JPH0744015Y2 - 基板の液切り装置 - Google Patents
基板の液切り装置Info
- Publication number
- JPH0744015Y2 JPH0744015Y2 JP1987051290U JP5129087U JPH0744015Y2 JP H0744015 Y2 JPH0744015 Y2 JP H0744015Y2 JP 1987051290 U JP1987051290 U JP 1987051290U JP 5129087 U JP5129087 U JP 5129087U JP H0744015 Y2 JPH0744015 Y2 JP H0744015Y2
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- air
- chamber
- port
- air knife
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000000758 substrate Substances 0.000 title claims description 96
- 238000007664 blowing Methods 0.000 claims description 5
- 238000005507 spraying Methods 0.000 claims 1
- 239000007788 liquid Substances 0.000 description 36
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 31
- 238000004140 cleaning Methods 0.000 description 27
- 238000001035 drying Methods 0.000 description 13
- 239000003595 mist Substances 0.000 description 12
- 238000000034 method Methods 0.000 description 8
- 239000000428 dust Substances 0.000 description 7
- 238000005530 etching Methods 0.000 description 7
- 230000000694 effects Effects 0.000 description 6
- 238000009736 wetting Methods 0.000 description 4
- 238000010521 absorption reaction Methods 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 238000007599 discharging Methods 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 239000004973 liquid crystal related substance Substances 0.000 description 2
- 239000011347 resin Substances 0.000 description 2
- 229920005989 resin Polymers 0.000 description 2
- 239000012530 fluid Substances 0.000 description 1
- 238000011010 flushing procedure Methods 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 238000004381 surface treatment Methods 0.000 description 1
- 238000005406 washing Methods 0.000 description 1
Landscapes
- Cleaning In General (AREA)
- Manufacturing Of Printed Wiring (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987051290U JPH0744015Y2 (ja) | 1987-04-03 | 1987-04-03 | 基板の液切り装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987051290U JPH0744015Y2 (ja) | 1987-04-03 | 1987-04-03 | 基板の液切り装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63157928U JPS63157928U (enrdf_load_stackoverflow) | 1988-10-17 |
| JPH0744015Y2 true JPH0744015Y2 (ja) | 1995-10-09 |
Family
ID=30875407
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987051290U Expired - Lifetime JPH0744015Y2 (ja) | 1987-04-03 | 1987-04-03 | 基板の液切り装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0744015Y2 (enrdf_load_stackoverflow) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100854466B1 (ko) * | 2001-09-05 | 2008-08-27 | 도쿄엘렉트론가부시키가이샤 | 기판건조방법 및 기판건조장치 |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2699911B2 (ja) * | 1995-02-28 | 1998-01-19 | 日本電気株式会社 | エアナイフ乾燥方法 |
| JP2002159922A (ja) * | 2000-11-29 | 2002-06-04 | Sharp Corp | 超音波洗浄装置 |
| JP4543794B2 (ja) * | 2004-07-09 | 2010-09-15 | 国立大学法人東北大学 | 平板状部材の搬送装置 |
| JP6088011B2 (ja) * | 2014-08-29 | 2017-03-01 | ＡｖａｎＳｔｒａｔｅ株式会社 | ガラス基板の製造方法、及び、ガラス基板の製造装置 |
| CN114160498A (zh) * | 2021-11-26 | 2022-03-11 | 江西省正百科技有限公司 | 一种设有干燥功能的有机玻璃生产用双面清洗装置 |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5295967A (en) * | 1976-02-09 | 1977-08-12 | Hitachi Ltd | Wafer washing and drying unit |
| JPS5932057B2 (ja) * | 1979-08-27 | 1984-08-06 | 富士通株式会社 | マスク洗浄装置 |
| JPS5850742A (ja) * | 1981-09-21 | 1983-03-25 | Mitsubishi Electric Corp | ウエ−ハ洗浄乾燥装置 |
-
1987
- 1987-04-03 JP JP1987051290U patent/JPH0744015Y2/ja not_active Expired - Lifetime
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100854466B1 (ko) * | 2001-09-05 | 2008-08-27 | 도쿄엘렉트론가부시키가이샤 | 기판건조방법 및 기판건조장치 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS63157928U (enrdf_load_stackoverflow) | 1988-10-17 |
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