JPH10195635A - 円筒状部材の内周面への硬質カーボン膜形成方法 - Google Patents
円筒状部材の内周面への硬質カーボン膜形成方法Info
- Publication number
- JPH10195635A JPH10195635A JP256797A JP256797A JPH10195635A JP H10195635 A JPH10195635 A JP H10195635A JP 256797 A JP256797 A JP 256797A JP 256797 A JP256797 A JP 256797A JP H10195635 A JPH10195635 A JP H10195635A
- Authority
- JP
- Japan
- Prior art keywords
- auxiliary electrode
- cylindrical member
- opening
- vacuum chamber
- intermediate layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP256797A JPH10195635A (ja) | 1997-01-10 | 1997-01-10 | 円筒状部材の内周面への硬質カーボン膜形成方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP256797A JPH10195635A (ja) | 1997-01-10 | 1997-01-10 | 円筒状部材の内周面への硬質カーボン膜形成方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH10195635A true JPH10195635A (ja) | 1998-07-28 |
| JPH10195635A5 JPH10195635A5 (enExample) | 2004-11-25 |
Family
ID=11532956
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP256797A Pending JPH10195635A (ja) | 1997-01-10 | 1997-01-10 | 円筒状部材の内周面への硬質カーボン膜形成方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH10195635A (enExample) |
-
1997
- 1997-01-10 JP JP256797A patent/JPH10195635A/ja active Pending
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A521 | Written amendment |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20031209 |
|
| A621 | Written request for application examination |
Effective date: 20031209 Free format text: JAPANESE INTERMEDIATE CODE: A621 |
|
| A977 | Report on retrieval |
Effective date: 20061205 Free format text: JAPANESE INTERMEDIATE CODE: A971007 |
|
| A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20061226 |
|
| A02 | Decision of refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A02 Effective date: 20080212 |