JPH09289167A5 - - Google Patents
Info
- Publication number
- JPH09289167A5 JPH09289167A5 JP1996336340A JP33634096A JPH09289167A5 JP H09289167 A5 JPH09289167 A5 JP H09289167A5 JP 1996336340 A JP1996336340 A JP 1996336340A JP 33634096 A JP33634096 A JP 33634096A JP H09289167 A5 JPH09289167 A5 JP H09289167A5
- Authority
- JP
- Japan
- Prior art keywords
- film
- semiconductor device
- substrate
- silicon film
- oxide film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP33634096A JPH09289167A (ja) | 1996-02-23 | 1996-12-02 | 半導体薄膜およびその作製方法ならびに半導体装置およびその作製方法 |
Applications Claiming Priority (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8-61896 | 1996-02-23 | ||
| JP8-61895 | 1996-02-23 | ||
| JP6189596 | 1996-02-23 | ||
| JP6189696 | 1996-02-23 | ||
| JP33634096A JPH09289167A (ja) | 1996-02-23 | 1996-12-02 | 半導体薄膜およびその作製方法ならびに半導体装置およびその作製方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH09289167A JPH09289167A (ja) | 1997-11-04 |
| JPH09289167A5 true JPH09289167A5 (enExample) | 2004-11-18 |
Family
ID=27297671
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP33634096A Withdrawn JPH09289167A (ja) | 1996-02-23 | 1996-12-02 | 半導体薄膜およびその作製方法ならびに半導体装置およびその作製方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH09289167A (enExample) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4476390B2 (ja) | 1998-09-04 | 2010-06-09 | 株式会社半導体エネルギー研究所 | 半導体装置の作製方法 |
| US6346730B1 (en) | 1999-04-06 | 2002-02-12 | Semiconductor Energy Laboratory Co., Ltd. | Liquid crystal display device having a pixel TFT formed in a display region and a drive circuit formed in the periphery of the display region on the same substrate |
-
1996
- 1996-12-02 JP JP33634096A patent/JPH09289167A/ja not_active Withdrawn
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