JPH0370835U - - Google Patents
Info
- Publication number
- JPH0370835U JPH0370835U JP13097189U JP13097189U JPH0370835U JP H0370835 U JPH0370835 U JP H0370835U JP 13097189 U JP13097189 U JP 13097189U JP 13097189 U JP13097189 U JP 13097189U JP H0370835 U JPH0370835 U JP H0370835U
- Authority
- JP
- Japan
- Prior art keywords
- housing
- plate material
- slit
- atmosphere
- seal member
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000463 material Substances 0.000 claims description 4
- 238000007789 sealing Methods 0.000 claims 2
Landscapes
- Delivering By Means Of Belts And Rollers (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1989130971U JPH0731869Y2 (ja) | 1989-11-13 | 1989-11-13 | 真空パット |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1989130971U JPH0731869Y2 (ja) | 1989-11-13 | 1989-11-13 | 真空パット |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH0370835U true JPH0370835U ( ) | 1991-07-17 |
JPH0731869Y2 JPH0731869Y2 (ja) | 1995-07-26 |
Family
ID=31678504
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1989130971U Expired - Lifetime JPH0731869Y2 (ja) | 1989-11-13 | 1989-11-13 | 真空パット |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0731869Y2 ( ) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2013066988A (ja) * | 2011-09-26 | 2013-04-18 | New Japan Radio Co Ltd | 半導体素子搬送ヘッド |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS62174895U ( ) * | 1986-04-25 | 1987-11-06 |
-
1989
- 1989-11-13 JP JP1989130971U patent/JPH0731869Y2/ja not_active Expired - Lifetime
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS62174895U ( ) * | 1986-04-25 | 1987-11-06 |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2013066988A (ja) * | 2011-09-26 | 2013-04-18 | New Japan Radio Co Ltd | 半導体素子搬送ヘッド |
Also Published As
Publication number | Publication date |
---|---|
JPH0731869Y2 (ja) | 1995-07-26 |