JPH0745081Y2 - ペリクル構造体 - Google Patents

ペリクル構造体

Info

Publication number
JPH0745081Y2
JPH0745081Y2 JP1990061661U JP6166190U JPH0745081Y2 JP H0745081 Y2 JPH0745081 Y2 JP H0745081Y2 JP 1990061661 U JP1990061661 U JP 1990061661U JP 6166190 U JP6166190 U JP 6166190U JP H0745081 Y2 JPH0745081 Y2 JP H0745081Y2
Authority
JP
Japan
Prior art keywords
pellicle
frame
adhesive layer
release liner
peeling
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1990061661U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0420049U (enrdf_load_html_response
Inventor
稔 藤田
敏男 賀屋
Original Assignee
三井石油化学工業株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 三井石油化学工業株式会社 filed Critical 三井石油化学工業株式会社
Priority to JP1990061661U priority Critical patent/JPH0745081Y2/ja
Publication of JPH0420049U publication Critical patent/JPH0420049U/ja
Application granted granted Critical
Publication of JPH0745081Y2 publication Critical patent/JPH0745081Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

JP1990061661U 1990-06-11 1990-06-11 ペリクル構造体 Expired - Lifetime JPH0745081Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1990061661U JPH0745081Y2 (ja) 1990-06-11 1990-06-11 ペリクル構造体

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1990061661U JPH0745081Y2 (ja) 1990-06-11 1990-06-11 ペリクル構造体

Publications (2)

Publication Number Publication Date
JPH0420049U JPH0420049U (enrdf_load_html_response) 1992-02-19
JPH0745081Y2 true JPH0745081Y2 (ja) 1995-10-11

Family

ID=31590112

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1990061661U Expired - Lifetime JPH0745081Y2 (ja) 1990-06-11 1990-06-11 ペリクル構造体

Country Status (1)

Country Link
JP (1) JPH0745081Y2 (enrdf_load_html_response)

Also Published As

Publication number Publication date
JPH0420049U (enrdf_load_html_response) 1992-02-19

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