JPH10207525A - 処理制御装置 - Google Patents

処理制御装置

Info

Publication number
JPH10207525A
JPH10207525A JP9022107A JP2210797A JPH10207525A JP H10207525 A JPH10207525 A JP H10207525A JP 9022107 A JP9022107 A JP 9022107A JP 2210797 A JP2210797 A JP 2210797A JP H10207525 A JPH10207525 A JP H10207525A
Authority
JP
Japan
Prior art keywords
processing
schedule
time
scheduled
information
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9022107A
Other languages
English (en)
Japanese (ja)
Other versions
JPH10207525A5 (enExample
Inventor
Katsushi Yamamori
克史 山森
Masatoshi Kiyoku
正敏 曲
Masanori Okuno
正則 奥野
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kokusai Denki Electric Inc
Original Assignee
Kokusai Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kokusai Electric Co Ltd filed Critical Kokusai Electric Co Ltd
Priority to JP9022107A priority Critical patent/JPH10207525A/ja
Publication of JPH10207525A publication Critical patent/JPH10207525A/ja
Publication of JPH10207525A5 publication Critical patent/JPH10207525A5/ja
Pending legal-status Critical Current

Links

Classifications

    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P90/00—Enabling technologies with a potential contribution to greenhouse gas [GHG] emissions mitigation
    • Y02P90/02—Total factory control, e.g. smart factories, flexible manufacturing systems [FMS] or integrated manufacturing systems [IMS]

Landscapes

  • Multi-Process Working Machines And Systems (AREA)
  • General Factory Administration (AREA)
  • Control By Computers (AREA)
JP9022107A 1997-01-21 1997-01-21 処理制御装置 Pending JPH10207525A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9022107A JPH10207525A (ja) 1997-01-21 1997-01-21 処理制御装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9022107A JPH10207525A (ja) 1997-01-21 1997-01-21 処理制御装置

Publications (2)

Publication Number Publication Date
JPH10207525A true JPH10207525A (ja) 1998-08-07
JPH10207525A5 JPH10207525A5 (enExample) 2004-12-16

Family

ID=12073674

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9022107A Pending JPH10207525A (ja) 1997-01-21 1997-01-21 処理制御装置

Country Status (1)

Country Link
JP (1) JPH10207525A (enExample)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002341923A (ja) * 2001-05-16 2002-11-29 Dainippon Screen Mfg Co Ltd 基板処理装置のスケジュール作成方法及びそのプログラム
US7072730B2 (en) 2000-01-17 2006-07-04 Ebara Corporation Substrate transfer controlling apparatus and substrate transferring method
JP2007005822A (ja) * 2001-04-26 2007-01-11 Tokyo Electron Ltd ウェーハ処理ツール内のウェーハの移動をスケジューリングするシステムと方法

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7072730B2 (en) 2000-01-17 2006-07-04 Ebara Corporation Substrate transfer controlling apparatus and substrate transferring method
US7313452B2 (en) 2000-01-17 2007-12-25 Ebara Corporation Substrate transfer controlling apparatus and substrate transferring method
JP2007005822A (ja) * 2001-04-26 2007-01-11 Tokyo Electron Ltd ウェーハ処理ツール内のウェーハの移動をスケジューリングするシステムと方法
JP2012124499A (ja) * 2001-04-26 2012-06-28 Tokyo Electron Ltd ウェーハ処理ツール内のウェーハの移動をスケジューリングするシステムと方法
JP2002341923A (ja) * 2001-05-16 2002-11-29 Dainippon Screen Mfg Co Ltd 基板処理装置のスケジュール作成方法及びそのプログラム

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