JPH0744013Y2 - ウェーハ薬液処理装置 - Google Patents

ウェーハ薬液処理装置

Info

Publication number
JPH0744013Y2
JPH0744013Y2 JP9068389U JP9068389U JPH0744013Y2 JP H0744013 Y2 JPH0744013 Y2 JP H0744013Y2 JP 9068389 U JP9068389 U JP 9068389U JP 9068389 U JP9068389 U JP 9068389U JP H0744013 Y2 JPH0744013 Y2 JP H0744013Y2
Authority
JP
Japan
Prior art keywords
carrier
carrier table
chemical treatment
wafer
liquid tank
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP9068389U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0330427U (enExample
Inventor
博行 池田
照雄 大西
Original Assignee
関西日本電気株式会社
ニチデン機械株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 関西日本電気株式会社, ニチデン機械株式会社 filed Critical 関西日本電気株式会社
Priority to JP9068389U priority Critical patent/JPH0744013Y2/ja
Publication of JPH0330427U publication Critical patent/JPH0330427U/ja
Application granted granted Critical
Publication of JPH0744013Y2 publication Critical patent/JPH0744013Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Cleaning By Liquid Or Steam (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Weting (AREA)
JP9068389U 1989-07-31 1989-07-31 ウェーハ薬液処理装置 Expired - Lifetime JPH0744013Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9068389U JPH0744013Y2 (ja) 1989-07-31 1989-07-31 ウェーハ薬液処理装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9068389U JPH0744013Y2 (ja) 1989-07-31 1989-07-31 ウェーハ薬液処理装置

Publications (2)

Publication Number Publication Date
JPH0330427U JPH0330427U (enExample) 1991-03-26
JPH0744013Y2 true JPH0744013Y2 (ja) 1995-10-09

Family

ID=31640199

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9068389U Expired - Lifetime JPH0744013Y2 (ja) 1989-07-31 1989-07-31 ウェーハ薬液処理装置

Country Status (1)

Country Link
JP (1) JPH0744013Y2 (enExample)

Also Published As

Publication number Publication date
JPH0330427U (enExample) 1991-03-26

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