JPS57131007A - Film thickness gauge - Google Patents

Film thickness gauge

Info

Publication number
JPS57131007A
JPS57131007A JP1714781A JP1714781A JPS57131007A JP S57131007 A JPS57131007 A JP S57131007A JP 1714781 A JP1714781 A JP 1714781A JP 1714781 A JP1714781 A JP 1714781A JP S57131007 A JPS57131007 A JP S57131007A
Authority
JP
Japan
Prior art keywords
film
fibers
passing
optical fibers
film thickness
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1714781A
Other languages
Japanese (ja)
Other versions
JPH0370764B2 (en
Inventor
Masahito Koike
Kunihiko Okubo
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shimadzu Corp
Shimazu Seisakusho KK
Original Assignee
Shimadzu Corp
Shimazu Seisakusho KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shimadzu Corp, Shimazu Seisakusho KK filed Critical Shimadzu Corp
Priority to JP1714781A priority Critical patent/JPS57131007A/en
Publication of JPS57131007A publication Critical patent/JPS57131007A/en
Publication of JPH0370764B2 publication Critical patent/JPH0370764B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
    • G01B11/0691—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of objects while moving

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)

Abstract

PURPOSE:To enable measuring of a thickness of a film covering a large area by a simple constitution, by a method wherein, in an interference system film thickness gauge, a projection surface and a collecting surface are formed with optical fibers alined on a rectilineal line. CONSTITUTION:A film 5 to be measured is irradiated with a white light from a xenon lamp 1 passing through a focusing leans 2 and a plural number of optical fibers 3. The optical fibers 3 are alined on a rectilineal line through the aid of a crosspiece, and are positioned perpnedicularly to the moving direction of the film 5. A light passing through the film is led to a spectroscope 9 after passing through fibers 8. The end surface of the fibers 8 are collected in an overlapping manner in an incident slit 10 and in the direction of the length of the slit. The light forms a spectral picture on a collecting surface of a photographing element 12 by means of a concave spherical diffraction grid 11. Their respective lights from the fibers correspond to A, B, and C. A film thickness is found from a wave length corresponding to a maximum spectrum related to each of the bands A, B, and C. The increase in the number of the fibers permits the improvement of the measuring density in the direction of the width of the film.
JP1714781A 1981-02-06 1981-02-06 Film thickness gauge Granted JPS57131007A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1714781A JPS57131007A (en) 1981-02-06 1981-02-06 Film thickness gauge

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1714781A JPS57131007A (en) 1981-02-06 1981-02-06 Film thickness gauge

Publications (2)

Publication Number Publication Date
JPS57131007A true JPS57131007A (en) 1982-08-13
JPH0370764B2 JPH0370764B2 (en) 1991-11-08

Family

ID=11935875

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1714781A Granted JPS57131007A (en) 1981-02-06 1981-02-06 Film thickness gauge

Country Status (1)

Country Link
JP (1) JPS57131007A (en)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS622104A (en) * 1985-06-28 1987-01-08 Oak Seisakusho:Kk Film thickness gauge
US4669873A (en) * 1984-02-24 1987-06-02 Leybold-Heraeus Gmbh Spectrophotometer
EP0267712A2 (en) * 1986-11-12 1988-05-18 Measurex Corporation On-line (paper) sheet formation characterizing device
KR100409090B1 (en) * 2000-11-27 2003-12-11 케이맥(주) apparatus for measurement of thin film thickness in micro-pattern
JP2006030070A (en) * 2004-07-20 2006-02-02 Opto One Kk Film thickness inspection device
JP2006058056A (en) * 2004-08-18 2006-03-02 Opto One Kk Spectral film thickness measuring device

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4669873A (en) * 1984-02-24 1987-06-02 Leybold-Heraeus Gmbh Spectrophotometer
JPS622104A (en) * 1985-06-28 1987-01-08 Oak Seisakusho:Kk Film thickness gauge
EP0267712A2 (en) * 1986-11-12 1988-05-18 Measurex Corporation On-line (paper) sheet formation characterizing device
KR100409090B1 (en) * 2000-11-27 2003-12-11 케이맥(주) apparatus for measurement of thin film thickness in micro-pattern
JP2006030070A (en) * 2004-07-20 2006-02-02 Opto One Kk Film thickness inspection device
JP2006058056A (en) * 2004-08-18 2006-03-02 Opto One Kk Spectral film thickness measuring device

Also Published As

Publication number Publication date
JPH0370764B2 (en) 1991-11-08

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