JPH077149B2 - 放射偏向器アセンブリ - Google Patents

放射偏向器アセンブリ

Info

Publication number
JPH077149B2
JPH077149B2 JP61505472A JP50547286A JPH077149B2 JP H077149 B2 JPH077149 B2 JP H077149B2 JP 61505472 A JP61505472 A JP 61505472A JP 50547286 A JP50547286 A JP 50547286A JP H077149 B2 JPH077149 B2 JP H077149B2
Authority
JP
Japan
Prior art keywords
radiation
deflector
waveguide
substrate
deflector assembly
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP61505472A
Other languages
English (en)
Other versions
JPS63501384A (ja
Inventor
イアン・ウィリアム スタンレイ
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
British Telecommunications PLC
Original Assignee
British Telecommunications PLC
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from GB858525461A external-priority patent/GB8525461D0/en
Priority claimed from GB858525458A external-priority patent/GB8525458D0/en
Priority claimed from GB858525462A external-priority patent/GB8525462D0/en
Priority claimed from GB858525460A external-priority patent/GB8525460D0/en
Priority claimed from GB858525459A external-priority patent/GB8525459D0/en
Priority claimed from GB858526189A external-priority patent/GB8526189D0/en
Application filed by British Telecommunications PLC filed Critical British Telecommunications PLC
Publication of JPS63501384A publication Critical patent/JPS63501384A/ja
Publication of JPH077149B2 publication Critical patent/JPH077149B2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00—Semiconductor lasers
    • H01S5/10—Construction or shape of the optical resonator, e.g. extended or external cavity, coupled cavities, bent-guide, varying width, thickness or composition of the active region
    • H01S5/14—External cavity lasers
    • H01S5/141—External cavity lasers using a wavelength selective device, e.g. a grating or etalon
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/266—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light by interferometric means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/12—Generating the spectrum; Monochromators
    • G01J3/26—Generating the spectrum; Monochromators using multiple reflection, e.g. Fabry-Perot interferometer, variable interference filters
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/001—Optical devices or arrangements for the control of light using movable or deformable optical elements based on interference in an adjustable optical cavity
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/28—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals
    • G02B6/2804—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals forming multipart couplers without wavelength selective elements, e.g. "T" couplers, star couplers
    • G02B6/2817—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals forming multipart couplers without wavelength selective elements, e.g. "T" couplers, star couplers using reflective elements to split or combine optical signals
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/32—Optical coupling means having lens focusing means positioned between opposed fibre ends
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/36—Mechanical coupling means
    • G02B6/38—Mechanical coupling means having fibre to fibre mating means
    • G02B6/3801—Permanent connections, i.e. wherein fibres are kept aligned by mechanical means
    • G02B6/3803—Adjustment or alignment devices for alignment prior to splicing
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/42—Coupling light guides with opto-electronic elements
    • G02B6/4201—Packages, e.g. shape, construction, internal or external details
    • G02B6/4219—Mechanical fixtures for holding or positioning the elements relative to each other in the couplings; Alignment methods for the elements, e.g. measuring or observing methods especially used therefor
    • G02B6/4228—Passive alignment, i.e. without a detection of the degree of coupling or the position of the elements
    • G02B6/423—Passive alignment, i.e. without a detection of the degree of coupling or the position of the elements using guiding surfaces for the alignment
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/28—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals
    • G02B6/293—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means
    • G02B6/29346—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means operating by wave or beam interference
    • G02B6/29358—Multiple beam interferometer external to a light guide, e.g. Fabry-Pérot, etalon, VIPA plate, OTDL plate, continuous interferometer, parallel plate resonator
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/351—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements
    • G02B6/3512—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements the optical element being reflective, e.g. mirror
    • G02B6/3516—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements the optical element being reflective, e.g. mirror the reflective optical element moving along the beam path, e.g. controllable diffractive effects using multiple micromirrors within the beam
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/3564—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details
    • G02B6/3568—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details characterised by the actuating force
    • G02B6/357—Electrostatic force
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/10—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating
    • H01S3/105—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating by controlling the mutual position or the reflecting properties of the reflectors of the cavity, e.g. by controlling the cavity length
    • H01S3/1055—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating by controlling the mutual position or the reflecting properties of the reflectors of the cavity, e.g. by controlling the cavity length one of the reflectors being constituted by a diffraction grating
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S359/00—Optical: systems and elements
    • Y10S359/90—Methods

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Electromagnetism (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • Optical Couplings Of Light Guides (AREA)
  • Spectrometry And Color Measurement (AREA)
  • Mechanical Optical Scanning Systems (AREA)
  • Optical Integrated Circuits (AREA)
  • Micromachines (AREA)
  • Glass Compositions (AREA)
  • Adhesives Or Adhesive Processes (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
  • Lasers (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Led Device Packages (AREA)
  • Agricultural Chemicals And Associated Chemicals (AREA)
  • Organic Low-Molecular-Weight Compounds And Preparation Thereof (AREA)
  • Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Input Circuits Of Receivers And Coupling Of Receivers And Audio Equipment (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
  • Switches With Compound Operations (AREA)
  • Signal Processing For Digital Recording And Reproducing (AREA)
  • Radiation-Therapy Devices (AREA)
  • Headphones And Earphones (AREA)
  • Fluid-Damping Devices (AREA)
  • Printers Or Recording Devices Using Electromagnetic And Radiation Means (AREA)

Description

【発明の詳細な説明】 〔技術分野〕 本発明は、少なくとも三つの放射導波路と、第一の位置
では第一の組合せで二つの導波路間に放射を通過させ、
第二の位置では第二の組合せで二つの導波路間に放射を
通過させる制御可能な放射偏向器と、制御信号に応答し
て上記放射偏向器の位置を制御する制御手段とを備えた
構成の放射偏向器アセンブリに関する。このようなアセ
ンブリを以下では「上述した構成の」という言葉で参照
する。
〔背景技術〕
上述した構成の放射偏向器アセンブリは、特に光伝送装
置のスイッチとして利用できる。IBMテクニカル・デス
クロージャ・バレッティン第27巻第二号、1984年７月
（第11項ないし第12項）では、三組の光ファイバの下に
配置された固体状態の鏡の配列について説明している。
緩和位置では、放射光はひとつの組の光ファイバから鏡
に入射し、他の組の方向に反射される。鏡の向きが偏向
すると、放射光は別な方向に反射して第三の組のファイ
バの方向に向かう。
この構成の大きな問題は、鏡に対して光ファイバの位置
を正確に合わせるのが困難なことである。単位面積あた
りの鏡の数を最大にするために鏡を大規模に配列した場
合には、位置合わせの問題が重要となる。
〔発明の開示〕
本発明の放射偏向器アセンブリは、上述した構成の放射
偏向器アセンブリにおいて、導波路および偏向器が共通
の基板に取り付けられたことを特徴とする。
本発明は、導波路および偏向器の双方を同一の基板に取
り付けることにより、位置合わせの問題を解決する。
導波路は実質的に同一の面内に配置されることが望まし
く、偏向器の移動方向は実質的に導波路の面と同一の面
であることが便利である。別の構成として、別々の面に
導波路を設けることもできる。
本発明は、基板が単結晶、例えばシリコン単結晶で構成
されている場合に特に適し、その場合には、異方性エッ
チング技術を用いて、導波路を取り付けるための同じ深
さまたは異なる深さの溝を形成できる。
本発明は、光波長帯の放射を偏向させる場合は特に適
し、典型的には、本発明による放射偏向アセンブリを多
数組み合わせて光スイッチ配列を構成する場合に特に適
する。
場合によっては、偏向器が第一の位置と第二の位置との
間を並進移動するピストン部材を含むこともできる。し
かし、偏向器は、第一の位置と第二の位置との間で回動
するカンチレバー状のアームを含むことが望ましい。
偏向器が基板に一体に形成されることが特に望ましい。
これは、一般的なエッチング技術またはレーザエッチン
グ技術を用いて製造できる。
偏向器は、第一の位置と第二の位置との双方に放射を偏
向させる構造であることが望ましいが、場合によって
は、偏向器が第一の位置に配置されたときには放射がひ
とつの導波路から他の導波路に直接に伝搬し、偏向器が
第二の位置に配置されたときに他の導波路に折り曲げる
構造でもよい。
偏向器としては、典型的には放射を反射する反射鏡を用
いるが、屈折型または回折型のような偏向器も可能であ
る。
場合によっては、基板に適当な材料を溶解させることに
より導波路を形成することもできるが、基板の表面に形
成された溝、典型的にはＶ字溝に各導波路を取り付ける
ことが便利である。
上述したように基板はシリコンで構成されるが、他の基
板材料、例えばシリカ、リチウム・ニオベート、ガリウ
ム・ヒ素のようなIII−Ｖ化合物を用いることも可能で
ある。
偏向器の位置は、通常の静電技術、または本出願人によ
る同日出願「可動部材の取り付け構造」（PCT/GB86/006
28）に説明されたと同様の熱的な方法により制御でき
る。
光スイッチ配列と使用するための本発明実施例光反射ア
センブリについて添付図面を参照して説明する。
図面の簡単な説明 図は本発明実施例アセンブリの概略的な斜視図。
〔発明を実施するための最良の形態〕
図に示した光素子、すなわちアセンブリは、単結晶シリ
コン薄板１により構成された基板を含み、その上側表面
には、異方性マスクキング・エッチング技術を用いて、
三つのＶ字型溝２〜４が刻まれている。溝２〜４の深さ
は実質的に等しく、実質的に同一平面上に配置されてい
る。それぞれの溝２〜４は、基板１に形成された空洞５
内で終端されている。単一モード光ファイバ（図示せ
ず）がそれぞれの溝２〜４に配置され、その終端が空洞
５内を向いている。
空洞５内には、カンチレバー状で鉛直方向に軸着された
シリコン梁６が配置され、基板１の残りの部分と一体に
形成されている。
梁６は光反射器として動作する。
梁６は、その終端７を回転の軸とし、一対の電極により
生成された静電界に応答して、第一の位置と第二の位置
との間を回動し、一方の電極８は基板に取り付けられ、
他方の電極は梁６の上記電極８と向き合う面に取り付け
られる。梁６が接地電位の場合には、第二の電極は必要
ではない。これらの電極は、電源を含む電気的制御装置
（図示せず）に接続される。
梁６は、その第一の位置において、溝２内の光ファイバ
に沿って伝搬した放射光を溝３内の光ファイバに反射す
る。第二の位置では、溝２内のファイバから反射器６に
入射した放射光を溝４内のファイバに反射する。したが
って、図面に示した素子を光スイッチとして使用するこ
とができ、溝２内の光ファイバから到来した放射光を溝
３内の光ファイバまたは溝４内の光ファイバの一方に切
り換えることができる。
───────────────────────────────────────────────────── フロントページの続き (31)優先権主張番号 ８５２５４６１ (32)優先日 1985年10月16日 (33)優先権主張国 イギリス（ＧＢ） (31)優先権主張番号 ８５２５４６２ (32)優先日 1985年10月16日 (33)優先権主張国 イギリス（ＧＢ） (31)優先権主張番号 ８５２６１８９ (32)優先日 1985年10月23日 (33)優先権主張国 イギリス（ＧＢ）

Claims (7)

    【特許請求の範囲】
  1. 【請求項１】少なくとも三つの放射導波路（２、３、
    ４）と、 第一のモードの位置では第一の放射導波路と第二の放射
    導波路との間の放射を通過させ、第二のモードの位置で
    は第一の放射導波路と第三の放射導波路との間の放射を
    通過させる放射偏向器（６）と、 制御信号に応答して上記放射偏向器の位置を制御する制
    御手段と を備え、 上記放射偏向器は基板（１）に一体に形成され、 上記放射導波路は上記基板に設けられまたは上記基板に
    取り付けられた ことを特徴とする放射偏向器アセンブリ。
  2. 【請求項２】放射導波路は実質的に同一面内に配置され
    た請求の範囲第１項に記載の放射偏向器アセンブリ。
  3. 【請求項３】各々の放射導波路は、基板内に形成された
    対応する溝に取り付けられた導波部材を含む請求の範囲
    第１項または第２項に記載の放射偏向器アセンブリ。
  4. 【請求項４】放射偏向器はカンチレバー状のアームを含
    む請求の範囲第１項ないし第３項のいずれかに記載の放
    射偏向器アセンブリ。
  5. 【請求項５】放射偏向器は、第一の位置と第二の位置と
    の双方に放射を偏向させる構造である請求の範囲第１項
    ないし第４項のいずれかに記載の放射偏向器アセンブ
    リ。
  6. 【請求項６】放射導波路および放射偏向器は、それぞれ
    放射光を誘導および偏向させる構造である請求の範囲第
    １項ないし第５項のいずれかに記載の放射偏向器アセン
    ブリ。
  7. 【請求項７】基板は単結晶である請求の範囲第１項ない
    し第６項のいずれかに記載の放射偏向器アセンブリ。
JP61505472A 1985-10-16 1986-10-16 放射偏向器アセンブリ Expired - Lifetime JPH077149B2 (ja)

Applications Claiming Priority (13)

Application Number Priority Date Filing Date Title
GB858525461A GB8525461D0 (en) 1985-10-16 1985-10-16 Wavelength selection device
GB858525458A GB8525458D0 (en) 1985-10-16 1985-10-16 Positioning optical components & waveguides
GB858525462A GB8525462D0 (en) 1985-10-16 1985-10-16 Radiation deflector assembly
GB858525460A GB8525460D0 (en) 1985-10-16 1985-10-16 Movable member mounting
GB858525459A GB8525459D0 (en) 1985-10-16 1985-10-16 Mounting component to substrate
GB8525458 1985-10-23
GB858526189A GB8526189D0 (en) 1985-10-23 1985-10-23 Fabry-perot interferometer
GB8525462 1985-10-23
GB8526189 1985-10-23
GB8525460 1985-10-23
GB8525461 1985-10-23
GB8525459 1985-10-23
PCT/GB1986/000630 WO1987002475A1 (en) 1985-10-16 1986-10-16 Radiation deflector assembly

Publications (2)

Publication Number Publication Date
JPS63501384A JPS63501384A (ja) 1988-05-26
JPH077149B2 true JPH077149B2 (ja) 1995-01-30

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JP61505411A Expired - Fee Related JPH0690329B2 (ja) 1985-10-16 1986-10-16 ファブリペロ−干渉計
JP61505412A Expired - Lifetime JPH0827432B2 (ja) 1985-10-16 1986-10-16 波長選択素子
JP61505413A Expired - Lifetime JPH0769520B2 (ja) 1985-10-16 1986-10-16 可動部材の取付構造
JP61505472A Expired - Lifetime JPH077149B2 (ja) 1985-10-16 1986-10-16 放射偏向器アセンブリ
JP61505474A Expired - Lifetime JP2514343B2 (ja) 1985-10-16 1986-10-16 光素子と光導波路の結合装置

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JP61505412A Expired - Lifetime JPH0827432B2 (ja) 1985-10-16 1986-10-16 波長選択素子
JP61505413A Expired - Lifetime JPH0769520B2 (ja) 1985-10-16 1986-10-16 可動部材の取付構造

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EP (6) EP0219356B1 (ja)
JP (5) JPH0690329B2 (ja)
AT (6) ATE50864T1 (ja)
DE (6) DE3689537T2 (ja)
ES (3) ES2013599B3 (ja)
GR (3) GR3000242T3 (ja)
SG (1) SG892G (ja)
WO (6) WO1987002518A1 (ja)

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JPH0827432B2 (ja) 1996-03-21
JPH0769520B2 (ja) 1995-07-31
JPS63501383A (ja) 1988-05-26
EP0223414A1 (en) 1987-05-27
WO1987002518A1 (en) 1987-04-23
DE3667864D1 (de) 1990-02-01
EP0219357B1 (en) 1989-12-27
GR3000242T3 (en) 1991-03-15
EP0226296B1 (en) 1992-11-04
JPS63501385A (ja) 1988-05-26
ATE100245T1 (de) 1994-01-15
SG892G (en) 1992-03-20
JPS63501600A (ja) 1988-06-16
US4854658A (en) 1989-08-08
US4867532A (en) 1989-09-19
ATE48480T1 (de) 1989-12-15
DE3667335D1 (de) 1990-01-11
EP0219359A1 (en) 1987-04-22
ES2012346B3 (es) 1990-03-16
GR3000376T3 (en) 1991-06-07
EP0219356A1 (en) 1987-04-22
DE3689537T2 (de) 1994-04-28
WO1987002470A1 (en) 1987-04-23
DE3687063D1 (de) 1992-12-10
WO1987002476A1 (en) 1987-04-23
US4896936A (en) 1990-01-30
ES2011773B3 (es) 1990-02-16
EP0219357A1 (en) 1987-04-22
EP0219359B1 (en) 1990-03-07
JP2514343B2 (ja) 1996-07-10
DE3689537D1 (de) 1994-02-24
WO1987002475A1 (en) 1987-04-23
DE3669401D1 (en) 1990-04-12
JPS63501384A (ja) 1988-05-26
DE3677881D1 (de) 1991-04-11
JPH0690329B2 (ja) 1994-11-14
WO1987002474A1 (en) 1987-04-23
EP0219358B1 (en) 1991-03-06
EP0219356B1 (en) 1989-12-06
EP0223414B1 (en) 1994-01-12
US4825262A (en) 1989-04-25
GR3000264T3 (en) 1991-03-15
EP0226296A1 (en) 1987-06-24
ATE61487T1 (de) 1991-03-15
ES2013599B3 (es) 1990-05-16
DE3687063T2 (de) 1993-03-18
WO1987002472A1 (en) 1987-04-23
JPS63501382A (ja) 1988-05-26
ATE82076T1 (de) 1992-11-15
ATE50864T1 (de) 1990-03-15
US4846930A (en) 1989-07-11
US4871244A (en) 1989-10-03
EP0219358A1 (en) 1987-04-22
ATE49064T1 (de) 1990-01-15
US4802727A (en) 1989-02-07

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