JPH11111942A5 - - Google Patents

Info

Publication number
JPH11111942A5
JPH11111942A5 JP1997265344A JP26534497A JPH11111942A5 JP H11111942 A5 JPH11111942 A5 JP H11111942A5 JP 1997265344 A JP1997265344 A JP 1997265344A JP 26534497 A JP26534497 A JP 26534497A JP H11111942 A5 JPH11111942 A5 JP H11111942A5
Authority
JP
Japan
Prior art keywords
film
polycrystalline silicon
plug
contact
sin
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1997265344A
Other languages
English (en)
Japanese (ja)
Other versions
JPH11111942A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP9265344A priority Critical patent/JPH11111942A/ja
Priority claimed from JP9265344A external-priority patent/JPH11111942A/ja
Publication of JPH11111942A publication Critical patent/JPH11111942A/ja
Publication of JPH11111942A5 publication Critical patent/JPH11111942A5/ja
Pending legal-status Critical Current

Links

JP9265344A 1997-09-30 1997-09-30 多結晶シリコンプラグを用いたコンタクトホールの形成方法 Pending JPH11111942A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9265344A JPH11111942A (ja) 1997-09-30 1997-09-30 多結晶シリコンプラグを用いたコンタクトホールの形成方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9265344A JPH11111942A (ja) 1997-09-30 1997-09-30 多結晶シリコンプラグを用いたコンタクトホールの形成方法

Publications (2)

Publication Number Publication Date
JPH11111942A JPH11111942A (ja) 1999-04-23
JPH11111942A5 true JPH11111942A5 (enExample) 2005-03-10

Family

ID=17415880

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9265344A Pending JPH11111942A (ja) 1997-09-30 1997-09-30 多結晶シリコンプラグを用いたコンタクトホールの形成方法

Country Status (1)

Country Link
JP (1) JPH11111942A (enExample)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11393761B2 (en) * 2018-12-25 2022-07-19 Tdk Corporation Circuit board and its manufacturing method

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05218343A (ja) * 1992-01-31 1993-08-27 Sony Corp 半導体装置およびその製造方法
JPH05304269A (ja) * 1992-04-24 1993-11-16 Nec Corp 半導体装置
JPH07183395A (ja) * 1993-12-22 1995-07-21 Hitachi Ltd 半導体装置
KR0155831B1 (ko) * 1995-06-20 1998-12-01 김광호 셀프얼라인을 이용한 듀얼패드셀 반도체장치 및 그것의 제조방법
JP3532325B2 (ja) * 1995-07-21 2004-05-31 株式会社東芝 半導体記憶装置
JPH09129842A (ja) * 1995-10-26 1997-05-16 Mitsubishi Electric Corp 半導体装置の製造方法

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