JPH11111942A - 多結晶シリコンプラグを用いたコンタクトホールの形成方法 - Google Patents

多結晶シリコンプラグを用いたコンタクトホールの形成方法

Info

Publication number
JPH11111942A
JPH11111942A JP9265344A JP26534497A JPH11111942A JP H11111942 A JPH11111942 A JP H11111942A JP 9265344 A JP9265344 A JP 9265344A JP 26534497 A JP26534497 A JP 26534497A JP H11111942 A JPH11111942 A JP H11111942A
Authority
JP
Japan
Prior art keywords
polycrystalline silicon
film
gate electrode
layer gate
plug
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9265344A
Other languages
English (en)
Japanese (ja)
Other versions
JPH11111942A5 (enExample
Inventor
Mamoru Fujimoto
衛 藤本
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Oki Electric Industry Co Ltd
Original Assignee
Oki Electric Industry Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Oki Electric Industry Co Ltd filed Critical Oki Electric Industry Co Ltd
Priority to JP9265344A priority Critical patent/JPH11111942A/ja
Publication of JPH11111942A publication Critical patent/JPH11111942A/ja
Publication of JPH11111942A5 publication Critical patent/JPH11111942A5/ja
Pending legal-status Critical Current

Links

Landscapes

  • Drying Of Semiconductors (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
  • Semiconductor Memories (AREA)
  • Electrodes Of Semiconductors (AREA)
JP9265344A 1997-09-30 1997-09-30 多結晶シリコンプラグを用いたコンタクトホールの形成方法 Pending JPH11111942A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9265344A JPH11111942A (ja) 1997-09-30 1997-09-30 多結晶シリコンプラグを用いたコンタクトホールの形成方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9265344A JPH11111942A (ja) 1997-09-30 1997-09-30 多結晶シリコンプラグを用いたコンタクトホールの形成方法

Publications (2)

Publication Number Publication Date
JPH11111942A true JPH11111942A (ja) 1999-04-23
JPH11111942A5 JPH11111942A5 (enExample) 2005-03-10

Family

ID=17415880

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9265344A Pending JPH11111942A (ja) 1997-09-30 1997-09-30 多結晶シリコンプラグを用いたコンタクトホールの形成方法

Country Status (1)

Country Link
JP (1) JPH11111942A (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111385971A (zh) * 2018-12-25 2020-07-07 Tdk株式会社 电路基板及其制造方法

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05218343A (ja) * 1992-01-31 1993-08-27 Sony Corp 半導体装置およびその製造方法
JPH05304269A (ja) * 1992-04-24 1993-11-16 Nec Corp 半導体装置
JPH07183395A (ja) * 1993-12-22 1995-07-21 Hitachi Ltd 半導体装置
JPH098254A (ja) * 1995-06-20 1997-01-10 Samsung Electron Co Ltd デュアルパッド付き半導体素子及びその製造方法
JPH0997882A (ja) * 1995-07-21 1997-04-08 Toshiba Corp 半導体記憶装置及びその製造方法
JPH09129842A (ja) * 1995-10-26 1997-05-16 Mitsubishi Electric Corp 半導体装置の製造方法

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05218343A (ja) * 1992-01-31 1993-08-27 Sony Corp 半導体装置およびその製造方法
JPH05304269A (ja) * 1992-04-24 1993-11-16 Nec Corp 半導体装置
JPH07183395A (ja) * 1993-12-22 1995-07-21 Hitachi Ltd 半導体装置
JPH098254A (ja) * 1995-06-20 1997-01-10 Samsung Electron Co Ltd デュアルパッド付き半導体素子及びその製造方法
JPH0997882A (ja) * 1995-07-21 1997-04-08 Toshiba Corp 半導体記憶装置及びその製造方法
JPH09129842A (ja) * 1995-10-26 1997-05-16 Mitsubishi Electric Corp 半導体装置の製造方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111385971A (zh) * 2018-12-25 2020-07-07 Tdk株式会社 电路基板及其制造方法

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JPH11111942A5 (enExample)

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