JPH0731869Y2 - 真空パット - Google Patents
真空パットInfo
- Publication number
- JPH0731869Y2 JPH0731869Y2 JP1989130971U JP13097189U JPH0731869Y2 JP H0731869 Y2 JPH0731869 Y2 JP H0731869Y2 JP 1989130971 U JP1989130971 U JP 1989130971U JP 13097189 U JP13097189 U JP 13097189U JP H0731869 Y2 JPH0731869 Y2 JP H0731869Y2
- Authority
- JP
- Japan
- Prior art keywords
- pad
- seal member
- housing
- plate material
- ball
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Landscapes
- Delivering By Means Of Belts And Rollers (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1989130971U JPH0731869Y2 (ja) | 1989-11-13 | 1989-11-13 | 真空パット |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1989130971U JPH0731869Y2 (ja) | 1989-11-13 | 1989-11-13 | 真空パット |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH0370835U JPH0370835U ( ) | 1991-07-17 |
JPH0731869Y2 true JPH0731869Y2 (ja) | 1995-07-26 |
Family
ID=31678504
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1989130971U Expired - Lifetime JPH0731869Y2 (ja) | 1989-11-13 | 1989-11-13 | 真空パット |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0731869Y2 ( ) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5926021B2 (ja) * | 2011-09-26 | 2016-05-25 | 新日本無線株式会社 | 半導体素子搬送ヘッド |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH047910Y2 ( ) * | 1986-04-25 | 1992-02-28 |
-
1989
- 1989-11-13 JP JP1989130971U patent/JPH0731869Y2/ja not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
JPH0370835U ( ) | 1991-07-17 |
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