FR2560381B1 - Appareil de spectrophotometrie, en particulier pour mesurer la variation des proprietes optiques pendant la formation sous vide de couches minces sur des substrats - Google Patents

Appareil de spectrophotometrie, en particulier pour mesurer la variation des proprietes optiques pendant la formation sous vide de couches minces sur des substrats

Info

Publication number
FR2560381B1
FR2560381B1 FR858502356A FR8502356A FR2560381B1 FR 2560381 B1 FR2560381 B1 FR 2560381B1 FR 858502356 A FR858502356 A FR 858502356A FR 8502356 A FR8502356 A FR 8502356A FR 2560381 B1 FR2560381 B1 FR 2560381B1
Authority
FR
France
Prior art keywords
substrates
variation
measuring
optical properties
thin films
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
FR858502356A
Other languages
English (en)
French (fr)
Other versions
FR2560381A1 (fr
Inventor
Peter Wirz
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Balzers und Leybold Deutschland Holding AG
Original Assignee
Leybold Heraeus GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Leybold Heraeus GmbH filed Critical Leybold Heraeus GmbH
Publication of FR2560381A1 publication Critical patent/FR2560381A1/fr
Application granted granted Critical
Publication of FR2560381B1 publication Critical patent/FR2560381B1/fr
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/255—Details, e.g. use of specially adapted sources, lighting or optical systems
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N2021/1734—Sequential different kinds of measurements; Combining two or more methods
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/8422—Investigating thin films, e.g. matrix isolation method
    • G01N2021/8427—Coatings
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2201/00—Features of devices classified in G01N21/00
    • G01N2201/08—Optical fibres; light guides

Landscapes

  • Physics & Mathematics (AREA)
  • Biochemistry (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
  • Spectrometry And Color Measurement (AREA)
  • Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)
FR858502356A 1984-02-24 1985-02-19 Appareil de spectrophotometrie, en particulier pour mesurer la variation des proprietes optiques pendant la formation sous vide de couches minces sur des substrats Expired - Lifetime FR2560381B1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19843406645 DE3406645A1 (de) 1984-02-24 1984-02-24 Spektralfotometeranordnung

Publications (2)

Publication Number Publication Date
FR2560381A1 FR2560381A1 (fr) 1985-08-30
FR2560381B1 true FR2560381B1 (fr) 1991-07-05

Family

ID=6228658

Family Applications (1)

Application Number Title Priority Date Filing Date
FR858502356A Expired - Lifetime FR2560381B1 (fr) 1984-02-24 1985-02-19 Appareil de spectrophotometrie, en particulier pour mesurer la variation des proprietes optiques pendant la formation sous vide de couches minces sur des substrats

Country Status (5)

Country Link
US (1) US4669873A (enExample)
JP (1) JPH0746077B2 (enExample)
DE (1) DE3406645A1 (enExample)
FR (1) FR2560381B1 (enExample)
GB (1) GB2155173B (enExample)

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DE3627232C2 (de) * 1986-08-11 1995-11-16 Leybold Ag Fotometer
JPS63115730U (enExample) * 1987-01-21 1988-07-26
JPS63200108A (ja) * 1987-02-10 1988-08-18 シレイ・インコーポレーテッド 複数の経路を用いた光学システム
CA1301859C (en) * 1988-02-25 1992-05-26 Kiyoshi Ichimura Automatic gain control circuit
US4874240A (en) * 1988-03-01 1989-10-17 Hoechst Celanese Characterization of semiconductor resist material during processing
US4886355A (en) * 1988-03-28 1989-12-12 Keane Thomas J Combined gloss and color measuring instrument
US4948256A (en) * 1988-09-14 1990-08-14 Industrial Technology Research Institute Optical fiber type colorimeter
DE3939148A1 (de) * 1989-11-27 1991-05-29 Kernforschungsz Karlsruhe Zweistrahl-spektrometer
US5212537A (en) * 1990-07-12 1993-05-18 Applied Materials, Inc. Calibration technique for monochromators and spectrophotometers
FR2677120B1 (fr) * 1991-05-30 1994-07-01 Bussotti Jean Dispositif de mesures photometriques a base de fibres optiques, et appareils equipes d'un tel dispositif.
US5204922A (en) * 1991-10-22 1993-04-20 Puritan-Bennett Corporation Optical signal channel selector
DE4138157A1 (de) * 1991-11-21 1993-05-27 Krupp Ag Verfahren zum bestimmen der dicke einer beschichtung
FR2686691B1 (fr) * 1992-09-10 1997-07-25 Jean Franck Bussotti Dispositif de couplage de fibres optiques sur un photometre, et appareils equipes d'un tel dispositif.
DE4236264C1 (enExample) * 1992-10-27 1993-09-02 Fraunhofer-Gesellschaft Zur Foerderung Der Angewandten Forschung Ev, 80636 Muenchen, De
US5377000A (en) * 1993-04-29 1994-12-27 Color And Appearance Technology, Inc. Portable appearance measuring apparatus
JP3308135B2 (ja) * 1994-11-01 2002-07-29 松下電器産業株式会社 インプロセス膜厚モニター装置及び方法
DE19528855A1 (de) * 1995-08-05 1997-02-06 Leybold Ag Verfahren und Vorrichtung zur spektralen Remissions- und Transmissionsmessung
US5774209A (en) * 1996-10-08 1998-06-30 Spectronic Instruments, Inc. Transmittance cell for spectrophotometer
DE19815080C1 (de) * 1998-04-06 1999-09-09 Inst Physikalische Hochtech Ev Anordnung zur Erhöhung der spektralen Ortsauflösung eines Spektrometers
DE19928171B4 (de) * 1999-06-19 2011-01-05 Leybold Optics Gmbh Verfahren zur kontinuierlichen Bestimmung der optischen Schichtdicke von Beschichtungen
DE10019258C1 (de) * 2000-04-13 2001-11-22 Fraunhofer Ges Forschung Verfahren zur Vakuumbeschichtung bandförmiger transparenter Substrate
US7244937B1 (en) * 2002-10-15 2007-07-17 Raytheon Company Optical measurement apparatus with laser light source
EP1591750B1 (de) * 2004-04-26 2016-04-13 Applied Materials GmbH & Co. KG Verfahren und Vorrichtung zur Regelung der Dicke einer Beschichtung auf einem in seiner Längsrichtung bewegten Band
ATE348331T1 (de) 2004-05-22 2007-01-15 Applied Materials Gmbh & Co Kg Beschichtungsanlage mit einer messvorrichtung für die messung von optischen eigenschaften von beschichteten substraten
US7130062B2 (en) * 2005-01-28 2006-10-31 Raytheon Company Rapid-response electron-beam deposition system having a controller utilizing leading and trailing deposition indicators
JP2011064676A (ja) * 2009-08-18 2011-03-31 Horiba Ltd 分析装置
JP5728239B2 (ja) * 2010-03-02 2015-06-03 株式会社荏原製作所 研磨監視方法、研磨方法、研磨監視装置、および研磨装置
ES2366290B1 (es) * 2010-10-20 2012-08-27 Abengoa Solar New Technologies S.A. Espectrofotómetro para caracterización óptica automatizada de tubos colectores solares y método de funcionamiento.
ES2569550A1 (es) * 2014-10-10 2016-05-11 Consejo Superior De Investigaciones Científicas (Csic) Espectrofotómetro

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US3541341A (en) * 1968-02-21 1970-11-17 Gen Electric Redundant fiber-optic light guide construction
FI44171B (enExample) * 1970-05-15 1971-06-01 Ollituote Oy
US3697185A (en) * 1970-08-06 1972-10-10 Technicon Instr Method and apparatus for the time sharing of multiple channel analysis means
DE2207194C3 (de) * 1972-02-16 1975-12-18 Du Pont De Nemours (Deutschland) Gmbh, 4000 Duesseldorf Densitometer
USRE29138E (en) * 1972-05-23 1977-02-15 International Business Machines Corporation System for performing spectral analyses under computer control
GB1392379A (en) * 1972-08-17 1975-04-30 Rank Organisation Ltd Analytical apparatus
US3874799A (en) * 1973-06-01 1975-04-01 Color Control Inc Method and apparatus for color spectrophotometry
US3885879A (en) * 1973-06-25 1975-05-27 Fisher Scientific Co Dual beam spectrophotometer utilizing a spectral wedge and bifurcated fiber optic bundle
DE2655272A1 (de) * 1976-12-07 1978-06-08 Leybold Heraeus Gmbh & Co Kg Spektralfotometeranordnung
DE2726606A1 (de) * 1977-06-13 1978-12-21 Max Planck Gesellschaft Medizinisches spektralfotometer
JPS567037A (en) * 1979-06-29 1981-01-24 Fumio Inaba Remote substance density analyzing optical measuring apparatus
DE2929883A1 (de) * 1979-07-24 1981-02-19 Kessler Manfred Spektrometer mit lichtleitern
JPS56168145A (en) * 1980-05-29 1981-12-24 Ishikawajima Harima Heavy Ind Co Ltd Multichannel radiation flux measuring device
DE2947791C2 (de) * 1979-11-28 1985-04-18 Licentia Patent-Verwaltungs-Gmbh, 6000 Frankfurt Einrichtung zur Farbüberwachung von bogen- oder bahnförmigen, in Bewegung befindlichen Materialien, insbesondere der Druckmaterialien von Druckmaschinen
JPS56119822A (en) * 1980-02-27 1981-09-19 Toshiba Corp Multichannel spectral radiometer
JPS56131448U (enExample) * 1980-03-07 1981-10-06
US4328068A (en) * 1980-07-22 1982-05-04 Rca Corporation Method for end point detection in a plasma etching process
SE8006827L (sv) * 1980-09-30 1982-03-31 Asea Ab Fiberoptiskt metdon med kompensation for reflexioner i fiberoptiken och med mojlighet till samtidig metning av flera metstorheter
JPS5773632A (en) * 1980-10-27 1982-05-08 Ushio Inc Method and device for detecting light irradiation state
JPS57131037A (en) * 1981-02-04 1982-08-13 Shimadzu Corp Tablet elusion/analysis tester
JPS57131007A (en) * 1981-02-06 1982-08-13 Shimadzu Corp Film thickness gauge
DE3148738A1 (de) * 1981-12-04 1983-06-09 Siemens AG, 1000 Berlin und 8000 München Einrichtung zum messen physikalischer groessen
US4566792A (en) * 1983-02-04 1986-01-28 Shimadzu Corporation Multi-channel spectrophotometric measuring device

Also Published As

Publication number Publication date
FR2560381A1 (fr) 1985-08-30
DE3406645A1 (de) 1985-08-29
JPS60194331A (ja) 1985-10-02
US4669873A (en) 1987-06-02
JPH0746077B2 (ja) 1995-05-17
GB8503865D0 (en) 1985-03-20
GB2155173A (en) 1985-09-18
GB2155173B (en) 1987-12-09
DE3406645C2 (enExample) 1990-06-28

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