JPH0746077B2 - 分光光度計 - Google Patents

分光光度計

Info

Publication number
JPH0746077B2
JPH0746077B2 JP60032965A JP3296585A JPH0746077B2 JP H0746077 B2 JPH0746077 B2 JP H0746077B2 JP 60032965 A JP60032965 A JP 60032965A JP 3296585 A JP3296585 A JP 3296585A JP H0746077 B2 JPH0746077 B2 JP H0746077B2
Authority
JP
Japan
Prior art keywords
glass fiber
fiber cable
measuring
light
light source
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP60032965A
Other languages
English (en)
Japanese (ja)
Other versions
JPS60194331A (ja
Inventor
ペーター・ヴイルツ
Original Assignee
ライボルト・アクチエンゲゼルシャフト
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by ライボルト・アクチエンゲゼルシャフト filed Critical ライボルト・アクチエンゲゼルシャフト
Publication of JPS60194331A publication Critical patent/JPS60194331A/ja
Publication of JPH0746077B2 publication Critical patent/JPH0746077B2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/255—Details, e.g. use of specially adapted sources, lighting or optical systems
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N2021/1734—Sequential different kinds of measurements; Combining two or more methods
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/8422—Investigating thin films, e.g. matrix isolation method
    • G01N2021/8427—Coatings
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2201/00—Features of devices classified in G01N21/00
    • G01N2201/08—Optical fibres; light guides

Landscapes

  • Physics & Mathematics (AREA)
  • Biochemistry (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
  • Spectrometry And Color Measurement (AREA)
  • Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)
JP60032965A 1984-02-24 1985-02-22 分光光度計 Expired - Lifetime JPH0746077B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE19843406645 DE3406645A1 (de) 1984-02-24 1984-02-24 Spektralfotometeranordnung
DE3406645.4 1984-02-24

Publications (2)

Publication Number Publication Date
JPS60194331A JPS60194331A (ja) 1985-10-02
JPH0746077B2 true JPH0746077B2 (ja) 1995-05-17

Family

ID=6228658

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60032965A Expired - Lifetime JPH0746077B2 (ja) 1984-02-24 1985-02-22 分光光度計

Country Status (5)

Country Link
US (1) US4669873A (enExample)
JP (1) JPH0746077B2 (enExample)
DE (1) DE3406645A1 (enExample)
FR (1) FR2560381B1 (enExample)
GB (1) GB2155173B (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011064676A (ja) * 2009-08-18 2011-03-31 Horiba Ltd 分析装置

Families Citing this family (32)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2588656B1 (fr) * 1985-10-16 1990-02-09 Bertin & Cie Appareil de spectro-colorimetrie a fibres optiques
US4790669A (en) * 1986-04-08 1988-12-13 Cv Technology, Inc. Spectroscopic method and apparatus for optically measuring temperature
US4738535A (en) * 1986-07-22 1988-04-19 Pacific Scientific Company Optical instrument employing fiber optics to direct light through tilting filter wheel
GB8618159D0 (en) * 1986-07-25 1986-09-03 Pa Consulting Services Spectrometer based instruments
DE3627232C2 (de) * 1986-08-11 1995-11-16 Leybold Ag Fotometer
JPS63115730U (enExample) * 1987-01-21 1988-07-26
JPS63200108A (ja) * 1987-02-10 1988-08-18 シレイ・インコーポレーテッド 複数の経路を用いた光学システム
CA1301859C (en) * 1988-02-25 1992-05-26 Kiyoshi Ichimura Automatic gain control circuit
US4874240A (en) * 1988-03-01 1989-10-17 Hoechst Celanese Characterization of semiconductor resist material during processing
US4886355A (en) * 1988-03-28 1989-12-12 Keane Thomas J Combined gloss and color measuring instrument
US4948256A (en) * 1988-09-14 1990-08-14 Industrial Technology Research Institute Optical fiber type colorimeter
DE3939148A1 (de) * 1989-11-27 1991-05-29 Kernforschungsz Karlsruhe Zweistrahl-spektrometer
US5212537A (en) * 1990-07-12 1993-05-18 Applied Materials, Inc. Calibration technique for monochromators and spectrophotometers
FR2677120B1 (fr) * 1991-05-30 1994-07-01 Bussotti Jean Dispositif de mesures photometriques a base de fibres optiques, et appareils equipes d'un tel dispositif.
US5204922A (en) * 1991-10-22 1993-04-20 Puritan-Bennett Corporation Optical signal channel selector
DE4138157A1 (de) * 1991-11-21 1993-05-27 Krupp Ag Verfahren zum bestimmen der dicke einer beschichtung
FR2686691B1 (fr) * 1992-09-10 1997-07-25 Jean Franck Bussotti Dispositif de couplage de fibres optiques sur un photometre, et appareils equipes d'un tel dispositif.
DE4236264C1 (enExample) * 1992-10-27 1993-09-02 Fraunhofer-Gesellschaft Zur Foerderung Der Angewandten Forschung Ev, 80636 Muenchen, De
US5377000A (en) * 1993-04-29 1994-12-27 Color And Appearance Technology, Inc. Portable appearance measuring apparatus
JP3308135B2 (ja) * 1994-11-01 2002-07-29 松下電器産業株式会社 インプロセス膜厚モニター装置及び方法
DE19528855A1 (de) * 1995-08-05 1997-02-06 Leybold Ag Verfahren und Vorrichtung zur spektralen Remissions- und Transmissionsmessung
US5774209A (en) * 1996-10-08 1998-06-30 Spectronic Instruments, Inc. Transmittance cell for spectrophotometer
DE19815080C1 (de) * 1998-04-06 1999-09-09 Inst Physikalische Hochtech Ev Anordnung zur Erhöhung der spektralen Ortsauflösung eines Spektrometers
DE19928171B4 (de) * 1999-06-19 2011-01-05 Leybold Optics Gmbh Verfahren zur kontinuierlichen Bestimmung der optischen Schichtdicke von Beschichtungen
DE10019258C1 (de) * 2000-04-13 2001-11-22 Fraunhofer Ges Forschung Verfahren zur Vakuumbeschichtung bandförmiger transparenter Substrate
US7244937B1 (en) * 2002-10-15 2007-07-17 Raytheon Company Optical measurement apparatus with laser light source
EP1591750B1 (de) * 2004-04-26 2016-04-13 Applied Materials GmbH & Co. KG Verfahren und Vorrichtung zur Regelung der Dicke einer Beschichtung auf einem in seiner Längsrichtung bewegten Band
ATE348331T1 (de) 2004-05-22 2007-01-15 Applied Materials Gmbh & Co Kg Beschichtungsanlage mit einer messvorrichtung für die messung von optischen eigenschaften von beschichteten substraten
US7130062B2 (en) * 2005-01-28 2006-10-31 Raytheon Company Rapid-response electron-beam deposition system having a controller utilizing leading and trailing deposition indicators
JP5728239B2 (ja) * 2010-03-02 2015-06-03 株式会社荏原製作所 研磨監視方法、研磨方法、研磨監視装置、および研磨装置
ES2366290B1 (es) * 2010-10-20 2012-08-27 Abengoa Solar New Technologies S.A. Espectrofotómetro para caracterización óptica automatizada de tubos colectores solares y método de funcionamiento.
ES2569550A1 (es) * 2014-10-10 2016-05-11 Consejo Superior De Investigaciones Científicas (Csic) Espectrofotómetro

Family Cites Families (25)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3463595A (en) * 1965-11-08 1969-08-26 Macbeth Corp Fiber optics aperture
GB1179413A (en) * 1966-02-17 1970-01-28 Barr & Stroud Ltd Apparatus for Use in Vacuum Deposition of Thin Films
US3541341A (en) * 1968-02-21 1970-11-17 Gen Electric Redundant fiber-optic light guide construction
FI44171B (enExample) * 1970-05-15 1971-06-01 Ollituote Oy
US3697185A (en) * 1970-08-06 1972-10-10 Technicon Instr Method and apparatus for the time sharing of multiple channel analysis means
DE2207194C3 (de) * 1972-02-16 1975-12-18 Du Pont De Nemours (Deutschland) Gmbh, 4000 Duesseldorf Densitometer
USRE29138E (en) * 1972-05-23 1977-02-15 International Business Machines Corporation System for performing spectral analyses under computer control
GB1392379A (en) * 1972-08-17 1975-04-30 Rank Organisation Ltd Analytical apparatus
US3874799A (en) * 1973-06-01 1975-04-01 Color Control Inc Method and apparatus for color spectrophotometry
US3885879A (en) * 1973-06-25 1975-05-27 Fisher Scientific Co Dual beam spectrophotometer utilizing a spectral wedge and bifurcated fiber optic bundle
DE2655272A1 (de) * 1976-12-07 1978-06-08 Leybold Heraeus Gmbh & Co Kg Spektralfotometeranordnung
DE2726606A1 (de) * 1977-06-13 1978-12-21 Max Planck Gesellschaft Medizinisches spektralfotometer
JPS567037A (en) * 1979-06-29 1981-01-24 Fumio Inaba Remote substance density analyzing optical measuring apparatus
DE2929883A1 (de) * 1979-07-24 1981-02-19 Kessler Manfred Spektrometer mit lichtleitern
JPS56168145A (en) * 1980-05-29 1981-12-24 Ishikawajima Harima Heavy Ind Co Ltd Multichannel radiation flux measuring device
DE2947791C2 (de) * 1979-11-28 1985-04-18 Licentia Patent-Verwaltungs-Gmbh, 6000 Frankfurt Einrichtung zur Farbüberwachung von bogen- oder bahnförmigen, in Bewegung befindlichen Materialien, insbesondere der Druckmaterialien von Druckmaschinen
JPS56119822A (en) * 1980-02-27 1981-09-19 Toshiba Corp Multichannel spectral radiometer
JPS56131448U (enExample) * 1980-03-07 1981-10-06
US4328068A (en) * 1980-07-22 1982-05-04 Rca Corporation Method for end point detection in a plasma etching process
SE8006827L (sv) * 1980-09-30 1982-03-31 Asea Ab Fiberoptiskt metdon med kompensation for reflexioner i fiberoptiken och med mojlighet till samtidig metning av flera metstorheter
JPS5773632A (en) * 1980-10-27 1982-05-08 Ushio Inc Method and device for detecting light irradiation state
JPS57131037A (en) * 1981-02-04 1982-08-13 Shimadzu Corp Tablet elusion/analysis tester
JPS57131007A (en) * 1981-02-06 1982-08-13 Shimadzu Corp Film thickness gauge
DE3148738A1 (de) * 1981-12-04 1983-06-09 Siemens AG, 1000 Berlin und 8000 München Einrichtung zum messen physikalischer groessen
US4566792A (en) * 1983-02-04 1986-01-28 Shimadzu Corporation Multi-channel spectrophotometric measuring device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011064676A (ja) * 2009-08-18 2011-03-31 Horiba Ltd 分析装置

Also Published As

Publication number Publication date
FR2560381A1 (fr) 1985-08-30
DE3406645A1 (de) 1985-08-29
JPS60194331A (ja) 1985-10-02
FR2560381B1 (fr) 1991-07-05
US4669873A (en) 1987-06-02
GB8503865D0 (en) 1985-03-20
GB2155173A (en) 1985-09-18
GB2155173B (en) 1987-12-09
DE3406645C2 (enExample) 1990-06-28

Similar Documents

Publication Publication Date Title
JPH0746077B2 (ja) 分光光度計
EP0177387B1 (fr) Equipement d'émission et de distribution de lumière par fibres optiques, notamment pour le contrôle spectrophotométrique en ligne à l'aide d'un spectrophotomètre double faisceau
US5880823A (en) Method and apparatus for measuring atomic vapor density in deposition systems
KR101279911B1 (ko) 오류 검출 및 처리 모니터링을 위해 사용되는 방사 분석 광학 모니터링 시스템의 보정
US5156461A (en) Multi-point pyrometry with real-time surface emissivity compensation
US5317656A (en) Fiber optic network for multi-point emissivity-compensated semiconductor wafer pyrometry
US5255286A (en) Multi-point pyrometry with real-time surface emissivity compensation
US8338194B2 (en) Method for the in-situ determination of the material composition of optically thin layers
CA2254650C (en) Sputtering method and apparatus with optical monitoring
US4408123A (en) Fiber optical sensor device for measuring a physical parameter
JPH0854210A (ja) 薄層構造体の表面層の局限区域の形態と厚さを原位置実時間観測する方法と装置
US4832490A (en) Photometer
JPS5844961B2 (ja) 膜厚制御または監視装置
JPH0439004B2 (enExample)
US6879744B2 (en) Optical monitoring of thin film deposition
EP1859228B1 (de) Messanordnung und verfahren zum optischen monitoring von beschichtungsprozessen
US4201479A (en) Device for measuring the reflection of a plane, specularly reflecting surface
US6620249B2 (en) Method and apparatus for depositing thin layers
JP3656038B2 (ja) 光学モニタ及び薄膜形成装置
Emiliani et al. Fast scan spectrometer for monitoring of thin film optical properties
JPS6073407A (ja) 膜厚モニタ
US20070019204A1 (en) Spectrometer based multiband optical monitoring of thin films
Deans et al. Transmittance Measurements Of Thermal Imaging Lenses
HK1187398A1 (en) Optical film thickness measurement apparatus and thin-film forming apparatus using optical film thickness measurement apparatus
HK1187398B (en) Optical film thickness measurement apparatus and thin-film forming apparatus using optical film thickness measurement apparatus