINMAGMJL-UHFFFAOYSA-N trimethyl(1,1,2,2,2-pentafluoroethyl)silane Chemical group C[Si](C)(C)C(F)(F)C(F)(F)F MTPVUVINMAGMJL-UHFFFAOYSA-N 0.000 claims abstract description 123
- 239000010410 layer Substances 0.000 claims abstract description 98
- 238000002441 X-ray diffraction Methods 0.000 claims abstract description 62
- 229910052751 metal Inorganic materials 0.000 claims abstract description 13
- 239000002184 metal Substances 0.000 claims abstract description 13
- 150000001247 metal acetylides Chemical class 0.000 claims abstract description 12
- 150000004767 nitrides Chemical class 0.000 claims abstract description 12
- 239000000758 substrate Substances 0.000 claims abstract description 12
- 230000000737 periodic effect Effects 0.000 claims abstract description 9
- 239000002356 single layer Substances 0.000 claims abstract description 7
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 claims description 23
- 239000010936 titanium Substances 0.000 claims description 22
- 238000000576 coating method Methods 0.000 claims description 18
- 239000011248 coating agent Substances 0.000 claims description 17
- 229910052719 titanium Inorganic materials 0.000 claims description 12
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims description 11
- 238000000034 method Methods 0.000 claims description 11
- 239000013078 crystal Substances 0.000 claims description 10
- 239000000463 material Substances 0.000 claims description 10
- 150000002739 metals Chemical class 0.000 claims description 7
- PNEYBMLMFCGWSK-UHFFFAOYSA-N Alumina Chemical class [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 claims description 5
- 229910045601 alloy Inorganic materials 0.000 claims description 4
- 239000000956 alloy Substances 0.000 claims description 4
- 229910052804 chromium Inorganic materials 0.000 claims description 2
- 229910052742 iron Inorganic materials 0.000 claims description 2
- 229910052750 molybdenum Inorganic materials 0.000 claims description 2
- 229910052759 nickel Inorganic materials 0.000 claims description 2
- 229910052721 tungsten Inorganic materials 0.000 claims description 2
- 238000005520 cutting process Methods 0.000 abstract description 49
- 239000007789 gas Substances 0.000 description 42
- 229910003074 TiCl4 Inorganic materials 0.000 description 10
- 239000012159 carrier gas Substances 0.000 description 10
- XJDNKRIXUMDJCW-UHFFFAOYSA-J titanium tetrachloride Chemical compound Cl[Ti](Cl)(Cl)Cl XJDNKRIXUMDJCW-UHFFFAOYSA-J 0.000 description 10
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 9
- 238000005229 chemical vapour deposition Methods 0.000 description 6
- 238000010586 diagram Methods 0.000 description 6
- 239000000203 mixture Substances 0.000 description 6
- VSCWAEJMTAWNJL-UHFFFAOYSA-K aluminium trichloride Chemical compound Cl[Al](Cl)Cl VSCWAEJMTAWNJL-UHFFFAOYSA-K 0.000 description 4
- 230000005540 biological transmission Effects 0.000 description 4
- 230000000694 effects Effects 0.000 description 4
- 229910052758 niobium Inorganic materials 0.000 description 4
- 229910052715 tantalum Inorganic materials 0.000 description 4
- 238000010894 electron beam technology Methods 0.000 description 3
- 239000002245 particle Substances 0.000 description 3
- 238000005299 abrasion Methods 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- 150000001875 compounds Chemical class 0.000 description 2
- 239000010730 cutting oil Substances 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 239000000843 powder Substances 0.000 description 2
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 1
- BVKZGUZCCUSVTD-UHFFFAOYSA-L Carbonate Chemical compound [O-]C([O-])=O BVKZGUZCCUSVTD-UHFFFAOYSA-L 0.000 description 1
- 229910000997 High-speed steel Inorganic materials 0.000 description 1
- 229910000831 Steel Inorganic materials 0.000 description 1
- 238000003917 TEM image Methods 0.000 description 1
- QCWXUUIWCKQGHC-UHFFFAOYSA-N Zirconium Chemical compound [Zr] QCWXUUIWCKQGHC-UHFFFAOYSA-N 0.000 description 1
- 239000000654 additive Substances 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 150000004649 carbonic acid derivatives Chemical class 0.000 description 1
- -1 carbonitrides Chemical class 0.000 description 1
- 229910010293 ceramic material Inorganic materials 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 229910052593 corundum Inorganic materials 0.000 description 1
- 238000002447 crystallographic data Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 238000002003 electron diffraction Methods 0.000 description 1
- 230000002708 enhancing effect Effects 0.000 description 1
- 229910052735 hafnium Inorganic materials 0.000 description 1
- VBJZVLUMGGDVMO-UHFFFAOYSA-N hafnium atom Chemical compound [Hf] VBJZVLUMGGDVMO-UHFFFAOYSA-N 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 238000007733 ion plating Methods 0.000 description 1
- 239000000696 magnetic material Substances 0.000 description 1
- 238000003801 milling Methods 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- RVTZCBVAJQQJTK-UHFFFAOYSA-N oxygen(2-);zirconium(4+) Chemical compound [O-2].[O-2].[Zr+4] RVTZCBVAJQQJTK-UHFFFAOYSA-N 0.000 description 1
- 238000005240 physical vapour deposition Methods 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 229910052594 sapphire Inorganic materials 0.000 description 1
- 230000035939 shock Effects 0.000 description 1
- 238000009751 slip forming Methods 0.000 description 1
- 239000010959 steel Substances 0.000 description 1
- 238000002230 thermal chemical vapour deposition Methods 0.000 description 1
- 150000003608 titanium Chemical class 0.000 description 1
- 150000003609 titanium compounds Chemical class 0.000 description 1
- FOZHTJJTSSSURD-UHFFFAOYSA-J titanium(4+);dicarbonate Chemical compound [Ti+4].[O-]C([O-])=O.[O-]C([O-])=O FOZHTJJTSSSURD-UHFFFAOYSA-J 0.000 description 1
- 229910001845 yogo sapphire Inorganic materials 0.000 description 1
- 229910052726 zirconium Inorganic materials 0.000 description 1
- 229910001928 zirconium oxide Inorganic materials 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
- C23C28/04—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material
- C23C28/044—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material coatings specially adapted for cutting tools or wear applications
Landscapes
- Chemical & Material Sciences (AREA)
- Inorganic Chemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Chemical Vapour Deposition (AREA)
- Other Surface Treatments For Metallic Materials (AREA)
- Cutting Tools, Boring Holders, And Turrets (AREA)
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP29035397A JPH11114704A (ja) | 1997-10-07 | 1997-10-07 | 炭化チタン被覆工具 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP29035397A JPH11114704A (ja) | 1997-10-07 | 1997-10-07 | 炭化チタン被覆工具 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH11114704A true JPH11114704A (ja) | 1999-04-27 |
| JPH11114704A5 JPH11114704A5 (enExample) | 2005-09-22 |
Family
ID=17754949
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP29035397A Withdrawn JPH11114704A (ja) | 1997-10-07 | 1997-10-07 | 炭化チタン被覆工具 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH11114704A (enExample) |
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006315173A (ja) * | 2001-06-19 | 2006-11-24 | Kobe Steel Ltd | 切削工具用硬質皮膜およびその製造方法 |
| JP2009184046A (ja) * | 2008-02-05 | 2009-08-20 | Mitsubishi Materials Corp | 高速重切削加工で硬質被覆層がすぐれた耐チッピング性を発揮する表面被覆切削工具 |
| JP2009279694A (ja) * | 2008-05-21 | 2009-12-03 | Mitsubishi Materials Corp | 高速重切削加工で硬質被覆層がすぐれた耐チッピング性と耐摩耗性を発揮する表面被覆切削工具 |
| JP2009279693A (ja) * | 2008-05-21 | 2009-12-03 | Mitsubishi Materials Corp | 高速重切削加工で硬質被覆層がすぐれた耐チッピング性を発揮する表面被覆切削工具 |
| JP2011025405A (ja) * | 2001-06-19 | 2011-02-10 | Kobe Steel Ltd | 耐摩耗性に優れた硬質皮膜およびその製造方法 |
| WO2024199894A1 (de) | 2023-03-28 | 2024-10-03 | Saint-Gobain Glass France | Scheibe mit einer titancarbid-beschichtung |
| WO2025247813A1 (de) | 2024-05-28 | 2025-12-04 | Saint-Gobain Glass France | Scheibenanordnung mit einer titancarbid-beschichtung |
-
1997
- 1997-10-07 JP JP29035397A patent/JPH11114704A/ja not_active Withdrawn
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006315173A (ja) * | 2001-06-19 | 2006-11-24 | Kobe Steel Ltd | 切削工具用硬質皮膜およびその製造方法 |
| JP2011025405A (ja) * | 2001-06-19 | 2011-02-10 | Kobe Steel Ltd | 耐摩耗性に優れた硬質皮膜およびその製造方法 |
| JP2009184046A (ja) * | 2008-02-05 | 2009-08-20 | Mitsubishi Materials Corp | 高速重切削加工で硬質被覆層がすぐれた耐チッピング性を発揮する表面被覆切削工具 |
| JP2009279694A (ja) * | 2008-05-21 | 2009-12-03 | Mitsubishi Materials Corp | 高速重切削加工で硬質被覆層がすぐれた耐チッピング性と耐摩耗性を発揮する表面被覆切削工具 |
| JP2009279693A (ja) * | 2008-05-21 | 2009-12-03 | Mitsubishi Materials Corp | 高速重切削加工で硬質被覆層がすぐれた耐チッピング性を発揮する表面被覆切削工具 |
| WO2024199894A1 (de) | 2023-03-28 | 2024-10-03 | Saint-Gobain Glass France | Scheibe mit einer titancarbid-beschichtung |
| WO2025247813A1 (de) | 2024-05-28 | 2025-12-04 | Saint-Gobain Glass France | Scheibenanordnung mit einer titancarbid-beschichtung |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JP3678924B2 (ja) | 酸化アルミニウム被覆工具 | |
| JP3418066B2 (ja) | アルミナ被覆工具とその製造方法 | |
| JP4004133B2 (ja) | 炭窒化チタン被覆工具 | |
| JP5683190B2 (ja) | 表面被覆部材 | |
| JP3560303B2 (ja) | 酸化アルミニウム被覆工具およびその製造方法 | |
| JP3808648B2 (ja) | 炭窒酸化チタン膜被覆工具 | |
| JP3768136B2 (ja) | 被覆工具 | |
| JP4022042B2 (ja) | 被覆工具及びその製造方法 | |
| JP3962300B2 (ja) | 酸化アルミニウム被覆工具 | |
| JP4832108B2 (ja) | 表面被覆切削工具 | |
| JP3901477B2 (ja) | 酸化アルミニウム被覆工具 | |
| JPH11114704A (ja) | 炭化チタン被覆工具 | |
| JP3678945B2 (ja) | 炭窒酸化チタン被覆工具 | |
| JPH11335870A (ja) | 炭窒化チタン・酸化アルミニウム被覆工具 | |
| JP4351521B2 (ja) | 表面被覆切削工具 | |
| JP2004291162A (ja) | 表面被覆切削工具 | |
| JP2001011632A (ja) | ジルコニウム含有膜被覆工具 | |
| JP2002370105A (ja) | 酸化アルミニウム被覆工具 | |
| JP2002273607A (ja) | 多層被覆工具 | |
| JPH10263903A (ja) | 炭化チタン被覆工具 | |
| JP2004148503A (ja) | 酸化アルミニウム被覆工具 | |
| JP2005264194A (ja) | α型酸化アルミニウム被覆部材 | |
| JP3544450B2 (ja) | 酸化アルミニウム被覆工具 | |
| JP3818961B2 (ja) | 酸化アルミニウム被覆工具 | |
| JP3347031B2 (ja) | 炭化チタン被覆工具 |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20040824 |
|
| A711 | Notification of change in applicant |
Free format text: JAPANESE INTERMEDIATE CODE: A711 Effective date: 20040913 |
|
| A521 | Written amendment |
Effective date: 20050407 Free format text: JAPANESE INTERMEDIATE CODE: A523 |
|
| A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20060822 |
|
| A131 | Notification of reasons for refusal |
Effective date: 20060824 Free format text: JAPANESE INTERMEDIATE CODE: A131 |
|
| A761 | Written withdrawal of application |
Free format text: JAPANESE INTERMEDIATE CODE: A761 Effective date: 20060908 |