JPH09328391A - 多結晶シリコン装填材料から溶融シリコンメルトを製造する方法 - Google Patents

多結晶シリコン装填材料から溶融シリコンメルトを製造する方法

Info

Publication number
JPH09328391A
JPH09328391A JP9018503A JP1850397A JPH09328391A JP H09328391 A JPH09328391 A JP H09328391A JP 9018503 A JP9018503 A JP 9018503A JP 1850397 A JP1850397 A JP 1850397A JP H09328391 A JPH09328391 A JP H09328391A
Authority
JP
Japan
Prior art keywords
polycrystalline silicon
silicon
crucible
granular
wall
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9018503A
Other languages
English (en)
Japanese (ja)
Other versions
JPH09328391A5 (enExample
Inventor
Kyong-Min Kim
キョン−ミン・キム
Leon A Allan
レオン・エイ・アレン
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
SunEdison Inc
Original Assignee
SunEdison Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by SunEdison Inc filed Critical SunEdison Inc
Publication of JPH09328391A publication Critical patent/JPH09328391A/ja
Publication of JPH09328391A5 publication Critical patent/JPH09328391A5/ja
Pending legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
    • C30B15/02—Single-crystal growth by pulling from a melt, e.g. Czochralski method adding crystallising materials or reactants forming it in situ to the melt
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
    • C30B29/02—Elements

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Silicon Compounds (AREA)
JP9018503A 1996-02-01 1997-01-31 多結晶シリコン装填材料から溶融シリコンメルトを製造する方法 Pending JPH09328391A (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US08/595075 1996-02-01
US08/595,075 US5814148A (en) 1996-02-01 1996-02-01 Method for preparing molten silicon melt from polycrystalline silicon charge

Publications (2)

Publication Number Publication Date
JPH09328391A true JPH09328391A (ja) 1997-12-22
JPH09328391A5 JPH09328391A5 (enExample) 2004-10-14

Family

ID=24381626

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9018503A Pending JPH09328391A (ja) 1996-02-01 1997-01-31 多結晶シリコン装填材料から溶融シリコンメルトを製造する方法

Country Status (8)

Country Link
US (1) US5814148A (enExample)
EP (1) EP0787836B1 (enExample)
JP (1) JPH09328391A (enExample)
KR (1) KR970062081A (enExample)
CN (1) CN1157342A (enExample)
DE (1) DE69611597T2 (enExample)
MY (1) MY112066A (enExample)
SG (1) SG76498A1 (enExample)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012508151A (ja) * 2008-11-05 2012-04-05 エムイーエムシー・シンガポール・プライベイト・リミテッド シリコンの結晶成長のためのシリコン粉末の溶融物を調製する方法
JP2012140285A (ja) * 2010-12-28 2012-07-26 Siltronic Japan Corp シリコン単結晶インゴットの製造方法
JP2014514238A (ja) * 2011-04-14 2014-06-19 アールイーシー シリコン インコーポレイテッド 多結晶シリコンシステム

Families Citing this family (24)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0856599A3 (en) * 1997-01-31 2000-03-22 Komatsu Electronic Metals Co., Ltd Apparatus for feeding raw material into a quartz crucible and method of feeding the same
JP3189764B2 (ja) * 1997-09-29 2001-07-16 住友金属工業株式会社 シリコン単結晶原料の溶解方法
US5919303A (en) * 1997-10-16 1999-07-06 Memc Electronic Materials, Inc. Process for preparing a silicon melt from a polysilicon charge
US6589332B1 (en) 1998-11-03 2003-07-08 Memc Electronic Materials, Inc. Method and system for measuring polycrystalline chunk size and distribution in the charge of a Czochralski process
US6284040B1 (en) 1999-01-13 2001-09-04 Memc Electronic Materials, Inc. Process of stacking and melting polycrystalline silicon for high quality single crystal production
US6344083B1 (en) 2000-02-14 2002-02-05 Memc Electronic Materials, Inc. Process for producing a silicon melt
US6749683B2 (en) 2000-02-14 2004-06-15 Memc Electronic Materials, Inc. Process for producing a silicon melt
US8021483B2 (en) * 2002-02-20 2011-09-20 Hemlock Semiconductor Corporation Flowable chips and methods for the preparation and use of same, and apparatus for use in the methods
US7141114B2 (en) * 2004-06-30 2006-11-28 Rec Silicon Inc Process for producing a crystalline silicon ingot
NO324710B1 (no) * 2004-12-29 2007-12-03 Elkem Solar As Fremgangsmate for fylling av digel med silisium av solcellekvalitet
JP4961753B2 (ja) * 2006-01-20 2012-06-27 株式会社Ｓｕｍｃｏ 単結晶製造管理システム及び方法
JP4753308B2 (ja) * 2006-07-13 2011-08-24 Ｓｕｍｃｏ Ｔｅｃｈｘｉｖ株式会社 半導体ウェーハ素材の溶解方法及び半導体ウェーハの結晶育成方法
CN101148777B (zh) * 2007-07-19 2011-03-23 任丙彦 直拉法生长掺镓硅单晶的方法和装置
US20090120353A1 (en) * 2007-11-13 2009-05-14 Memc Electronic Materials, Inc. Reduction of air pockets in silicon crystals by avoiding the introduction of nearly-insoluble gases into the melt
JP5511945B2 (ja) * 2009-04-29 2014-06-04 シリコー マテリアルズ インコーポレイテッド Ｕｍｇ−ｓｉ材料精製のためのプロセス管理
CN102953117B (zh) * 2011-08-31 2015-06-10 上海普罗新能源有限公司 硅锭的铸造方法
CN102732945B (zh) * 2012-04-13 2015-11-25 英利能源（中国）有限公司 一种单晶硅铸锭装料方法
WO2014037965A1 (en) * 2012-09-05 2014-03-13 MEMC ELECTRONIC METERIALS S.p.A. Method of loading a charge of polysilicon into a crucible
CN103074681B (zh) * 2013-02-17 2016-03-16 英利集团有限公司 一种二次加料方法
CN107604446A (zh) * 2017-10-25 2018-01-19 宁晋晶兴电子材料有限公司 一种新型的熔融表皮料结构及其熔融方法
DE102019208670A1 (de) * 2019-06-14 2020-12-17 Siltronic Ag Verfahren zur Herstellung von Halbleiterscheiben aus Silizium
CN114086243A (zh) * 2021-11-29 2022-02-25 曲靖晶龙电子材料有限公司 单晶硅棒的制备方法
CN115467013A (zh) * 2022-08-22 2022-12-13 包头美科硅能源有限公司 一种用于拉晶生产中提高颗粒硅投料量的方法
CN115404356B (zh) * 2022-09-22 2024-03-22 同创普润(上海)机电高科技有限公司 一种降低高纯铝熔体中不熔物含量的方法

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4249988A (en) * 1978-03-15 1981-02-10 Western Electric Company, Inc. Growing crystals from a melt by controlling additions of material thereto
WO1986006764A1 (en) * 1985-05-17 1986-11-20 J.C. Schumacher Company Continuously pulled single crystal silicon ingots
JPS6287489A (ja) * 1985-10-12 1987-04-21 Sumitomo Electric Ind Ltd るつぼの回収方法及び装置
JPH01148779A (ja) * 1987-12-03 1989-06-12 Toshiba Ceramics Co Ltd 結晶成分の供給方法
JPH01286995A (ja) * 1988-05-12 1989-11-17 Toshiba Ceramics Co Ltd シリコン単結晶の製造方法
JPH03193694A (ja) * 1989-12-21 1991-08-23 Sumitomo Metal Ind Ltd 結晶成長装置
JPH03199189A (ja) * 1989-12-27 1991-08-30 Kawasaki Steel Corp 半導体単結晶の製造方法
DE4106589C2 (de) 1991-03-01 1997-04-24 Wacker Siltronic Halbleitermat Kontinuierliches Nachchargierverfahren mit flüssigem Silicium beim Tiegelziehen nach Czochralski
US5242667A (en) 1991-07-26 1993-09-07 Ferrofluidics Corporation Solid pellet feeder for controlled melt replenishment in continuous crystal growing process
JPH05139886A (ja) * 1991-11-21 1993-06-08 Toshiba Corp 砒素化合物単結晶の製造方法
JP2506525B2 (ja) * 1992-01-30 1996-06-12 信越半導体株式会社 シリコン単結晶の製造方法
JP2531415B2 (ja) * 1992-03-24 1996-09-04 住友金属工業株式会社 結晶成長方法
JPH05319978A (ja) * 1992-05-22 1993-12-03 Sumitomo Metal Ind Ltd 溶融層法による単結晶引き上げ方法
US5588993A (en) * 1995-07-25 1996-12-31 Memc Electronic Materials, Inc. Method for preparing molten silicon melt from polycrystalline silicon charge

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012508151A (ja) * 2008-11-05 2012-04-05 エムイーエムシー・シンガポール・プライベイト・リミテッド シリコンの結晶成長のためのシリコン粉末の溶融物を調製する方法
JP2012140285A (ja) * 2010-12-28 2012-07-26 Siltronic Japan Corp シリコン単結晶インゴットの製造方法
JP2014514238A (ja) * 2011-04-14 2014-06-19 アールイーシー シリコン インコーポレイテッド 多結晶シリコンシステム

Also Published As

Publication number Publication date
MY112066A (en) 2001-03-31
EP0787836A3 (en) 1998-04-01
KR970062081A (ko) 1997-09-12
US5814148A (en) 1998-09-29
DE69611597D1 (de) 2001-02-22
SG76498A1 (en) 2000-11-21
DE69611597T2 (de) 2001-05-31
EP0787836A2 (en) 1997-08-06
CN1157342A (zh) 1997-08-20
EP0787836B1 (en) 2001-01-17

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