JPH10321691A - 基板搬送方法及び該方法を使用する露光装置 - Google Patents

基板搬送方法及び該方法を使用する露光装置

Info

Publication number
JPH10321691A
JPH10321691A JP9125203A JP12520397A JPH10321691A JP H10321691 A JPH10321691 A JP H10321691A JP 9125203 A JP9125203 A JP 9125203A JP 12520397 A JP12520397 A JP 12520397A JP H10321691 A JPH10321691 A JP H10321691A
Authority
JP
Japan
Prior art keywords
wafer
substrate
positioning
slider
exposure apparatus
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9125203A
Other languages
English (en)
Japanese (ja)
Other versions
JPH10321691A5 (https=
Inventor
Tetsuo Taniguchi
哲夫 谷口
Naohiko Iwata
直彦 岩田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nikon Corp
Original Assignee
Nikon Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nikon Corp filed Critical Nikon Corp
Priority to JP9125203A priority Critical patent/JPH10321691A/ja
Publication of JPH10321691A publication Critical patent/JPH10321691A/ja
Publication of JPH10321691A5 publication Critical patent/JPH10321691A5/ja
Pending legal-status Critical Current

Links

Landscapes

  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
JP9125203A 1997-05-15 1997-05-15 基板搬送方法及び該方法を使用する露光装置 Pending JPH10321691A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9125203A JPH10321691A (ja) 1997-05-15 1997-05-15 基板搬送方法及び該方法を使用する露光装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9125203A JPH10321691A (ja) 1997-05-15 1997-05-15 基板搬送方法及び該方法を使用する露光装置

Publications (2)

Publication Number Publication Date
JPH10321691A true JPH10321691A (ja) 1998-12-04
JPH10321691A5 JPH10321691A5 (https=) 2005-04-07

Family

ID=14904462

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9125203A Pending JPH10321691A (ja) 1997-05-15 1997-05-15 基板搬送方法及び該方法を使用する露光装置

Country Status (1)

Country Link
JP (1) JPH10321691A (https=)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006269952A (ja) * 2005-03-25 2006-10-05 Nsk Ltd 近接露光装置
JP2009295950A (ja) * 2008-05-09 2009-12-17 Nsk Ltd スキャン露光装置およびスキャン露光方法
JP2016527407A (ja) * 2013-05-22 2016-09-08 ハネウェル・リミテッド 製紙機械または他のシステムのためのスキャンセンサ構成
CN107618872A (zh) * 2016-07-15 2018-01-23 石峰 一种双联双工位送料装置
CN116469803A (zh) * 2023-04-17 2023-07-21 浙江海纳半导体股份有限公司 一种去边设备

Citations (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63163907A (ja) * 1986-12-26 1988-07-07 Toyota Motor Corp 知能ロボツトにおける座標合わせ方法
JPH02262991A (ja) * 1989-03-31 1990-10-25 Mitsubishi Electric Corp ロボット動作監視装置
JPH065691A (ja) * 1992-06-19 1994-01-14 Fujitsu Ltd 半導体露光装置
JPH06163357A (ja) * 1992-11-19 1994-06-10 Canon Inc 露光装置
JPH0677246U (ja) * 1993-03-30 1994-10-28 安藤電気株式会社 高精度ｉｃアライメント機構
JPH0845825A (ja) * 1994-07-28 1996-02-16 Canon Inc 半導体露光装置
JPH0878302A (ja) * 1994-08-31 1996-03-22 Nec Corp 露光装置
JPH08264624A (ja) * 1995-03-20 1996-10-11 Nikon Corp 基板の位置決め装置
JPH08279456A (ja) * 1995-04-04 1996-10-22 Canon Inc 半導体露光装置
JPH08293455A (ja) * 1995-04-21 1996-11-05 Canon Inc 半導体露光装置
JPH08306763A (ja) * 1995-04-27 1996-11-22 Nikon Corp 位置合わせ装置

Patent Citations (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63163907A (ja) * 1986-12-26 1988-07-07 Toyota Motor Corp 知能ロボツトにおける座標合わせ方法
JPH02262991A (ja) * 1989-03-31 1990-10-25 Mitsubishi Electric Corp ロボット動作監視装置
JPH065691A (ja) * 1992-06-19 1994-01-14 Fujitsu Ltd 半導体露光装置
JPH06163357A (ja) * 1992-11-19 1994-06-10 Canon Inc 露光装置
JPH0677246U (ja) * 1993-03-30 1994-10-28 安藤電気株式会社 高精度ｉｃアライメント機構
JPH0845825A (ja) * 1994-07-28 1996-02-16 Canon Inc 半導体露光装置
JPH0878302A (ja) * 1994-08-31 1996-03-22 Nec Corp 露光装置
JPH08264624A (ja) * 1995-03-20 1996-10-11 Nikon Corp 基板の位置決め装置
JPH08279456A (ja) * 1995-04-04 1996-10-22 Canon Inc 半導体露光装置
JPH08293455A (ja) * 1995-04-21 1996-11-05 Canon Inc 半導体露光装置
JPH08306763A (ja) * 1995-04-27 1996-11-22 Nikon Corp 位置合わせ装置

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006269952A (ja) * 2005-03-25 2006-10-05 Nsk Ltd 近接露光装置
JP2009295950A (ja) * 2008-05-09 2009-12-17 Nsk Ltd スキャン露光装置およびスキャン露光方法
JP2016527407A (ja) * 2013-05-22 2016-09-08 ハネウェル・リミテッド 製紙機械または他のシステムのためのスキャンセンサ構成
CN107618872A (zh) * 2016-07-15 2018-01-23 石峰 一种双联双工位送料装置
CN116469803A (zh) * 2023-04-17 2023-07-21 浙江海纳半导体股份有限公司 一种去边设备

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