JPH0370835U - - Google Patents

Info

Publication number
JPH0370835U
JPH0370835U JP13097189U JP13097189U JPH0370835U JP H0370835 U JPH0370835 U JP H0370835U JP 13097189 U JP13097189 U JP 13097189U JP 13097189 U JP13097189 U JP 13097189U JP H0370835 U JPH0370835 U JP H0370835U
Authority
JP
Japan
Prior art keywords
housing
plate material
slit
atmosphere
seal member
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP13097189U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0731869Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1989130971U priority Critical patent/JPH0731869Y2/ja
Publication of JPH0370835U publication Critical patent/JPH0370835U/ja
Application granted granted Critical
Publication of JPH0731869Y2 publication Critical patent/JPH0731869Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Delivering By Means Of Belts And Rollers (AREA)
JP1989130971U 1989-11-13 1989-11-13 真空パット Expired - Lifetime JPH0731869Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1989130971U JPH0731869Y2 (ja) 1989-11-13 1989-11-13 真空パット

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1989130971U JPH0731869Y2 (ja) 1989-11-13 1989-11-13 真空パット

Publications (2)

Publication Number Publication Date
JPH0370835U true JPH0370835U ( ) 1991-07-17
JPH0731869Y2 JPH0731869Y2 (ja) 1995-07-26

Family

ID=31678504

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1989130971U Expired - Lifetime JPH0731869Y2 (ja) 1989-11-13 1989-11-13 真空パット

Country Status (1)

Country Link
JP (1) JPH0731869Y2 ( )

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013066988A (ja) * 2011-09-26 2013-04-18 New Japan Radio Co Ltd 半導体素子搬送ヘッド

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62174895U ( ) * 1986-04-25 1987-11-06

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62174895U ( ) * 1986-04-25 1987-11-06

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013066988A (ja) * 2011-09-26 2013-04-18 New Japan Radio Co Ltd 半導体素子搬送ヘッド

Also Published As

Publication number Publication date
JPH0731869Y2 (ja) 1995-07-26

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