JPH0738248Y2 - ベルト式熱処理炉の蛇行調整装置 - Google Patents

ベルト式熱処理炉の蛇行調整装置

Info

Publication number
JPH0738248Y2
JPH0738248Y2 JP1988076561U JP7656188U JPH0738248Y2 JP H0738248 Y2 JPH0738248 Y2 JP H0738248Y2 JP 1988076561 U JP1988076561 U JP 1988076561U JP 7656188 U JP7656188 U JP 7656188U JP H0738248 Y2 JPH0738248 Y2 JP H0738248Y2
Authority
JP
Japan
Prior art keywords
belt
meandering
drum
heat treatment
treatment furnace
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1988076561U
Other languages
English (en)
Japanese (ja)
Other versions
JPH01180411U (enrdf_load_stackoverflow
Inventor
精吉 奏野
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toyota Motor Corp
Original Assignee
Toyota Motor Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toyota Motor Corp filed Critical Toyota Motor Corp
Priority to JP1988076561U priority Critical patent/JPH0738248Y2/ja
Publication of JPH01180411U publication Critical patent/JPH01180411U/ja
Application granted granted Critical
Publication of JPH0738248Y2 publication Critical patent/JPH0738248Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Structure Of Belt Conveyors (AREA)
  • Control Of Conveyors (AREA)
  • Tunnel Furnaces (AREA)
JP1988076561U 1988-06-09 1988-06-09 ベルト式熱処理炉の蛇行調整装置 Expired - Lifetime JPH0738248Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1988076561U JPH0738248Y2 (ja) 1988-06-09 1988-06-09 ベルト式熱処理炉の蛇行調整装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1988076561U JPH0738248Y2 (ja) 1988-06-09 1988-06-09 ベルト式熱処理炉の蛇行調整装置

Publications (2)

Publication Number Publication Date
JPH01180411U JPH01180411U (enrdf_load_stackoverflow) 1989-12-26
JPH0738248Y2 true JPH0738248Y2 (ja) 1995-08-30

Family

ID=31301581

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1988076561U Expired - Lifetime JPH0738248Y2 (ja) 1988-06-09 1988-06-09 ベルト式熱処理炉の蛇行調整装置

Country Status (1)

Country Link
JP (1) JPH0738248Y2 (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100977740B1 (ko) * 2008-05-30 2010-08-24 세메스 주식회사 기판 이송 장치 및 이를 기판 처리 장치

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS49108775A (enrdf_load_stackoverflow) * 1973-02-20 1974-10-16

Also Published As

Publication number Publication date
JPH01180411U (enrdf_load_stackoverflow) 1989-12-26

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